Nghiên cứu chế tạo chuyển mạch nhiệt quang và ứng dụng

DAI
HOC QUOC GIA HA NOI
NGHIEN
CtJU
CHE TAO CHUYEN MACH
NHIET QUANG VA UNG DUNG
(Bao cao tong hgp
De tai Nghien
ciiu
khoa hoc dac biet
cap
Dai hoc
Qu6c
gia Ha Noi)
OAI HOC QUOC GIA HA NOI
TI^UNG
TAM THONG TIN
THU
VIEN
PT/5r>^
Ma so:
QG-04.01
Chu nhiem de tai:
PGS-TS
NGUYfiN
NANG DINH
Ha
Noi 2005
MUC
lUC
« «

'. ^^
I. PHAN MODAU
LI.
Cac chu viet tat
1.2.
Danh sach
nhihig
ngudi tham gia thuc hien
1.3.
Danh muc cac hinh
1.4.
Tom
tdt
nhung ket qua chinh
II.
NOI
DUNG
CHINH
1.
Dat
va'n
de
2.
Tong quan cac
va'n
de nghien
cun
3.
Dia diem, thoi gian va phuong phap nghien
cihi

4.
Noi dung va ket qua nghien
cun
4.1.
Noi dung cac bao cao chuyen de
4.2.
Cong nghe che tao
mlu
va phuong phap nghien
ciiu
4.3.
Ket qua nghien
cun
4.3.1 Che tao mSu
4.3.2 Nghien
cun
tinh
chat
5.
Thao luan va kien nghi
5.1.
Thao luan
5.2. Kien nghi
III.
TAI
LEU
THAM KHAO
IV.
PHULUC
V . PHIEU DANG

K?
KET QUA NGHIEN
CLfU
KH-CN
L PHAN Md
DAU
LI.
Cac chur viet
tdt
KHVL: Khoa hoc
vat lieu
DHCN: Dai hoc Cong nghe
BDKL: Ban dan - Kim loai
NDP:
Nhiet
d6
phong
NDCP: Nhiet do chuyen pha
SEM: Scanning Electron Microscope (Hien vi dien tu
quet)
XRD:
X-ray diffraction (Nhieu xa tia X)
1.2.
Danh sach
nhOmg nguoi
tham gia thuc hien
STT
1
2
3

4
5
6
7
8
9
10
11
12
13
Ho ten
PGS-TS Nguyen Nang Dinh
TS.
Tran Thi Tam
Th.S.Vu Ngoc Cham
TS.Nguyen Phuong Hoai Nam
PGS-TS.
Nguyln Thi Bao Ngoc
HVCH.
Le Ha Chi
TS.
Pham Duy Long
KS.
D6
Xuan Mai
CN- Dang Van Thanh
KSC.
Dang Quoc Trung
KSC.
Tran Anh Vu

KS.
Le Huu Minh
NCS.
Th.S.Le
Dinh
Trong
Co quan cong tac
Trucmg DHCN, DHQGHN
-
-
-
-
-
Vien KHVL, Vien KHCN VN
-
-
-
-
-
DHSP Ha Noi II, Xuan Hoa
1.3.
Danh muc cac
hinh
Hinh 1. So d6 he chan khong co chum tia dien
tir.
1.
Sling dien tu, 2. Chen va vat lieu goc, 3. De va ga de co
be'p
d6t,
Van dieu chinh d5ng

khi
6xy,
5. Tu dieu khien
Hmh
2. Anh SEM be mat mang mong oxyt vanadi hoc bay bangky thuat chu
tia dien tu.
Hinh 3. Gian do XRD tren mang
VO2
tai NDP (A), dot nong
80°C
(B) va
Sc
khi de
ngu6i vl
NDP (C),
Hmh
4.
Pho tan xa Raman cua mang mong
VO2
tai nhiet do 25
**C-NDP
(1), t
90
'^C
(2) va tra lai NDP (3).
Hinh
5. Anh SEM mat cat vuong goc cua mang mong
VOj.
Hinh
6. Dien trd suat phu thuoc vao nhiet do cua mang mong

VO2.
Hinh
7. Pho truyen qua cua mang mong
VO2
tai nhiet do 27
'^C
(<
x^)
va
90'
Hmh 8. Anh SEM chyp
be
mat cua mang
VO2 truac
(phan tren) va sau khi
1
ket tinh (phan duoi)
Hmh 9. Pho truyen qua cua mang
VO2
nano tai hai vung nhiet do thap
hi
NDCP
(30°C)
va cao hon NDCP
(80°C)
Hmh 10. Pho truyen qua
ciia
mang
VO2
nano tai hai vung nhiet do thap

b
NDCP
(30°C)
va cao hon NDCP
(80°C)
Hmh
11.
So do cau tao cam bien nhiet quang.
1-
Dau
sgi
quang co phu lop mang mong
VO2
2-
Bg
phat, thu laser va so sanh tin hieu nhiet-quang
3-
Vi tinh va hien thi so sanh pho.
1.4.
Tom
tdt nhOmg
ket qua chinh
1.
Ten de tai:
Nghien curu che tao chuyen mach nhiet quang va ung dung
2.
Ma
so: QG-04.01
3.
Nhufng

ket qua
chinh
a, Ket qua ve khoa
hpc
(nhirng dong gop cua de tai, cac cong trinh khoa hoc cong bo)
Xay dung phuong phap cong nghe che' tao mang
VO2
micro va nano co
tinh chSit
cam bien nhiet quang. Cac ke't qua
chinh
dugc tong ke't
a
5 cong
trinh
va bao cao khoa
hoc dudi day:
1 Nguyln Nang Dinh, Linh kien quang dien tu tren ca sa mang mong
VO2
che tao
bang chum tia dien
tii.
Tap chi Khoa hoc DHQGHN, KHTN&CN,
T.XXI,
so 2AP.
(2005)tr.8-15
2 Nguyln Nang Dinh, Le Dinh Trgng,
Ifng
dung
phd tdng

trd de nghien
cicu
tinh
chat ddn ion cua mang mong chat
ran.
Tap
chi
khoa hgc va cong nghe, Vien
KH&CN Viet Nam , nhan dang 12/2005
3 N.N.Dinh,
T.T.Tam,
V.X.Huong, D.H.Thanh, Electrical and Optical properties of
nano-structured
VO2
thin films prepared by e-beam
deposition,
Gui dang trong
Coom.in Physics, nhan dang 12/2005,
4 Nguyen Nang Dinh, Do Phuong Anh, Le Dinh Trong, Electrochromic properties
of vanadium oxide films made by high voltage
spraying.
Advances in Nat.Sci.,
nhan
dang 12/2005.
5 Nguyln Nang Dinh, Tran Thi Tam, Nghien
cihi
che tao cam bien nhiet quang tren
casdmdng
mong
VO2

cau
trite
nano, B/c tai Hoi nghi Vat ly toan quoc lan
thii
6,
Ha
Noi,
23-25/11/2005.
b,
Ket
qudphiic
vu
thitc te(cAc
san pham cong nghe, kha nang ung dung thuc it)
Che tao thu cam bien nhiet quang, co hieu ung cam bien tot, Co the ap dung vao
thuc te giam sat nhiet do moi truong chat long, khi doc lai.
K^iU
UlZ-t/i^-Nl^V^iT^
,
c.
Ket qua dao tao
(s6'
lugng sinh vien, hgc vien cao hgc, NCS lam viec trong de tai)
Le Binh
Trgng
NCS nam
thii
hai; da co ket qua tdt ve che' tao
mSu
bang

chum tia dien
tir,
khao sat
tinh chsft
nhiet sac va cam bien
nhiet quang.
Trdn Quang Trung NCS nam cu6'i; da hoan thanh Ban thao luan an
TS,
se bao
ve luan an trong nam 2006.
Le Hd Chi
Hgc vien Cao hgc
KION;
se bao ve luan van trong thang
12 nam 2005.
d.
Kit qua ndng cao tiem luc khoa
hgc
(nang cao trinh do can bg va tang cucmg
tran^
thiet bi cho don vi)
Nang cao
trinh
do NCKH cho tap the khoa hgc, giang vien trong nhom Dl tai
Trong do mot
s6'
can bg
tiir
trinh
d6

cut nhan thanh thac sy,
tijr
thac sy thanh tien sy.
Gop phan nang ca'p mot
sd
he thuc nghiem phuc vu do dac tinh cha't dien.
e.
Tinh hinh sii
diing
kinh phi
Da thanh quyet toan
dSy
dia va dung theo quy dinh cua Phong Ke
toan-Tai
vu
Trucmg Dai hgc Cong nghe, DHQGHN.
CHU NHIEM DE TAI
PGS-TS Nguyln Nang Dinh
XAC NHAN CUA DON VI
HIEU
TRUONG
^^.t^rp>e^^S^
f
T
XAC NHAN
CO
QUAN CHU QUAN
L Titlle
of the project:
Investigation of preparation of

thermo-optical
switching and application
2.
Project code: QG-04.01
3.
Main results
a. Scientific results (contributions and
pubhcations).
Developing technological method for preparation of micro- and nanostructured
vanadium dioxide films with thermo-optical switching properies. The results have
been
reported in 5 published scientific works, as follows:
1 N. N. Dinh,
Opto-electronic
devices based on
VO2
thin films made by electron-
beam-deposition, J. Sci.VNUH,
Nat.Sci.&Tech.,
V.XXI,
No.2AR
(2005)
pp.8-15
2 N. N. Dinh, L. D. Trong, Application of impedance technique for investigation oi
ionic conducting properties of
tliin
solid films, J. Sci & Tech. VAST, to be
pubhsbed
in Dec. 2005
3 N.N.Dinh, T.T.Tam, V.X.Huong, D.H.Thanh, Electrical and

Optical
properties
oj
nano-structured
VO2
thin films prepared by e-beam deposition, J. Coom. ir
Physics, to be published in Dec. 2005.
4 Nguyen Nang Dinh, Do Phuong Anh, Le Dinh Trong, Electrochromic
properties
of vanadium oxide films made by high voltage
spraying.
Advances in Nat.Sci., tc
be
pubhshed
in Dec. 2005.
5 N. N. Dinh, T. T. Tam, Investigation of preparation of thermo-optical
sensors
based on nanostructured
VO2
thin films, Proc. the 6-th Nat.Conf.on Physics
Hanoi
23-25/11/2005.
b.
Application results (produces, application potentials)
Preparation of prototype thermo-optical
svv^itching
devices used for
monitoring
temperature change in oil or/and gaseous toxic storages.
c. Education results (number of students of

BS,
MSc and doctors working in
tht
subject)
Le Dinh
Trong,
Mr. Ph.D. student in the second academic year; having good
results in electron-beam technique for samples
preparation and characterisation of theirs properties.
Tran Quang Trung, Ph.D. student in the last year; fulfilled the dissertation
Mr. being defended in next year (2006).
Le Ha
Chi,
Mrs. MSc. student
-¥1^
Cao hgc
KION;
se bao ve luan van
trong thang
12
nam 2005.
d. Results in the improvement of scientific power (scientific staff-members and
equipments)
Improvement of science and technology experiences of the team, some of them have
been got higher degree in science, e.g. from BS to MSc., from MSc. to Ph.D. degrees.
Partial contribution in up-grading some characterization set-ups.
e. Financial expenditures
Efficient use of the provided finacial sum of 60 milion VND and this sum has been
completely cleared up.
Director of the Project

Assoc.Prof
Nguyen Nang Dinh
n.
NOI
DUNG CHINH
1.
Datv^nde
. Vat
ueu
nhiet quang hay con ggi la nhiet
sdc
(thermochromic) dugc nhieu tap
the khoa hgc tren the gidi
chii
trgng nghien cun la do vat lieu nay co nhieu
tinh
cha't
dac biet ly thu va kha nang ung dung vao thuc tiln rat
tilm
tang, Trong so vat lieu
nhiet quang thi mang mong
VO2
la vat lieu thich hgp nhat de thie't ke' che' tao
b6
dong
ngat
trong he vi chuyen mach th6ng minh. Oxyt vanadi khong hgp
thu'e
co tinh cha't
nhay

khi,
nhit
la ddi vdi
loai khi
doc hai hay dl chay nhu
hcfi
con. Khi mang mong
6xyt vanadi tiep
xiic
vdi loai khi nay thi dien tro
bl
mat thay doi dang ke. Vi vay,
mang mong 6xyt vanadi con co trien vgng ung dung trong
linh
vuc sensor khi de bao
d6c,
bao chay gop
ph^n
gin giu va bao ve moi trucmg. Mot
tinh
cha't quan trgng khac
cua
VO2
the hien
a ch6
khi nhiet
d6
ciia mang dat den diem chuyen pha ban
din
kim

loai
thi
ca
tinh
chat dien va quang ciia chung deu bie'n
d6i
mot
each
dot nggt va mang
tinh thuan nghich. Do vay, viec nghien cun cong nghe che' tao chuyen mach nhiet
quang khong nhung gop
phSn
nang cao trinh
d6
khoa hgc cong nghe vl quang dien tu
va quang tu cho can bg khoa hgc, giang vien ma con md ra kha nang ung dung vao
thuc tiln che' tao cam bien nhiet quang su dung de phat hien nguong nhiet
d6
cua moi
trucmg gay chay no, doc hai ciia cha't long, xang
ddu
hay cha't khi.
2.
Tong quan cac van de nghien
cihi
- Nhu
cSu
bao chay tai cac kho tang
khi
gidi hay cac tram xang dau ngay cang tro nen

cap bach. Hien nay viec bao chay dugc thuc hien thong qua cac cam bien nhiet do va
bao khoi chi thuc hien dugc tai cac cong trinh cong cong, nha
a,
kho kho. De bao
nguong nhiet do nguy hiem ngay trong tec xang dau hay
a
nhung khu vuc kho tang khi
gidi bi mat dat
each
xa tram quan sat
thi
cac cam bie'n hien dang su dung la khong
thich hgp. Do la do phan
Idn
cam bien nhiet dien
diu
phai dung den dien truong (dien
the') hay dong dien, khi phai nhung
chim
trong xang dau se gay nguy hiem hoac do
khoang
each tCr
noi dat cam bie'n den may do qua
Idn
khie'n do chinh xac giam nhanh.
- De khac phuc cac nhugc diem tren co the su dung loai senso nhiet-quang, senso nay
lam viec tren nguyen ly khi nhiet do tang den mot nguong nhat dinh
thi
chiet suat cua
vat lieu trong senso thay doi, dan den do truyen qua/phan xa thay doi. Qua viec giam

sat do truyen qua, phan xa cua vat lieu co the phat
hien-chinh
xac su thay d6i cua nhiet
do trong moi truong (chat khi hoac chat long). Loai cam bien nay co uu
diim:
• Su dung cap quang truyin tin hieu cho
nen
co the dat dau cam bien vao
trong chat long hay tai cac dia
diim each
xa tram theo doi;
•
La m6t
loai cam bien nhiet - quang cho nen
d^
duy tri hoat dong ciia senso
-
i
.
„
khong
cdn
co dong dien.
- Dl tai nghien
ciiu
mang
tinh
cong nghe cao, tap trung giai quyet cac va'n dl vl sii
dung ky thuat bdc bay
chiam

tia dien tit di che' tao mang mong
VO2
co tinh chit nhiet
sac,
CO
kha nang cam bie'n nhiet quang; nghien cun cac
tinh
cha't chuyin mach nhiet
quang ciia mSu mang mong
VO2 ctfu
tnic micro, nano va kha nang
iing
dung ciia cam
bi^n
nhiet quang.
Che tao mang mong
VO2
nhiet sac tren co
s6
oxyt vanadi co
thi
tien hanh bang
nhilu phuong phap khac nhau, tuy nhien ky thuat chan kh6ng dung chum tia dien tii
(bdc bay chiim tia dien tii)
vSn
la mdt trong sd phuong phap mang lai ket qua tdt va
hieu qua. Cac budc cong nghe trong phuong phap chiim tia dien tii va anh hudng ciia
che'
d6
cong nghe len tinh chat vat ly ciia mang mong

VO2,
dac biet la tinh chat nhiet-
quang la cac va'n de chinh trong nghien cun cong nghe che' tao
mlu.
Trong do, cac
tham sd cong nghe nhu tdc
d6
bdc bay, nhiet
d6
de, dieu kien
xir
ly nhiet, cac loai de'
khac nhau nhu thuy tinh phang, cap quang, dugc
chii
trgng nghien cun.
Trong phan nghien
ciiu
tinh cha't, di tai tap trung vao dac trung tinh cha't chuyen
mach nhiet dien va nhiet quang ciia mang
VO2
che' tao bang
chiim
tia dien tii. Co che'
va tinh cha't nhiet
sdc,
kha nang cam bie'n nhiet quang cua vat lieu mang mong nay.
3.
Dia diem,
thcri
gian va phuong phap nghien curu

Cac nghien
ciiu
cong nghe dugc tien hanh tai PTN lien ke't giiia Trucmg Dai hgc
Cong nghe (DHQGHN) va Vien Khoa hgc Vat lieu (Vien KHCNVN).
Nghien
ciiu
va dac trung tfnh cha't dugc tien hanh tai Khoa Vat ly ky thuat va
Cong nghe nano, Truong DHCN. Sii dung cac trang thiet bi trong Khoa va ciia
Trung tam KHVL, Trucmg DHKHTN (DHQGHN) , Vien KHVL, Vien KHCNVN
dl phan tich ca'u
triic
vat
lieu,
do dac cac thong sd va dac trung cac tinh chat ciia
mang mong
VO2.
Thoi gian nghien cun dugc bat dau tii 5/2004 va ket
thiic
vao thang 12/2005.
4.
Noi dung va ket qua nghien curu
4.L
Noi dung cac bao cao chuyen de
Chuyen de 1
''Cong
nghe chitm tia dien tu
vd
che tao mang mong nhiet quang
"
Trinh bay tdng quan cac phuong phap che tao mang mong nhiet

sk
tren co so
oxyt vanadi, trong do co ky thuat chan khong dung chiim tia dien
tir
(phuong phap
10
chiim tia dien tii). Cac budc c6ng nghe trong phucmg phap chiim tia dien tii va su anh
hudng ciia
chd d6
cong nghe len
tinh chit
vat ly cua mang mong
VO2,
dac biet la tinh
chit nhiet-quang. Dd la tdc
d6
bdc bay, nhiet do dd, dieu kien xii ly nhiet, cac loai de'
khac nhau nhu
Si,
thach anh, thuy tinh ciu hinh phang, ciu
hinh
tru (cap quang),
Chuyen dl 2:
'Tinh
chat chuyen mach nhiet quang trong ban ddn
oxyt"
Nghien Clin tinh chit chuyin mach nhiet dien va nhiet quang ciia cac chit ban
dan thdng thudng va ban dSn 6xyt (ban dan
viing
cim rong), dac biet nhin manh den

loai di-6xit vanadi (VO2).
Trinh
bay co che' va
tinh
chit nhiet quang ciia mang mong
nhiet sac.
Neu ra cac
linh
vuc ung dung trong ky thuat va ddi sdng ciia vat lieu bien ddi
nhiet quang, do la
• Tu dong hoa va dieu khien:
sir
dung trong viec chd tao may dieu nhiet, thie't bi
chdng lai su qua tai nhiet, qua dien ap, dilu
khiln
tdc do mo to, bg kich xuit
hien plazma va role nhiet.
• Quang - dien tii: mang mong nhiet sac co trien vgng
iing
dung trong
linh
vuc
ciia s6 th6ng minh.
• Chuyen mach nhiet-quang: ke't hgp
sir
dung he laser ban
dSn
va cap quang, vat
lieu phun phii nhiet quang dugc
sir

dung de che tao thiet bi bao nguong nhiet do
ciia xang dau, chit long va chat khi doc hai.
4.2.
Cong nghe che tao
mau
va
phuorng
phap nghien curu
Tien hanh thuc nghiem che tao vat lieu mang mong
VO2
tren cac de
trong sudt nhu thuy tinh chiu nhiet, thach anh, sgi quang, v.v Nhan tha'y thuy
tinh Corning glass 2476 va sgi quang co the dung lam de thich hgp de che tao
senso nhiet quang;
Khao sat ciu
true
tinh the bang phuong phap nhilu xa tia X, cau
true
phan tii bang phd tan xa Raman cua cac
mSu
che tao dugc;
Nghien
ciiu
tinh chat nhiet quang cua vat lieu thong qua cac phep do phd
truyen qua, phan xa phu thuoc nhiet do,
tim
ra dieu kien tdi un trong cong nghe
tao mau
CO
nhiet cam bien viing thich hgp;

11
4.3.
Ket qua nghien curu
4.3.1 Che tao mdu
Mang mong
6xyt
vanadi dugc
lang
dgng tren de thuy tinh bang ky thuat chum ti
dien tii thuc hien tren he YBH-75-PI
(Hinh
1). Vat lieu gdc
diing
dl bdc bay la
be
dxyt
vanadi
V2O3
hoac
VO2
hay hdn hgp cac oxyt
V2O3
va
V2O5
dugc ep than
vien (0 = 10 mm;
1
= 8 mm). Vat lieu gdc nay dugc dat vao bdc dung vat lieu tron
budng chan khong, ap suit cd
thi

dat tir
10^
den
lO'^Torr.
Khoang
each tir
vat lieu
gd
den de' ket tinh tii 30 den 50 cm. Nhiet do dd dugc
giu"
cd dinh tai nhung gia tri tron
khoang
tijt
200 ddn 400
"C.
Dong catdt
c6
8 den 10 A; Dong tai (andt) dat tii 40 den 8
mA. Thdi gian bdc bay tii 10 de'n 15
phiit.
Ngudn nang lugng diing de
kich
thich ca
phin tii bay hoi la chiim tia dien tii co nang lugng cao dugc hoi tu tren bia vat
liei
D6ng
nang ciia dien tii co the dat tir 7 den 10 keV tuy thuoc vao dien the' cao ap. Chiir
tia
CO
kich thudc tieu diem vao co

Imml
Khi hoi tu vao ngudn vat lieu, nd tao
nen
mc
viing
nhiet do rit cao lam cho cac phin tii ciia vat lieu bi thang hoa hay bdc hoi.
Chiin
tdi dd lien ket tao thanh mang
mong tren dd. Trong trucmg hgp
vat lieu gdc la
V2O3,
mang mong
hinh thanh sau khi lang dgng
thudng cd mau den, the hien mau
ciia vat lieu giau kim loai vanadi.
Mau ciia mang chuyen sang mau
xanh
sSm
khi vat lieu gdc dugc six
dung tuong la
VO2
va vang nau
ddi vdi vat lieu gdc
V20g.
Do
sang dan ciia mang lang dgng the
hien
miic
do thieu hut oxy ft hon.
Dudi day la anh SEM chup be mat

mau mang mong oxit vanadi
(Hinh 2) lang dgng tii vat lieu gdc
V2O3,
cho tha'y kich thudc micro
mang cd do min tuong ddi cao.
Hinh 1.
So
do he chan khong co
chiim
tia dien
1.
Sung dien
tii,
2.
Chen
vd
vat lieu
goc,
3.
De
gd deed hep
dot,
4.
Van dieu chinh ddng hhi
5. Tu
dieu khien
12
.':-•: \.
r-ik
V^'i

Hinh
2. Anh SEM bl mat mang mong oxyt vanadi bdc bay bang
ky thuat
chiim
tia dien tii.
4.3.2 Nghien
cthi
tinh chat
a. Can
true
tinh the . Bang cong nghe chiim tia dien tii ket hgp vdi quy
trinh
tai ket
tinh thich hgp chiing tdi da nhan dugc mang mong dcm pha
VO2
tai nhiet do phong cd
ciu
true
mang tinh the thudc he don ta.
VO2
co chuyin pha BDKL tai nhiet do trong
khoang
65°C -^
68"C,
do thang giang ciia NDCP phu thudc vao phuong phap che tao va
ban chit vat lieu de. Dl khao sat mdt
each
tudng minh su thay ddi ciu tnic tinh the
trong qua trinh chuyen pha BDKL, chiing tdi su dung phuong phap phan tich nhilu xa
tia X ngay tren miu dugc ddt ndng. MSu dugc ga dat tren phie'n thuy tinh dan dien

In203:
Sn
(ITO)
kich thudc 10 x 20
cm^
che tao tai phong VL&CN Mang mong, dien
trd bl mat ciia ITO la 50
Q/^,
khi dat dien ap mot chieu
tir
5 V de'n 20 V len hai dai
tiep xuc thi
VO2
dugc cung cap mdt nhiet lugng dii
Idn
de dat nhiet do trong khoang
tir
30"CdenlOO"C.
NDCP cua
VO2
nam trong dai nhiet do nay. Do vay bang viec ghi cac gian dd
nhilu xa tia X tren
m4u
ddt ndng d nhiet do khac nhau cd the khao sat su thay ddi cau
triic
ciia mang
VO2
theo nhiet do.
13
i

Tren
hinh
3 trinh bay ba gian dd nhilu xa tia X ghi dugc tren miu d NDP, tai
80"C
va sau khi de ngudi ve NDP. Tii cac gian dd nay cd
thi
nhan thiy su bien ddi
thuan nghich cua ciu triic tinh
thi VOj tii
pha dcm ta sang pha
tii
giac. Thuc vay, tren
hinh 3A la gian dd nhilu xa tia X ciia mang d NDP
(<x^)
cd hai dinh nhilu xa tai gdc
20
= 39,96 va 40,35 do, tuong ung vdi cac mat mang tinh
thi
cd khoang
each
d =
2,253;
2,233 A" thudc ciu triic mang don ta ciia tinh the
VO2.
Ddt ndng miu den nhiet
dd 80
"C
(>
xj
, hai dinh nhilu xa nay dich vl vi

tri
tuong
iing
vdi goc
20
=
39,81
va
40,05 do vdi mat mang co khoang
each
d = 2,262; 2,248
A°
thudc ciu triic mang
tii
giac cua tinh
thi VO2
(Hinh 3B). Nhu vay hai dinh nhilu xa tai gdc
29
= 39,96 va
40,35 do da dich tuong
iing
0,15 do va 0,30 do ve phfa gdc nhd,
nghia
la khoang
each
d
da tang len mot
lirgng
Ad
«

0,0125
A°,
ciu
true
mang tinh
thi VO2
dugc sip xep lai vdi
bac ddi xiing cao hon. De miu ngudi trd vl NDP, hai
dinh
nhilu xa nay lai dich ve vi
tri ban dau
(Hinh
3C). Tren co sd phan tfch ban chit ciia hai pha ciu
true
mang tinh the
VO2
nhan thay,
sir
dich thay ddi
Idioang each
mang tinh
thi
nhu tren la hoan toan
phii
hgp vdi su dich chuyen khdng
Idn
lim ciia cac vi trf nut mang tii dcm ta sang
tii
giac.
60

(CPS)
CO-
'^C
•0
5^
-a
(J 20
1 1 1 1 1 1 1 1 1 1
r
1 1 1 1 1 1 1
1 1 1
A
-
jr/)^-^^^
-
^^^W
vJV^
-
1
-1
1 1
<
1 1 1 1 1
1
1 t 1 1 1 1
1
{
1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1
/\
—

/ \
c -
X
A
^^^
VAJV
A
-
1 1
1
1 1 1 1 1 1
t
1 1
r
1 1 1 1 1 1 I 1
36 37 38 39 40 41 42 43
29
(do)
Hjnh
:>.
Gian do XRD ciia mang mong
VO2
tai NDP (A), tai 80
"C
(B)
va sau khi dl ngudi trd ve NDP (C).
14
Ke't qua nay chiing td chuyin pha BDKL trong
VO2
thuc chit la chuyin pha loai I - gin

liln
vdi su thay ddi ciu tnic mang tinh
thi.
Nhu da bidt ciu
true
mang tinh
thi
d trang
thai
bin vfing
khi nang lugng tu do trong lien ket cd gia tri nhd nhit. Dilu nay chiing
td tai nhiet dd cao
hem
x^
nang luong tu do ciia mang
tii
giac nhd, ngugc lai tai nhiet dd
thip
hem Tc thi
mang dcm ta lai cho gia tri nang lugng tu do nhd
hem.
b. Cau triic phan
tit.
Chiing tdi cung dung ngudn ddt
mlu
tuong tu nhu tren gin vdi he
do phd tan xa micro-Raman
LABRAM-IB
de khao sat su thay ddi ciu
true

phan tii ciia
lien ke't
VO2
trong chuyin pha BDKL. Day la phep do phd Raman
tiic
thi ("in situ
Raman scattering spectra") khao sat su thay ddi phd dao dgng phan tii phu thudc vao
nhiet dd.
1800 -
r
1500
*<o
D)
1200
c
§
-
900
D)
600
O
300
T
1 1 1 1 1 1 1 1 1 1
T
CJ
O
CD
^ ^
CO

O
^
C5
^
to
2
-
J
I I I
.
1 • I • 1
200
400 600 800 1000 1200
So song
(cm"^)
Hinh
4. Pho tan xa Raman ciia mang mong
VO2
tai
nhiet do 25
"C-NDP
(1),
90 'C
(2) va trd lai NDP (3).
Mdt trong sd cac ke't qua
diln
hinh vl
VO2
dugc trinh bay tren hinh 4. Tai NDP,
cac dinh dac trung cua lien ket V-0 trong mang don ta xuit hien tai cac vi trf

ciia
sd
sdng 192 cm', 220 cm', 304
cm',
386
cm'l,
420 cm' va 610 cm''). Phd nay hoan toan
phii
hop vdi va phd Raman tren
mSu VO2
tinh the khdi. Khi mang dugc ddt ndng den
90"C
(>
Tc)
cac
dinh
192 cm"', 220 cm"' va 610 cm"' bie'n mat, xuat hien cac dinh khac
tai sd sdng 526 cm"' va 968 cm"'
iing
vdi cau triic tinh the cd bac ddi xiing mang cao
hon. Dieu nay chiing td hai dinh tai 526 cm' va 968 cm"' la dac
trun^
cho dao
ddn^
15
phan tii ciia cac lien kdt V-O trong mang
tii
giac ciia tinh the
VO2.
Khi miu ngudi vl

NDP phd tan xa Raman lai dugc thidt lap nhu phd ban diu. Phd tan xa Raman ciia
mang mong
VO2
phu thudc nhiet dd cung mang
tinh
thuan nghich, gidng nhu trong
phep do ciu
true
tinh
thi
d phin tren. Su thay ddi phd Raman d nhiet dd cao cung ndi
len ring, mang tinh
thi VO2
da dugc cung cip mot nhiet
lucmg
cin thiet lam dich
chuyin cac nguyen tii vanadi vl vi
tri
cin bang
iing
vdi nang lugng tu do thip nhit
trong lien kdt mang.
Nhu vay, bang hai phep do in situ ve ciu
true
tinh
thi
va phd tan xa Raman
diu
nhin dugc hien tugng chuyin pha BDKL mang
tinh

thuan nghich.
c. Tinh chat dien vd
qiians
cl.
Tinh
chat dien. Dl xac dinh chinh xac NDCP, chiing tdi da thuc hien phep
do dien trd bl mat (dien trd vudng) phu thudc vao nhiet dd. MSu dugc dat trong
thermostat, cac tiep
xiic
dmic kim loai tren
VO2
dugc ndi vdi may do dien trd. Gia tri
ciia dien trd vudng dugc tinh ra dien trd suit theo cdng
thiic
p =
Rn
x d.
Chilu
day d
ciia mang mdng
VO2
dugc kilm tra khdng
chi
bang thie't Ellipsometer tren co sd
phuong phap do triet tieu anh sang ma con dugc do bang ca phuong phap hien vi dien
tii quet (SEM), chup mat cat vudng gdc ciia miu. SEM cho thiy, mang cd do day vao
khoang 230 nm (Hinh 5)
Hinh 5. Anh SEM mat cat vudng goc
ciia mang mdng
VO2.

"'i""i
lillnliiiilMiiliriilriiilm.li iliiiili.
30 40 50 60 70 80
90100110120
Nhiet do (°C)
Hinh 6. Dien trd suat phu thuoc vao
nhiet do
ciia
mang mdng
VOj.
16
Ke't qua do dudng
tri
nhiet dien (trd suit - nhiet do) ciia miu dugc trinh bay tren
hinh
6, cd
thi
nhin thiy cac dac
diim
quan trgng sau day cua dudng
tri
nhiet:
- Tir NDP ddn
66°C
dien trd suit giam tuan theo quy luat ciia chit ban din, gia tri
nang lugng
kich
boat dat 0,35 eV;
- Tii 90
°C

trd len dien trd suit hiu nhu khdng thay ddi va cd xu hudng tang theo
chilu tang ciia nhiet do,
thi
hien qui luat vat lieu thudc pha kim loai. Trong dai nhiet
dd nay mdt kim loai thuin nhit nhu nhdm hay ddng se
thi
hien rd su giam do din
(dien trd suit tang) do do linh ddng ciia dien tu giam. Bieu hien nay quan sat thiy khi
miu dugc ddt ndng
tii
100
°C
trd len thi dien trd suit tuong ling tang tii p = 3 x
10^
Q.cm
de'n p = 3,5 x
10"*
Q.cm.
- Tai nhiet dd
67,0°C
±0,1
^C
gia tri dien trd suit ciia mang giam rit nhanh,
"budc nhay"
(tiic
la ty sd
p^J
PKJ
vao cd bang
10^

vdi dd
Idn
ciia dien trd suit p = 2 x
10"
Q.cm (tai nhiet dd
66°C)
giam xudng den p = 1,2 x
10"^
Q.cm (tai nhiet do
76"C)
va do rdng dudng
tri
nhiet la
8°C.
Dieu nay chiing td qua trinh chuyin pha BDKL da
xayratai67"C.
- Qua
trinh
xay ra ngugc lai khi miu dl ngudi, tai nhiet do
67"C
gia tri dien trd
suit ciia mang tang dot ngdt
(PKL/PBD
^ 10"^)»
cudi ciing nd dugc thie't lap lai gia tri
dien trd suit ciia pha ban
dSn.
c2.
Tinh chat quang. Trong chuyen pha BDKL chiet suit ciia
VO2

giam do ciu
triic tinh the thay ddi tii mang don ta sang mang
tii
giac lam cho do phan xa tang (do
truyin qua giam), nhit la trong viing hong ngoai. Tfnh chit nay rat co y nghia
iing
dung thuc tiln bdi vi trong tdng nang lugng ciia
biic
xa mat trdi chieu tren mat dit thi
biic
xa vung hong ngoai chiem tdi tren 50 %.
De khao sat do truyen qua phu thudc nhiet do ciia mang trong vung
biic
xa hdng
ngoai, mau can dugc dot ndng lien tuc trong sudt thdi gian do.
Do truyin qua phu thudc vao nhiet do cua
VO2
tai budc sdng X =
1^50
nm cung
da dugc khao sat, nhiet do cua miu dugc tang tir thap len cao (tii NDP den
90"C)
va
giam ngugc lai tii cao xudng thip. Trong khoang NDP den
66"C,
do truyen qua gan
nhu khdng thay ddi va dat co 65
%.
Dieu nay cd the dugc giai thich la do d nhiet dd
17

OAI
HOC QUOC
G\A
MA NOt
TRUNG
TAM
THONG
TIN
'W
^/'EM
PT /
51?F
thip
hem Tc VO2
thudc pha ban din cd dd phin
cue
ion
Idn
do dd cd chidt suit
Idn.
Khi
nhiet do tang len cao
hem
67
°C,
dd truyin qua giam ddt ngdt do mang
VO2
da chuyin
sang pha kim loai. Dd truyin qua giam xudng thip cdn 15 % va gin nhu khdng thay
ddi sudt dai nhiet dd

tir 75°C
den
90°C.
Dd truyen qua giam phan anh do phan xa tang
(vi dd hip thu
ciia
mang mdng
VO2
trong chuyin pha hiu nhu bang khdng). Vdi tinh
chit phan xa cao trong viing hdng ngoai, mang mdng
VO2
d nhiet do cao da
thi
hien ro
dac trung cua pha kim loai. Khi giam din nhiet do cua miu vl NDP, qua
trinh
xay ra
ngugc lai. Kdt qua cho thiy mang mdng
VO2
con cd tinh chit bien dieu nhiet - quang
thuan nghich.
Nhu da biet,
biic
xa mat trdi la
tap hgp
Idn
cac phdtdn vdi nhung
dai nang lugng khac nhau. Tuy
nhien, dai sdng
tur

300 den 2500 nm
la viing dugc quan tam nhilu hon
ca. Hieu
iing
nhiet sic cua mang
mdng
VO2
dugc khao sat trong
vung nay (hinh 7). O viing kha
kien, do truyin qua cua miu ddt
ndng
(T90
>
Tc),
Idn
hon khoang 10
500 1000 1500 2000 2500
Bu6c
song (nm)
Hinh 7. Pho truyin qua ciia mang mdng
VOj
tai
nhiet do 27
°C
(<
T,)
va
90 "C
(>
T,)

% so vdi do truyen qua ciia miu tai nhiet do phong
(T^^p
<
TJ.
Ngugc lai, d vung budc
sdng hdng ngoai, tii 750 nm den 2500 nm, khi T >
T^,
do truyen qua da giam xudng
dang kl, vi du tai budc sdng
A,
= 2300 nm do truyen qua giam
til
65 % xudng con 15
%.
Khi ha nhiet do xudng dudi
T^,
phd truyen qua dugc lap lai hoan toan triing vdi phd
ban dau. Hieu
iing
nhiet sic mang tinh thuan nghich.
d. Cam bien nhiet
ciuans
tren
casaVO-y
can
true
nano
dl. Cau
true
be mat. Mang

VO2
cau tnic nano
cQng
dugc che tao tir phucmg phap
bdc bay chiim tia dien
tii,
nhung de khong dugc dot ndng va tdc do bdc bay nhd hon.
Tiep theo cung la qua trinh
li
nhiet, vdi tdc do tang nhiet do
Idn
hon so vdi qua trinh u
trudc day.
18
Tir anh SEM
ciia
mat cit
miu
da xac dinh chieu day cua mang, vao khoang 210 nm.
Sau khi
u,
mang dugc
kSt
tinh,
chiSu
day tang len khoang 20 - 25 %. Vi mang bdc bay
len tren
dS
ngugi thudng la vd dinh hinh va giau vanadi
(thi6u

dxy), do trong qua trinh
tai
ket
tinh, cau tnic vd dinh hinh bien ddi thanh cau tnic tinh the,
cimg
vdi viec nhan
them dxy tir mdi trudng
li
(dxy hda nhiet). Trong cac thi nghiem trudc day, binh
thudng chieu day chi tang len cd 15 %.
DiSu
nay chiing td mang
VO2
nano cd do xdp
cao hon thudng le. Ciing tir anh SEM, nhung la anh
be
mat, cau tnic nano cua mang
VO2
the hien rat ro rang (hinh 8). Kich thudc trung binh
ciia
cac hat xac dinh tir anh
SEM la
llOnm.
Nghia la
Idp
mang mong
VO2,
mdt each gan dung, co the coi nhu
mdt
Idp

cau tao tir hai
Idp
don hat nand.
* Tinh
chat chuyen mach nhiet quang.
Mang mdng cau tnic nand co tinh chat
chuyen pha KLBD the hien rat rd tai nhiet
do
63°C
(hinh 9), thip hon NDCP cua mang
VO2
thdng thudng hay
VO2
tinh the khdi.
Dieu nay c6 the giai thich la do nang lugng
tu do trong vat lieu nand thap hon (bdi
sir
sap xep mat trat tu
ciia
cac hat nand dat
miic
do cao). Pha cau tnic ben viing
ciia
mdt vat
ran
tdn tai ung vdi nang lugng
tir
do thap
H*"*^
^- ^^^ SEM

chup bl mat
ciia
mang VO2 trudc (phan tren) va sau
nhat. Qua trinh chuyen pha KLBD xay ra khi tai
kit
tinh
(phk
dudi)
khi nhiet do
ciia
mau tang len den gia tri tdi
ban nhat dinh. Nang lugng can thiet cho qua trinh chuyin pha ty le thuan vdi nang
lugng tu do.
ve
mat ciu tnic tinh the, c6 the ndi, dd chinh la nang lugng tdi
thilu
dl "dich"
chuyen cac nguyen tir trong mang tinh the tir vi tri ciia mang don ta (img vdi pha ban
din)
sang vi tri ciia mang
tii
giac (img vdi pha kim loai). Do do tai NDCP dien trd
suit
ciia
mang
VO2
ha dot ngdt, gia tri dien trd
suit
giam
gin

ba bac. Tai viing nhiet do
cao hon NDCP,
VO2
cd cau tnic
tii
giac thudc pha kim loai. Do mang mdng cho nen 0
vimg nhin
thiy VO2 vin
trong sudt, nhung d viing hdng ngoai he sd phan xa tang len
-
tinh chat dac trung
ciia
pha kim loai. Vi vay, do truyin qua giam.
19
Tren hinh 10 la pho truyin qua
ciia
mang
VO2
phu thudc nhiet do. Tai budc sdng
2500 nm, do truyin qua cua mang
V02-nhiet
do cao giam xudng dudi 10% (trong khi
T cua VO2-NDP cao
din
60%). Gia tri sai khac trong do truyin qua dat 50%. Tuy
nhien, budc sdng ma chiing ta quan tam lai la 1550 nm, dd la budc sdng phat ra
ciia
laser sgi quang. Tai budc sdng nay, do sai khac trong phd truyin qua dat gia tri 35%.
Vdi
sir

khac biet nay,
VO2
cd
thi sii
dung vdi tu
each
mot sensor nhiet-quang trong
cdng nghe che tao cam bien nhiet-quang.
Hinh 9. So sanh dudng tre nhiet cua
VO2
ciu
tnic nano (dudng lien) va
VO2
thong
thudng (dudng net
diit)
500
1000 1500
2000 2500
Budc song
(nm)
Hinh
10.
Pho truyen qua cua mang
VO2
nano tai hai vung nhiet do thap hon
NDCP
(30°C)
va cao hon
NDCP (80°C)

So dd cau tao
ciia
cam bien nhiet-quang dugc trinh bay tren hinh
11.
Nguyen ly
boat dgng
ciia
cam bien nay dugc md ta nhu sau. Tia laser hdng ngoai dugc truyen vao
sgi quang ma phia dau cua nd da dugc phu lop mang mdng
VO2.
Khi nhiet do
ciia
dau
sgi quang cdn thap, tia laser xuyen qua lop mang hau nhu hoan toan, do do phd phan
xa
rit
thap. Khi nhiet do tang len den 63
°C
(NDCP cua V02-nand), tia laser dugc
phan xa ngugc lai vdi phd phan xa cao hon han. So sanh hai phd phan xa nay, bg phan
hiln
thi cua may cho chiing ta biet nhiet do
ciia
mdi trudng da tang len den nguong
cao
blng
NDCP
ciia
dau sensor. Tren thuc te, khao sat tren he cam bien nhiet quang
thii

nghiem, da nhan dugc hieu img chuyen mach. Tin hieu phat ra tir laser
din
dau sgi
quang dang 0
65*^0
da dugc phan xa lai vdi he sd phan xa vao khoang 25%,
Idn
hon
bin
tin hieu phan xa khi dau sgi quang d nhiet do phong.
20
I
K' v?
^•.:^^.^'
1
2
I
3
•
Hinh
II.
Sa do cau tao cam bien nhiet quang.
1-
Dau sai quang
co
phii lap mdng mong
VO2
2-
Bo
phdt,

thu laser vd so sanh tin hieu nhiet-quang
3-
Vi
tinh vd hien thi so sanh pho.
5. Thao
luan
va kien nghi
5.7. Thao luan
Trong thdi gian thuc hien dl tai chua diy hai nam vira qua, tap
thi
ciia dl tai
nghien
ciiu
che tao vat lieu mang mdng
VO2
nhiet sic va cam bien nhiet quang tren co
sd vat lieu
VO2
ciu
true
nano da hoan thanh tdt cac
chi
tieu dat ra, thu dugc nhiing ket
qua khoa hgc, dao tao va dinh hudng
iing
dung vao thuc tiln. Mdt sd kei qua chinh, ndi
bat ciia dl tai la:
- Tun ra quy
trinh
che tao vat lieu mang mdng don pha

VO2
cd tfnh chat cam bien
nhiet-quang;
- Hinh thanh hudng nghien
ciiu
ung dung trong
ITnh
vuc quang dien tir va quang
tir
trong Trudng DHCN, vdi ddi tugng cu the la vat lieu dxit cau tnic nano.
Thdng qua de tai nay nhieu sinh vien, hgc vien cao hgc va nghien
ciiu
sinh da
dugc
true
tiep thuc hanh, thuc tap va nghien
ciiu
khoa hgc ve chuyen nganh vat
ly ky thuat va cdng nghe nano;
- Ddng gdp cac cdng trinh khoa hgc cd chit lugng tdt cung nhu cac bao cao khoa
hgc tai cac hdi nghi chuyen nganh.
Viec cap kinh phi (tuy khdng
Idn
llm,
sau muoi trieu dong) mot
each
kip thdi cua
DHQGHN da tao dilu kien thuan
Igi
cho nhdm de tai hoan thanh tdt cac muc tieu va

ndi dung dang ky. Ddng thdi dieu nay cung chiing td nhdm de tai da sir dung kinh phi
dugc cap mot
each
cd hieu qua.
21
5.2. Kien nghi
Trong tinh hinh hien nay, tren the' gidi khoa hgc va cdng nghe nano dang dugc
diu tu rit
Idn,
cho
nen
chiing tdi cho ring cac dl tai vl
linh
vuc nay trong DHQGHN
cung cin cd su uu tien hon vl kinh phi.
Miic
cip kinh phi nen
ning Idn
100 trieu ddng
cho cac dl tai dac biet va 500 trieu ddng cho cac dl tai trgng
diim.
IIL TAI LEU THAM
KHAO
Tai lieu tieng Viet
[1] Dd Hdng Thanh, Phan Van anh, Pham Gia Ngir, Vd Vgng, Nguyln Nang Dinh,
Nghien
citu
su hinh thanh cau
triic
tinh the vd ca che chuyen mach cua mdng

mong
VO2 che
tao bang chum tia dien
tit,
Hdi nghi Vat ly Chit ran toan qudc lin
thii
III - Nha Trang
^M^P
[2] Nguyln Nang Dinh, Nguyln Thi
Tii
Oanh, Pham Duy Long, Dd Hdng Thanh,
Mdng mong bien ddi nhiet - dien - quang: cong
nghe,
tinh chat vd
ITnh
vuc
itng
diing,
Hdi nghi Vat ly Chit rin toan qudc lin
thii
III - Nha Trang 8/2001.
[3]
Nguyln Nang Dinh, Linh kien quang dien tit
tren
ca sd mdng mong
VO2 chef
go
bang chiim tia dien
tit,
Tap chi Khoa hgc DHQGHN, KHTN&CN,

T.XXI,
sd
2AR(2005)tr.8-15
[4] Nguyln Nang Dinh, Le Dinh Trgng, Ung dung phd tdng trd de nghien
cicu
tinh
chat dan ion ciia mdng mong chat
ran.
Tap chi khoa hgc va cdng nghe, Vien
KH&CN Viet Nam , nhan dang 12/2005
[5] Nguyln Nang Dinh, Trdn Thi Tam, Nghien citu che tao cam bien nhiet quang
tren
cd
sd
mdng
mdng
VO2
cau triic nano, B/c tai Hdi nghi Vat ly toan qudc
ISn
thii
6, Ha Ndi,
23-25/11/2005.
Tai lieu tieng
nude
ngoai
[1] Chipindale A.M., Dicken P.G. and Powell A. V.
"Synthesic
Characterization
and Inelastic Neutron Scattering Study of Hydrogen Insertion Compounds of
VO2 iRuXilQy',Journal

of solid
State
chemistry 93 (2001) pp. 526-533.
[2] Dachuan - Yin, Niankan- Xu, Jingyu - Zhang "Vanadium dioxide films with
good electrical switching property" Journal of Physics,
D,
Applied Physics V.29
(1996) pp. 1051-1057.
[3] David Rauh R. and Cogan Stuart F. "Counter electrodes in transmissive Electro
chromic
hght
modulators".
Solid
State
ionics, 28/30 (1988) pp. 1707-1714.
[4] Duplan Carole Alfred, Masso Jean, Gavarri Jean-Raymond and Cesari Claude
"Variable electrical properties in composites: Application to vanadium dioxide
22
pigments in a polyethylene
host".
Journal of Solid state Chemistry
110
(2000)
pp.
6-14.
[5] Gerbstein Yu. M. Smimova T.V. and and Chudnovskii F. A. "Light absorption
by droplets of
metalUc
phase near the Semeconductor - metal transition in
VO2",

Pisma
V
Zh. Eksp. Teor. Fiz., 25 (2001) pp. 474-476.
[6] D.H. Thanh, P.D.Long, V.T.Bich and N.N.Dinh, Structural formation and
Raman scattering spectrum of vanadium oxide thin films made by electron
beam
deposition.
Communications in Physics, Vol. 8 (1998)
N.3,
pp. 152-158.
[7] D. H. Thanh, P. D. Long, P.V. Anh and N, N. Dinh, Characterization of
VO2
and
V2O5
thin films made by electron beam deposition and high
dc-voltage
spraying, "Trends in Materials Science and Technology", Proc.
IWOMS-III,
Hanoi, November 2-4, 1999, p. 415.
[8] D. H. Thanh, P.V. Anh and N.N.Dinh, Gas sensing properties of vanadium
oxides films made by high
Dc-vohage
spraying. Communications in Physics,
Vol.10
(2000)
N.l,
39-45.
[9] Do Hong Thanh, Phan Van Anh and Nguyen Nang Dinh, Characterisation of
thermochromic
VO2

made by re-crystallisation from vanadium-rich thin films,
Communications in Physics Vol.10 (2000)
N.3,
143-149.
[10] N.N.Dinh, T.T.Tam, V.X.Huong, D.H.Thanh, Electrical and Optical properties
of
nano-structured VO2
thin films prepared by e-beam deposition, Giri dang
trong Coom.in Physics, nhan dang 12/2005.
[11]
Nguyen Nang Dinh, Do Phuong Anh, Le Dinh Trong, Electrochromic
properties of vanadium oxide films made by high voltage
spraying.
Advances in
Nat.Sci., nhan dang 12/ 2005.
23
IV. PHU LUC
5.1.
CHUYEN DE
1.
Phuong phap bdc bay chiim tia dien tu va cdng nghe che
tao mang mdng oxyt vanadi.
5.2. CHUYEN DE 2. Tfnh chat chuyin mach cua mang mdng dxyt vanadi
5.3.
CAC CONG TRINH KHOA HOC
24
CHUYEN DE 1
PHl/ONG PHAP BOG BAY CHUM TIA DIEN
TLf
VA CONG NGHE CHE TAO MANG MONG OXYT VAVADI