InvenSense Inc.
1197 Borregas Ave, Sunnyvale, CA 94089 U.S.A.
Tel: +1 (408) 988-7339 Fax: +1 (408) 988-8104
Website: www.invensense.com
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
MPU-6000 and MPU-6050
Product Specification
Revision 3.3
1 of 54
MPU-6000/MPU-6050 Product Specification
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
CONTENTS
1
REVISION HISTORY ...................................................................................................................................5
2
PURPOSE AND SCOPE .............................................................................................................................6
3
PRODUCT OVERVIEW ...............................................................................................................................7
3.1
MPU-60X0 OVERVIEW ........................................................................................................................7
4
APPLICATIONS...........................................................................................................................................9
5
FEATURES ................................................................................................................................................10
6
7
5.1
GYROSCOPE FEATURES .....................................................................................................................10
5.2
ACCELEROMETER FEATURES .............................................................................................................10
5.3
ADDITIONAL FEATURES ......................................................................................................................10
5.4
MOTIONPROCESSING.........................................................................................................................11
5.5
CLOCKING .........................................................................................................................................11
ELECTRICAL CHARACTERISTICS .........................................................................................................12
6.1
GYROSCOPE SPECIFICATIONS ............................................................................................................12
6.2
ACCELEROMETER SPECIFICATIONS.....................................................................................................13
6.3
ELECTRICAL AND OTHER COMMON SPECIFICATIONS............................................................................14
6.4
ELECTRICAL SPECIFICATIONS, CONTINUED .........................................................................................15
6.5
ELECTRICAL SPECIFICATIONS, CONTINUED .........................................................................................16
6.6
ELECTRICAL SPECIFICATIONS, CONTINUED .........................................................................................17
6.7
I C TIMING CHARACTERIZATION..........................................................................................................18
6.8
SPI TIMING CHARACTERIZATION (MPU-6000 ONLY) ...........................................................................19
6.9
ABSOLUTE MAXIMUM RATINGS ...........................................................................................................20
2
APPLICATIONS INFORMATION ..............................................................................................................21
7.1
PIN OUT AND SIGNAL DESCRIPTION ....................................................................................................21
7.2
TYPICAL OPERATING CIRCUIT.............................................................................................................22
7.3
BILL OF MATERIALS FOR EXTERNAL COMPONENTS ..............................................................................22
7.4
RECOMMENDED POWER-ON PROCEDURE ...........................................................................................23
7.5
BLOCK DIAGRAM ...............................................................................................................................24
7.6
OVERVIEW ........................................................................................................................................24
7.7
THREE-AXIS MEMS GYROSCOPE WITH 16-BIT ADCS AND SIGNAL CONDITIONING................................25
7.8
THREE-AXIS MEMS ACCELEROMETER WITH 16-BIT ADCS AND SIGNAL CONDITIONING ........................25
7.9
DIGITAL MOTION PROCESSOR ............................................................................................................25
7.10
PRIMARY I C AND SPI SERIAL COMMUNICATIONS INTERFACES ............................................................25
7.11
AUXILIARY I C SERIAL INTERFACE ......................................................................................................26
2
2
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MPU-6000/MPU-6050 Product Specification
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7.12
SELF-TEST ........................................................................................................................................27
7.13
MPU-60X0 SOLUTION FOR 9-AXIS SENSOR FUSION USING I C INTERFACE ..........................................28
7.14
MPU-6000 USING SPI INTERFACE .....................................................................................................29
7.15
INTERNAL CLOCK GENERATION ..........................................................................................................30
7.16
SENSOR DATA REGISTERS .................................................................................................................30
7.17
FIFO ................................................................................................................................................30
7.18
INTERRUPTS ......................................................................................................................................30
7.19
DIGITAL-OUTPUT TEMPERATURE SENSOR ..........................................................................................31
7.20
BIAS AND LDO ..................................................................................................................................31
7.21
CHARGE PUMP ..................................................................................................................................31
2
PROGRAMMABLE INTERRUPTS............................................................................................................32
8.1
9
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
MOTION INTERRUPT ...........................................................................................................................33
DIGITAL INTERFACE ...............................................................................................................................34
2
9.1
I C AND SPI (MPU-6000 ONLY) SERIAL INTERFACES ..........................................................................34
9.2
I C INTERFACE ..................................................................................................................................34
9.3
I C COMMUNICATIONS PROTOCOL ......................................................................................................34
9.4
I C TERMS ........................................................................................................................................37
9.5
SPI INTERFACE (MPU-6000 ONLY) ....................................................................................................38
2
2
2
10 SERIAL INTERFACE CONSIDERATIONS (MPU-6050) ..........................................................................39
10.1
MPU-6050 SUPPORTED INTERFACES.................................................................................................39
10.2
LOGIC LEVELS ...................................................................................................................................39
10.3
LOGIC LEVELS DIAGRAM FOR AUX_VDDIO = 0 ..................................................................................40
10.4
LOGIC LEVELS DIAGRAM FOR AUX_VDDIO = 1 ..................................................................................41
11 ASSEMBLY ...............................................................................................................................................42
11.1
ORIENTATION OF AXES ......................................................................................................................42
11.2
PACKAGE DIMENSIONS ......................................................................................................................43
11.3
PCB DESIGN GUIDELINES ..................................................................................................................44
11.4
ASSEMBLY PRECAUTIONS ..................................................................................................................45
11.5
STORAGE SPECIFICATIONS.................................................................................................................48
11.6
PACKAGE MARKING SPECIFICATION ....................................................................................................48
11.7
TAPE & REEL SPECIFICATION .............................................................................................................49
11.8
LABEL ...............................................................................................................................................50
11.9
PACKAGING .......................................................................................................................................51
11.10
REPRESENTATIVE SHIPPING CARTON LABEL ...................................................................................52
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MPU-6000/MPU-6050 Product Specification
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
12 RELIABILITY .............................................................................................................................................53
12.1
QUALIFICATION TEST POLICY .............................................................................................................53
12.2
QUALIFICATION TEST PLAN ................................................................................................................53
13 ENVIRONMENTAL COMPLIANCE...........................................................................................................54
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MPU-6000/MPU-6050 Product Specification
1
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
Revision History
Revision
Date
Revision
Description
11/24/2010
1.0
Initial Release
05/19/2011
2.0
For Rev C parts. Clarified wording in sections (3.2, 5.1, 5.2, 6.1-6.4, 6.6, 6.9, 7,
7.1-7.6, 7.11, 7.12, 7.14, 8, 8.2-8.4, 10.3, 10.4, 11, 12.2)
07/28/2011
2.1
Edited supply current numbers for different modes (section 6.4)
08/05/2011
2.2
Unit of measure for accelerometer sensitivity changed from LSB/mg to LSB/g
10/12/2011
2.3
Updated accelerometer self test specifications in Table 6.2. Updated package
dimensions (section 11.2). Updated PCB design guidelines (section 11.3)
10/18/2011
3.0
For Rev D parts. Updated accelerometer specifications in Table 6.2. Updated
accelerometer specification note (sections 8.2, 8.3, & 8.4). Updated qualification
test plan (section 12.2).
3.1
Edits for clarity
Changed operating voltage range to 2.375V-3.46V
Added accelerometer Intelligence Function increment value of 1mg/LSB
(Section 6.2)
Updated absolute maximum rating for acceleration (any axis, unpowered) from
0.3ms to 0.2ms (Section 6.9)
Modified absolute maximum rating for Latch-up to Level A and ±100mA (Section
6.9, 12.2)
3.2
Updated self-test response specifications for Revision D parts dated with
date code 1147 (YYWW) or later.
Edits for clarity
Added Gyro self-test (sections 5.1, 6.1, 7.6, 7.12)
Added Min/Max limits to Accel self-test response (section 6.2)
Updated Accelerometer low power mode operating currents (Section 6.3)
Added gyro self test to block diagram (section 7.5)
Updated packaging labels and descriptions (sections 11.8 & 11.9)
3.3
Updated Gyro and Accelerometer self test information (sections 6.1, 6.2, 7.12)
Updated latch-up information (Section 6.9)
Updated programmable interrupts information (Section 8)
Changed shipment information from maximum of 3 reels (15K units) per shipper
box to 5 reels (25K units) per shipper box (Section 11.7)
Updated packing shipping and label information (Sections 11.8, 11.9)
Updated reliability references (Section 12.2)
10/24/2011
11/16/2011
5/16/2012
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MPU-6000/MPU-6050 Product Specification
2
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
Purpose and Scope
This product specification provides advanced information regarding the electrical specification and design
related information for the MPU-6000™ and MPU-6050™ MotionTracking™ devices, collectively called the
MPU-60X0™ or MPU™.
Electrical characteristics are based upon design analysis and simulation results only. Specifications are
subject to change without notice. Final specifications will be updated based upon characterization of
production silicon. For references to register map and descriptions of individual registers, please refer to the
MPU-6000/MPU-6050 Register Map and Register Descriptions document.
The self-test response specifications provided in this document pertain to Revision D parts with date
codes of 1147 (YYWW) or later. Please see Section 11.6 for package marking description details.
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MPU-6000/MPU-6050 Product Specification
3
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
Product Overview
3.1 MPU-60X0 Overview
MotionInterface™ is becoming a “must-have” function being adopted by smartphone and tablet
manufacturers due to the enormous value it adds to the end user experience. In smartphones, it finds use in
applications such as gesture commands for applications and phone control, enhanced gaming, augmented
reality, panoramic photo capture and viewing, and pedestrian and vehicle navigation. With its ability to
precisely and accurately track user motions, MotionTracking technology can convert handsets and tablets
into powerful 3D intelligent devices that can be used in applications ranging from health and fitness
monitoring to location-based services. Key requirements for MotionInterface enabled devices are small
package size, low power consumption, high accuracy and repeatability, high shock tolerance, and application
specific performance programmability – all at a low consumer price point.
The MPU-60X0 is the world’s first integrated 6-axis MotionTracking device that combines a 3-axis
gyroscope, 3-axis accelerometer, and a Digital Motion Processor™ (DMP) all in a small 4x4x0.9mm
2
package. With its dedicated I C sensor bus, it directly accepts inputs from an external 3-axis compass to
provide a complete 9-axis MotionFusion™ output. The MPU-60X0 MotionTracking device, with its 6-axis
integration, on-board MotionFusion™, and run-time calibration firmware, enables manufacturers to eliminate
the costly and complex selection, qualification, and system level integration of discrete devices, guaranteeing
optimal motion performance for consumers. The MPU-60X0 is also designed to interface with multiple non2
inertial digital sensors, such as pressure sensors, on its auxiliary I C port. The MPU-60X0 is footprint
compatible with the MPU-30X0 family.
The MPU-60X0 features three 16-bit analog-to-digital converters (ADCs) for digitizing the gyroscope outputs
and three 16-bit ADCs for digitizing the accelerometer outputs. For precision tracking of both fast and slow
motions, the parts feature a user-programmable gyroscope full-scale range of ±250, ±500, ±1000, and
±2000°/sec (dps) and a user-programmable accelerometer full-scale range of ±2g, ±4g, ±8g, and ±16g.
An on-chip 1024 Byte FIFO buffer helps lower system power consumption by allowing the system processor
to read the sensor data in bursts and then enter a low-power mode as the MPU collects more data. With all
the necessary on-chip processing and sensor components required to support many motion-based use
cases, the MPU-60X0 uniquely enables low-power MotionInterface applications in portable applications with
reduced processing requirements for the system processor. By providing an integrated MotionFusion output,
the DMP in the MPU-60X0 offloads the intensive MotionProcessing computation requirements from the
system processor, minimizing the need for frequent polling of the motion sensor output.
2
Communication with all registers of the device is performed using either I C at 400kHz or SPI at 1MHz
(MPU-6000 only). For applications requiring faster communications, the sensor and interrupt registers may
be read using SPI at 20MHz (MPU-6000 only). Additional features include an embedded temperature sensor
and an on-chip oscillator with ±1% variation over the operating temperature range.
By leveraging its patented and volume-proven Nasiri-Fabrication platform, which integrates MEMS wafers
with companion CMOS electronics through wafer-level bonding, InvenSense has driven the MPU-60X0
package size down to a revolutionary footprint of 4x4x0.9mm (QFN), while providing the highest
performance, lowest noise, and the lowest cost semiconductor packaging required for handheld consumer
electronic devices. The part features a robust 10,000g shock tolerance, and has programmable low-pass
filters for the gyroscopes, accelerometers, and the on-chip temperature sensor.
For power supply flexibility, the MPU-60X0 operates from VDD power supply voltage range of 2.375V-3.46V.
Additionally, the MPU-6050 provides a VLOGIC reference pin (in addition to its analog supply pin: VDD),
2
which sets the logic levels of its I C interface. The VLOGIC voltage may be 1.8V±5% or VDD.
2
The MPU-6000 and MPU-6050 are identical, except that the MPU-6050 supports the I C serial interface only,
2
and has a separate VLOGIC reference pin. The MPU-6000 supports both I C and SPI interfaces and has a
single supply pin, VDD, which is both the device’s logic reference supply and the analog supply for the part.
The table below outlines these differences:
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MPU-6000/MPU-6050 Product Specification
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
Primary Differences between MPU-6000 and MPU-6050
Part / Item
VDD
VLOGIC
Serial Interfaces Supported
Pin 8
Pin 9
Pin 23
Pin 24
MPU-6000
2.375V-3.46V
n/a
2
I C, SPI
/CS
AD0/SDO
SCL/SCLK
SDA/SDI
8 of 54
MPU-6050
2.375V-3.46V
1.71V to VDD
2
IC
VLOGIC
AD0
SCL
SDA
MPU-6000/MPU-6050 Product Specification
4
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
Applications
BlurFree™ technology (for Video/Still Image Stabilization)
AirSign™ technology (for Security/Authentication)
TouchAnywhere™ technology (for “no touch” UI Application Control/Navigation)
MotionCommand™ technology (for Gesture Short-cuts)
Motion-enabled game and application framework
InstantGesture™ iG™ gesture recognition
Location based services, points of interest, and dead reckoning
Handset and portable gaming
Motion-based game controllers
3D remote controls for Internet connected DTVs and set top boxes, 3D mice
Wearable sensors for health, fitness and sports
Toys
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MPU-6000/MPU-6050 Product Specification
5
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
Features
5.1 Gyroscope Features
The triple-axis MEMS gyroscope in the MPU-60X0 includes a wide range of features:
Digital-output X-, Y-, and Z-Axis angular rate sensors (gyroscopes) with a user-programmable fullscale range of ±250, ±500, ±1000, and ±2000°/sec
External sync signal connected to the FSYNC pin supports image, video and GPS synchronization
Integrated 16-bit ADCs enable simultaneous sampling of gyros
Enhanced bias and sensitivity temperature stability reduces the need for user calibration
Improved low-frequency noise performance
Digitally-programmable low-pass filter
Gyroscope operating current: 3.6mA
Standby current: 5µA
Factory calibrated sensitivity scale factor
User self-test
5.2 Accelerometer Features
The triple-axis MEMS accelerometer in MPU-60X0 includes a wide range of features:
Digital-output triple-axis accelerometer with a programmable full scale range of ±2g, ±4g, ±8g and
±16g
Integrated 16-bit ADCs enable simultaneous sampling of accelerometers while requiring no external
multiplexer
Accelerometer normal operating current: 500µA
Low power accelerometer mode current: 10µA at 1.25Hz, 20µA at 5Hz, 60µA at 20Hz, 110µA at
40Hz
Orientation detection and signaling
Tap detection
User-programmable interrupts
High-G interrupt
User self-test
5.3 Additional Features
The MPU-60X0 includes the following additional features:
9-Axis MotionFusion by the on-chip Digital Motion Processor (DMP)
2
Auxiliary master I C bus for reading data from external sensors (e.g., magnetometer)
3.9mA operating current when all 6 motion sensing axes and the DMP are enabled
VDD supply voltage range of 2.375V-3.46V
2
Flexible VLOGIC reference voltage supports multiple I C interface voltages (MPU-6050 only)
Smallest and thinnest QFN package for portable devices: 4x4x0.9mm
Minimal cross-axis sensitivity between the accelerometer and gyroscope axes
1024 byte FIFO buffer reduces power consumption by allowing host processor to read the data in
bursts and then go into a low-power mode as the MPU collects more data
Digital-output temperature sensor
User-programmable digital filters for gyroscope, accelerometer, and temp sensor
10,000 g shock tolerant
2
400kHz Fast Mode I C for communicating with all registers
1MHz SPI serial interface for communicating with all registers (MPU-6000 only)
20MHz SPI serial interface for reading sensor and interrupt registers (MPU-6000 only)
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MPU-6000/MPU-6050 Product Specification
5.4
5.5
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
MEMS structure hermetically sealed and bonded at wafer level
RoHS and Green compliant
MotionProcessing
Internal Digital Motion Processing™ (DMP™) engine supports 3D MotionProcessing and gesture
recognition algorithms
The MPU-60X0 collects gyroscope and accelerometer data while synchronizing data sampling at a
user defined rate. The total dataset obtained by the MPU-60X0 includes 3-Axis gyroscope data, 3Axis accelerometer data, and temperature data. The MPU’s calculated output to the system
processor can also include heading data from a digital 3-axis third party magnetometer.
The FIFO buffers the complete data set, reducing timing requirements on the system processor by
allowing the processor burst read the FIFO data. After burst reading the FIFO data, the system
processor can save power by entering a low-power sleep mode while the MPU collects more data.
Programmable interrupt supports features such as gesture recognition, panning, zooming, scrolling,
zero-motion detection, tap detection, and shake detection
Digitally-programmable low-pass filters
Low-power pedometer functionality allows the host processor to sleep while the DMP maintains the
step count.
Clocking
On-chip timing generator ±1% frequency variation over full temperature range
Optional external clock inputs of 32.768kHz or 19.2MHz
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Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
MPU-6000/MPU-6050 Product Specification
6
Electrical Characteristics
6.1 Gyroscope Specifications
VDD = 2.375V-3.46V, VLOGIC (MPU-6050 only) = 1.8V±5% or VDD, TA = 25°C
PARAMETER
GYROSCOPE SENSITIVITY
Full-Scale Range
CONDITIONS
MIN
MAX
±2
Best fit straight line; 25°C
0.2
±2
%
%
Initial ZRO Tolerance
ZRO Variation Over Temperature
Power-Supply Sensitivity (1-10Hz)
Power-Supply Sensitivity (10 - 250Hz)
Power-Supply Sensitivity (250Hz - 100kHz)
Linear Acceleration Sensitivity
SELF-TEST RESPONSE
Relative
25°C
-40°C to +85°C
Sine wave, 100mVpp; VDD=2.5V
Sine wave, 100mVpp; VDD=2.5V
Sine wave, 100mVpp; VDD=2.5V
Static
±20
±20
0.2
0.2
4
0.1
º/s
º/s
º/s
º/s
º/s
º/s/g
GYROSCOPE NOISE PERFORMANCE
Total RMS Noise
Low-frequency RMS noise
Rate Noise Spectral Density
FS_SEL=0
DLPFCFG=2 (100Hz)
Bandwidth 1Hz to10Hz
At 10Hz
Sensitivity Scale Factor Tolerance
Sensitivity Scale Factor Variation Over
Temperature
Nonlinearity
Cross-Axis Sensitivity
GYROSCOPE ZERO-RATE OUTPUT (ZRO)
±250
±500
±1000
±2000
16
131
65.5
32.8
16.4
UNITS
º/s
º/s
º/s
º/s
bits
LSB/(º/s)
LSB/(º/s)
LSB/(º/s)
LSB/(º/s)
%
%
Gyroscope ADC Word Length
Sensitivity Scale Factor
FS_SEL=0
FS_SEL=1
FS_SEL=2
FS_SEL=3
TYP
FS_SEL=0
FS_SEL=1
FS_SEL=2
FS_SEL=3
25°C
-3
Change from factory trim
GYROSCOPE MECHANICAL
FREQUENCIES
X-Axis
Y-Axis
Z-Axis
LOW PASS FILTER RESPONSE
+3
-14
14
0.05
0.033
0.005
30
27
24
33
30
27
%
º/s-rms
º/s-rms
º/s/√Hz
36
33
30
Programmable Range
5
256
Programmable
DLPFCFG=0
to ±1º/s of Final
4
8,000
kHz
kHz
kHz
Hz
OUTPUT DATA RATE
GYROSCOPE START-UP TIME
ZRO Settling (from power-on)
1.
30
Hz
ms
Please refer to the following document for further information on Self-Test: MPU-6000/MPU-6050 Register Map
and Descriptions
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NOTES
1
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
MPU-6000/MPU-6050 Product Specification
6.2 Accelerometer Specifications
VDD = 2.375V-3.46V, VLOGIC (MPU-6050 only) = 1.8V±5% or VDD, TA = 25°C
PARAMETER
ACCELEROMETER SENSITIVITY
Full-Scale Range
ADC Word Length
Sensitivity Scale Factor
Initial Calibration Tolerance
Sensitivity Change vs. Temperature
Nonlinearity
Cross-Axis Sensitivity
ZERO-G OUTPUT
Initial Calibration Tolerance
Zero-G Level Change vs. Temperature
SELF TEST RESPONSE
Relative
NOISE PERFORMANCE
Power Spectral Density
LOW PASS FILTER RESPONSE
CONDITIONS
MIN
AFS_SEL=0
AFS_SEL=1
AFS_SEL=2
AFS_SEL=3
Output in two’s complement format
AFS_SEL=0
AFS_SEL=1
AFS_SEL=2
AFS_SEL=3
MAX
±2
±4
±8
±16
16
16,384
8,192
4,096
2,048
±3
±0.02
0.5
±2
AFS_SEL=0, -40°C to +85°C
Best Fit Straight Line
X and Y axes
Z axis
X and Y axes, 0°C to +70°C
Z axis, 0°C to +70°C
Change from factory trim
TYP
@10Hz, AFS_SEL=0 & ODR=1kHz
NOTES
g
g
g
g
bits
LSB/g
LSB/g
LSB/g
LSB/g
%
%/°C
%
%
±50
±80
±35
±60
-14
UNITS
mg
mg
mg
14
%
g/√Hz
400
Programmable Range
5
260
Hz
Programmable Range
4
1,000
Hz
OUTPUT DATA RATE
INTELLIGENCE FUNCTION
INCREMENT
1.
2.
32
mg/LSB
Typical zero-g initial calibration tolerance value after MSL3 preconditioning
Please refer to the following document for further information on Self-Test: MPU-6000/MPU-6050 Register Map
and Descriptions
13 of 54
1
2
MPU-6000/MPU-6050 Product Specification
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
6.3 Electrical and Other Common Specifications
VDD = 2.375V-3.46V, VLOGIC (MPU-6050 only) = 1.8V±5% or VDD, TA = 25°C
PARAMETER
TEMPERATURE SENSOR
Range
Sensitivity
Temperature Offset
Linearity
CONDITIONS
MIN
Untrimmed
35oC
Best fit straight line (-40°C to
+85°C)
VDD POWER SUPPLY
Operating Voltages
Normal Operating Current
TYP
Units
-40 to +85
340
-521
°C
LSB/ºC
LSB
±1
°C
2.375
Gyroscope + Accelerometer + DMP
MAX
3.46
V
3.9
mA
3.8
mA
3.7
mA
3.6
mA
(DMP & Gyroscope disabled)
500
µA
1.25 Hz update rate
10
µA
5 Hz update rate
20
µA
20 Hz update rate
70
µA
40 Hz update rate
140
µA
5
µA
Gyroscope + Accelerometer
(DMP disabled)
Gyroscope + DMP
(Accelerometer disabled)
Gyroscope only
(DMP & Accelerometer disabled)
Accelerometer only
Accelerometer Low Power Mode
Current
Full-Chip Idle Mode Supply Current
Power Supply Ramp Rate
VLOGIC REFERENCE VOLTAGE
Voltage Range
Power Supply Ramp Rate
Normal Operating Current
TEMPERATURE RANGE
Specified Temperature Range
Monotonic ramp. Ramp rate is 10%
to 90% of the final value
MPU-6050 only
VLOGIC must be ≤VDD at all times
Monotonic ramp. Ramp rate is 10%
to 90% of the final value
1.71
100
ms
VDD
V
3
ms
100
Performance parameters are not
applicable beyond Specified
Temperature Range
14 of 54
-40
µA
+85
°C
Notes
MPU-6000/MPU-6050 Product Specification
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
6.4 Electrical Specifications, Continued
VDD = 2.375V-3.46V, VLOGIC (MPU-6050 only) = 1.8V±5% or VDD, TA = 25°C
PARAMETER
SERIAL INTERFACE
SPI Operating Frequency, All
Registers Read/Write
SPI Operating Frequency, Sensor
and Interrupt Registers Read Only
I2C Operating Frequency
I2C ADDRESS
CONDITIONS
MIN
MPU-6000 only, Low Speed
Characterization
MPU-6000 only, High Speed
Characterization
MPU-6000 only
All registers, Fast-mode
All registers, Standard-mode
AD0 = 0
AD0 = 1
TYP
MAX
Units
100 ±10%
kHz
1 ±10%
MHz
20 ±10%
MHz
400
100
kHz
kHz
0.3*VDD
V
V
V
1101000
1101001
DIGITAL INPUTS (SDI/SDA, AD0,
SCLK/SCL, FSYNC, /CS, CLKIN)
VIH, High Level Input Voltage
VIL, Low Level Input Voltage
MPU-6000
MPU-6050
MPU-6000
0.7*VDD
0.7*VLOGIC
MPU-6050
0.3*VLOGIC
CI, Input Capacitance
DIGITAL OUTPUT (SDO, INT)
VOH, High Level Output Voltage
VOL1, LOW-Level Output Voltage
VOL.INT1, INT Low-Level Output
Voltage
<5
V
pF
RLOAD=1MΩ; MPU-6000
0.9*VDD
V
RLOAD=1MΩ; MPU-6050
0.9*VLOGIC
V
RLOAD=1MΩ; MPU-6000
0.1*VDD
V
RLOAD=1MΩ; MPU-6050
0.1*VLOGIC
V
0.1
V
Output Leakage Current
OPEN=1, 0.3mA sink
Current
OPEN=1
100
nA
tINT, INT Pulse Width
LATCH_INT_EN=0
50
µs
DIGITAL OUTPUT (CLKOUT)
VOH, High Level Output Voltage
VOL1, LOW-Level Output Voltage
RLOAD=1MΩ
RLOAD=1MΩ
0.9*VDD
0.1*VDD
15 of 54
V
V
Notes
MPU-6000/MPU-6050 Product Specification
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
6.5 Electrical Specifications, Continued
Typical Operating Circuit of Section 7.2, VDD = 2.375V-3.46V, VLOGIC (MPU-6050 only) = 1.8V±5% or
VDD, TA = 25°C
Parameters
Primary I2C I/O (SCL, SDA)
VIL, LOW-Level Input Voltage
VIH, HIGH-Level Input Voltage
Vhys, Hysteresis
VIL, LOW Level Input Voltage
VIH, HIGH-Level Input Voltage
Vhys, Hysteresis
VOL1, LOW-Level Output Voltage
IOL, LOW-Level Output Current
Output Leakage Current
tof, Output Fall Time from VIHmax to VILmax
CI, Capacitance for Each I/O pin
Auxiliary I2C I/O (AUX_CL, AUX_DA)
VIL, LOW-Level Input Voltage
VIH, HIGH-Level Input Voltage
Vhys, Hysteresis
VOL1, LOW-Level Output Voltage
VOL3, LOW-Level Output Voltage
IOL, LOW-Level Output Current
Output Leakage Current
tof, Output Fall Time from VIHmax to VILmax
CI, Capacitance for Each I/O pin
Auxiliary I2C I/O (AUX_CL, AUX_DA)
VIL, LOW-Level Input Voltage
VIH, HIGH-Level Input Voltage
Vhys, Hysteresis
VOL1, LOW-Level Output Voltage
IOL, LOW-Level Output Current
Output Leakage Current
tof, Output Fall Time from VIHmax to VILmax
CI, Capacitance for Each I/O pin
Conditions
MPU-6000
MPU-6000
MPU-6000
MPU-6050
MPU-6050
MPU-6050
3mA sink current
VOL = 0.4V
VOL = 0.6V
Cb bus capacitance in pF
Typical
Units
-0.5 to 0.3*VDD
0.7*VDD to VDD + 0.5V
0.1*VDD
-0.5V to 0.3*VLOGIC
0.7*VLOGIC to VLOGIC + 0.5V
0.1*VLOGIC
0 to 0.4
3
5
100
20+0.1Cb to 250
< 10
V
V
V
V
V
V
V
mA
mA
nA
ns
pF
-0.5V to 0.3*VLOGIC
0.7*VLOGIC to
VLOGIC + 0.5V
0.1*VLOGIC
0 to 0.4
0 to 0.2*VLOGIC
1
1
100
20+0.1Cb to 250
< 10
V
V
V
V
V
mA
mA
nA
ns
pF
-0.5 to 0.3*VDD
0.7*VDD to VDD+0.5V
0.1*VDD
0 to 0.4
1
1
100
20+0.1Cb to 250
< 10
V
V
V
V
mA
mA
nA
ns
pF
MPU-6050: AUX_VDDIO=0
VLOGIC > 2V; 1mA sink current
VLOGIC < 2V; 1mA sink current
VOL = 0.4V
VOL = 0.6V
Cb bus capacitance in pF
MPU-6050: AUX_VDDIO=1;
MPU-6000
1mA sink current
VOL = 0.4V
VOL = 0.6V
Cb bus cap. in pF
16 of 54
Notes
MPU-6000/MPU-6050 Product Specification
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
6.6 Electrical Specifications, Continued
Typical Operating Circuit of Section 7.2, VDD = 2.375V-3.46V, VLOGIC (MPU-6050 only) = 1.8V±5% or
VDD, TA = 25°C
Parameters
Conditions
INTERNAL CLOCK SOURCE
Gyroscope Sample Rate, Fast
CLK_SEL=0,1,2,3
DLPFCFG=0
SAMPLERATEDIV = 0
Min
Gyroscope Sample Rate, Slow
DLPFCFG=1,2,3,4,5, or 6
SAMPLERATEDIV = 0
Accelerometer Sample Rate
Reference Clock Output
Clock Frequency Initial Tolerance
Frequency Variation over Temperature
PLL Settling Time
CLKOUTEN = 1
CLK_SEL=0, 25°C
CLK_SEL=1,2,3; 25°C
CLK_SEL=0
CLK_SEL=1,2,3
CLK_SEL=1,2,3
EXTERNAL 32.768kHz CLOCK
External Clock Frequency
External Clock Allowable Jitter
Gyroscope Sample Rate, Fast
CLK_SEL=4
Gyroscope Sample Rate, Slow
DLPFCFG=1,2,3,4,5, or 6
SAMPLERATEDIV = 0
EXTERNAL 19.2MHz CLOCK
External Clock Frequency
Gyroscope Sample Rate
Gyroscope Sample Rate, Fast Mode
CLK_SEL=5
Gyroscope Sample Rate, Slow Mode
DLPFCFG=1,2,3,4,5, or 6
SAMPLERATEDIV = 0
kHz
1
kHz
+5
+1
-15 to +10
±1
1
10
CLKOUTEN = 1
kHz
µs
kHz
1.024
kHz
1.024
kHz
10
MHz
ms
8
MHz
Hz
kHz
1
kHz
1
kHz
3.9
8000
1.024
1
17 of 54
MHz
%
%
%
%
ms
32.768
1 to 2
8.192
19.2
Accelerometer Sample Rate
Reference Clock Output
PLL Settling Time
1
1.0486
1
Full programmable range
DLPFCFG=0
SAMPLERATEDIV = 0
Units
kHz
1.024
Accelerometer Sample Rate
CLKOUTEN = 1
Max
8
-5
-1
Cycle-to-cycle rms
DLPFCFG=0
SAMPLERATEDIV = 0
Reference Clock Output
PLL Settling Time
Typical
10
MHz
ms
Notes
MPU-6000/MPU-6050 Product Specification
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
2
6.7 I C Timing Characterization
Typical Operating Circuit of Section 7.2, VDD = 2.375V-3.46V, VLOGIC (MPU-6050 only) = 1.8V±5% or
VDD, TA = 25°C
Parameters
Conditions
I2C TIMING
fSCL, SCL Clock Frequency
tHD.STA, (Repeated) START Condition Hold
Time
tLOW, SCL Low Period
tHIGH, SCL High Period
tSU.STA, Repeated START Condition Setup
Time
tHD.DAT, SDA Data Hold Time
tSU.DAT, SDA Data Setup Time
tr, SDA and SCL Rise Time
tf, SDA and SCL Fall Time
tSU.STO, STOP Condition Setup Time
I2C FAST-MODE
Min
Cb bus cap. from 10 to 400pF
Cb bus cap. from 10 to 400pF
tBUF, Bus Free Time Between STOP and
START Condition
Cb, Capacitive Load for each Bus Line
tVD.DAT, Data Valid Time
tVD.ACK, Data Valid Acknowledge Time
Typical
Max
Units
400
0.6
kHz
µs
1.3
0.6
0.6
µs
µs
µs
0
100
20+0.1Cb
20+0.1Cb
0.6
µs
ns
ns
ns
µs
300
300
1.3
µs
< 400
0.9
0.9
2
Note: Timing Characteristics apply to both Primary and Auxiliary I C Bus
2
I C Bus Timing Diagram
18 of 54
pF
µs
µs
Notes
MPU-6000/MPU-6050 Product Specification
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
6.8 SPI Timing Characterization (MPU-6000 only)
Typical Operating Circuit of Section 7.2, VDD = 2.375V-3.46V, VLOGIC (MPU-6050 only) = 1.8V±5% or
VDD,TA = 25°C, unless otherwise noted.
Parameters
Conditions
Min
Typical
Max
Units
1
MHz
SPI TIMING
fSCLK, SCLK Clock Frequency
tLOW, SCLK Low Period
400
ns
tHIGH, SCLK High Period
400
ns
tSU.CS, CS Setup Time
8
ns
tHD.CS, CS Hold Time
500
ns
tSU.SDI, SDI Setup Time
11
ns
tHD.SDI, SDI Hold Time
7
ns
tVD.SDO, SDO Valid Time
Cload = 20pF
tHD.SDO, SDO Hold Time
Cload = 20pF
100
4
tDIS.SDO, SDO Output Disable Time
ns
10
SPI Bus Timing Diagram
19 of 54
ns
ns
Notes
MPU-6000/MPU-6050 Product Specification
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
6.9 Absolute Maximum Ratings
Stress above those listed as “Absolute Maximum Ratings” may cause permanent damage to the device.
These are stress ratings only and functional operation of the device at these conditions is not implied.
Exposure to the absolute maximum ratings conditions for extended periods may affect device reliability.
Parameter
Rating
Supply Voltage, VDD
-0.5V to +6V
VLOGIC Input Voltage Level (MPU-6050)
-0.5V to VDD + 0.5V
REGOUT
-0.5V to 2V
Input Voltage Level (CLKIN, AUX_DA, AD0, FSYNC, INT,
SCL, SDA)
CPOUT (2.5V ≤ VDD ≤ 3.6V )
-0.5V to VDD + 0.5V
-0.5V to 30V
Acceleration (Any Axis, unpowered)
10,000g for 0.2ms
Operating Temperature Range
-40°C to +105°C
Storage Temperature Range
-40°C to +125°C
2kV (HBM);
200V (MM)
Electrostatic Discharge (ESD) Protection
JEDEC Class II (2),125°C
±100mA
Latch-up
20 of 54
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
MPU-6000/MPU-6050 Product Specification
7
Applications Information
7.1
Pin Out and Signal Description
Pin Number
MPU6000
MPU6050
1
Y
6
Y
7
Y
8
Y
Pin Description
Y
CLKIN
Optional external reference clock input. Connect to GND if unused.
Y
AUX_DA
I2C master serial data, for connecting to external sensors
Y
AUX_CL
I2C Master serial clock, for connecting to external sensors
Y
VLOGIC
/CS
8
9
Pin Name
Y
SPI chip select (0=SPI mode)
Digital I/O supply voltage
I2C Slave Address LSB (AD0); SPI serial data output (SDO)
AD0 / SDO
9
Y
AD0
I2C Slave Address LSB (AD0)
10
Y
Y
REGOUT
11
Y
Y
FSYNC
12
Y
Y
INT
Interrupt digital output (totem pole or open-drain)
13
Y
Y
VDD
Power supply voltage and Digital I/O supply voltage
18
Y
Y
GND
Power supply ground
19, 21
Y
Y
RESV
Reserved. Do not connect.
20
Y
Y
CPOUT
Charge pump capacitor connection
22
Y
Y
CLKOUT
System clock output
23
Y
Y
I2C serial clock (SCL); SPI serial clock (SCLK)
I2C serial clock (SCL)
SCL
Y
I2C serial data (SDA); SPI serial data input (SDI)
SDA / SDI
24
2, 3, 4, 5, 14,
15, 16, 17
Frame synchronization digital input. Connect to GND if unused.
SCL / SCLK
23
24
Regulator filter capacitor connection
Y
Y
SDA
Y
NC
I2C serial data (SDA)
Not internally connected. May be used for PCB trace routing.
Top View
Top View
SDA/SDI
SCL/SCLK
CLKOUT
RESV
CPOUT
RESV
SDA
SCL
CLKOUT
RESV
CPOUT
RESV
24
23
22
21
20
19
24
23
22
21
20
19
CLKIN
1
18
GND
NC
2
17
NC
3
16
+Z
CLKIN
1
18
GND
NC
NC
2
17
NC
NC
NC
3
16
NC
MPU-6000
MPU-6050
NC
4
15
NC
NC
4
15
NC
NC
5
14
NC
NC
5
14
NC
AUX_DA
6
13
VDD
AUX_DA
6
13
VDD
AUX_CL
/CS
AD0/SDO
REGOUT
FSYNC
INT
QFN Package
24-pin, 4mm x 4mm x 0.9mm
7
8
9
10
11
12
INT
12
FSYNC
11
REGOUT
10
AD0
9
VLOGIC
8
AUX_CL
7
QFN Package
24-pin, 4mm x 4mm x 0.9mm
21 of 54
+Y
+Z
M
MP PUU- 600
60
50 0
+X
+Y
+X
Orientation of Axes of Sensitivity and
Polarity of Rotation
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
MPU-6000/MPU-6050 Product Specification
7.2
Typical Operating Circuit
22
21
20
SCL
CLKOUT
23
CLKOUT
SCL / SCLK
24
C3
2.2nF
SDA
SDA / SDI
CLKIN
GND
24
23
22
19
1
18
2
17
3
16
CLKIN
GND
C3
2.2nF
21
20
19
1
18
2
17
GND
MPU-6000
4
GND
3
15
16
MPU-6050
4
15
VDD
5
AUX_DA
VDD
14
6
5
13
7
8
9
10
11
6
AUX_DA
12
13
7
C2
0.1µF
AUX_CL
14
8
9
10
11
12
C2
0.1µF
AUX_CL
GND
GND
C1
0.1µF
C1
0.1µF
VLOGIC
INT
AD0
GND
GND
FSYNC
INT
FSYNC
AD0 / SDO
/CS
C4
10nF
GND
Typical Operating Circuits
7.3
Bill of Materials for External Components
Component
Label
Specification
Quantity
Regulator Filter Capacitor (Pin 10)
C1
Ceramic, X7R, 0.1µF ±10%, 2V
1
VDD Bypass Capacitor (Pin 13)
C2
Ceramic, X7R, 0.1µF ±10%, 4V
1
Charge Pump Capacitor (Pin 20)
C3
Ceramic, X7R, 2.2nF ±10%, 50V
1
VLOGIC Bypass Capacitor (Pin 8)
C4*
Ceramic, X7R, 10nF ±10%, 4V
1
* MPU-6050 Only.
22 of 54
MPU-6000/MPU-6050 Product Specification
Recommended Power-on Procedure
All Voltages at 0V
7.4
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
Power-Up Sequencing
1. VLOGIC amplitude must always be ≤VDD
amplitude
TVDDR
2. TVDDR is VDD rise time: Time for VDD to rise
from 10% to 90% of its final value
90%
VDD
3. TVDDR is ≤100ms
10%
4. TVLGR is VLOGIC rise time: Time for
VLOGIC to rise from 10% to 90% of its final
value
TVLGR
90%
5. TVLGR is ≤3ms
VLOGIC
6. TVLG-VDD is the delay from the start of VDD
ramp to the start of VLOGIC rise
10%
7. TVLG-VDD is ≥0
TVLG - VDD
8. VDD and VLOGIC must be monotonic
ramps
23 of 54
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
MPU-6000/MPU-6050 Product Specification
7.5
Block Diagram
CLKIN
CLKOUT
1
CLOCK
22
Self
test
X Accel
Self
test
Y Accel
MPU-60X0
Clock
ADC
12
Interrupt
Status
Register
8
ADC
9
Slave I2C and
SPI Serial
Interface
FIFO
23
24
Self
test
Self
test
Z Accel
ADC
X Gyro
ADC
Y Gyro
Signal Conditioning
Self
test
Config
Registers
Sensor
Registers
Z Gyro
Temp Sensor
11
Digital Motion
Processor
(DMP)
ADC
ADC
Charge
Pump
Bias & LDO
20
13
CPOUT
Note:
6
ADC
Factory
Calibration
Self
test
7
Serial
Interface
Bypass
Mux
Master I2C
Serial
Interface
VDD
18
GND
10
8
REGOUT [VLOGIC]
Pin names in round brackets ( ) apply only to MPU-6000
Pin names in square brackets [ ] apply only to MPU-6050
7.6 Overview
The MPU-60X0 is comprised of the following key blocks and functions:
Three-axis MEMS rate gyroscope sensor with 16-bit ADCs and signal conditioning
Three-axis MEMS accelerometer sensor with 16-bit ADCs and signal conditioning
Digital Motion Processor (DMP) engine
2
Primary I C and SPI (MPU-6000 only) serial communications interfaces
2
rd
Auxiliary I C serial interface for 3 party magnetometer & other sensors
Clocking
Sensor Data Registers
FIFO
Interrupts
Digital-Output Temperature Sensor
Gyroscope & Accelerometer Self-test
Bias and LDO
Charge Pump
24 of 54
INT
(/CS)
AD0 / (SDO)
SCL / (SCLK)
SDA / (SDI)
AUX_CL
AUX_DA
FSYNC
MPU-6000/MPU-6050 Product Specification
Document Number: PS-MPU-6000A-00
Revision: 3.3
Release Date: 5/16/2012
7.7 Three-Axis MEMS Gyroscope with 16-bit ADCs and Signal Conditioning
The MPU-60X0 consists of three independent vibratory MEMS rate gyroscopes, which detect rotation about
the X-, Y-, and Z- Axes. When the gyros are rotated about any of the sense axes, the Coriolis Effect causes
a vibration that is detected by a capacitive pickoff. The resulting signal is amplified, demodulated, and filtered
to produce a voltage that is proportional to the angular rate. This voltage is digitized using individual on-chip
16-bit Analog-to-Digital Converters (ADCs) to sample each axis. The full-scale range of the gyro sensors
may be digitally programmed to ±250, ±500, ±1000, or ±2000 degrees per second (dps). The ADC sample
rate is programmable from 8,000 samples per second, down to 3.9 samples per second, and user-selectable
low-pass filters enable a wide range of cut-off frequencies.
7.8 Three-Axis MEMS Accelerometer with 16-bit ADCs and Signal Conditioning
The MPU-60X0’s 3-Axis accelerometer uses separate proof masses for each axis. Acceleration along a
particular axis induces displacement on the corresponding proof mass, and capacitive sensors detect the
displacement differentially. The MPU-60X0’s architecture reduces the accelerometers’ susceptibility to
fabrication variations as well as to thermal drift. When the device is placed on a flat surface, it will measure
0g on the X- and Y-axes and +1g on the Z-axis. The accelerometers’ scale factor is calibrated at the factory
and is nominally independent of supply voltage. Each sensor has a dedicated sigma-delta ADC for providing
digital outputs. The full scale range of the digital output can be adjusted to ±2g, ±4g, ±8g, or ±16g.
7.9 Digital Motion Processor
The embedded Digital Motion Processor (DMP) is located within the MPU-60X0 and offloads computation of
motion processing algorithms from the host processor. The DMP acquires data from accelerometers,
rd
gyroscopes, and additional 3 party sensors such as magnetometers, and processes the data. The resulting
data can be read from the DMP’s registers, or can be buffered in a FIFO. The DMP has access to one of the
MPU’s external pins, which can be used for generating interrupts.
The purpose of the DMP is to offload both timing requirements and processing power from the host
processor. Typically, motion processing algorithms should be run at a high rate, often around 200Hz, in order
to provide accurate results with low latency. This is required even if the application updates at a much lower
rate; for example, a low power user interface may update as slowly as 5Hz, but the motion processing should
still run at 200Hz. The DMP can be used as a tool in order to minimize power, simplify timing, simplify the
software architecture, and save valuable MIPS on the host processor for use in the application.
2
7.10 Primary I C and SPI Serial Communications Interfaces
2
The MPU-60X0 communicates to a system processor using either a SPI (MPU-6000 only) or an I C serial
interface. The MPU-60X0 always acts as a slave when communicating to the system processor. The LSB of
2
the of the I C slave address is set by pin 9 (AD0).
The logic levels for communications between the MPU-60X0 and its master are as follows:
MPU-6000: The logic level for communications with the master is set by the voltage on VDD
MPU-6050: The logic level for communications with the master is set by the voltage on VLOGIC
For further information regarding the logic levels of the MPU-6050, please refer to Section 10.
25 of 54