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1
MEMS R&D @ Intel
MEMS R&D @ Intel
Sunlin
Sunlin
Chou
Chou
Senior Vice President & General Manager
Senior Vice President & General Manager
Technology & Manufacturing Group
Technology & Manufacturing Group
Intel Corporation
Intel Corporation
April 25, 2001
April 25, 2001
2
THE MEMS MICROCOSM:
Foundries
Kip Crosby
/>A shakeout looms for the
makers of MEMS.
… Maybe then an Intel
will emerge.
Forbes ASAP 04.02.01
The Amazing, Incredible Shrinking Future!
Michael S. Malone
/>Bomb-detecting inchworms, pint-size space probes, and retinal
implants. A roundup of the coolest wee wonders coming soon to a
doctor's office – or cell phone – near you.
MEMS: M
MEMS: M


icro
icro
E
E
lectro
lectro
-
-
M
M
echanical
echanical
S
S
ystems
ystems
Source: Forbes
3
MEMS R&D @ Intel
MEMS R&D @ Intel
Ÿ
Ÿ
Started in 1999
Started in 1999
Ÿ
Ÿ
Is a “seed” activity
Is a “seed” activity
Ÿ
Ÿ

Is decentralized
Is decentralized
Ÿ
Ÿ
Has Intel Capital as partner
Has Intel Capital as partner
Ÿ
Ÿ
Involves cooperation with other companies
Involves cooperation with other companies
Ÿ
Ÿ
Uses Intel’s silicon technology expertise
Uses Intel’s silicon technology expertise
Ÿ
Ÿ
Is relevant to Intel’s businesses
Is relevant to Intel’s businesses
$/Year:
$/Year:
~ 10
~ 10
10
10
Risk
Risk
Taking:
Taking:
Evaluate options,
Evaluate options,

look externally
look externally
Focus choices,
Focus choices,
synchronize,
synchronize,
integrate
integrate
Copy exactly,
Copy exactly,
ramp rapidly
ramp rapidly
~ 10
~ 10
8
8
~ 10
~ 10
9
9
High
High
Moderate
Moderate
Low
Low
Intel’s Technology Pipeline
Intel’s Technology Pipeline
Manufacturing
Manufacturing

Research
Research
Development
Development
$/Year:
$/Year:
~ 10
~ 10
10
10
Risk
Risk
Taking:
Taking:
Evaluate options,
Evaluate options,
look externally
look externally
Focus choices,
Focus choices,
synchronize,
synchronize,
integrate
integrate
Copy exactly,
Copy exactly,
ramp rapidly
ramp rapidly
~ 10
~ 10

8
8
~ 10
~ 10
9
9
High
High
Moderate
Moderate
Low
Low
Intel’s Technology Pipeline
Intel’s Technology Pipeline
Manufacturing
Manufacturing
Research
Research
Development
Development
MEMS
6
Intel’s Decentralized R&D Structure
Intel’s Decentralized R&D Structure
Intel
Intel
Architecture Labs
Architecture Labs
Technology &
Technology &

Research Labs
Research Labs
Semiconductor
Technology
Internet
Ecosystems
IA
Capabilities
Technology &
Technology &
Manufacturing Group
Manufacturing Group
7
8

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