Chế tạo và khảo sát vật liệu bán dẫn P-ZnO

Dai hoc Quoc gia Ha noi
Tniofng
Dai hoc Khoa hoc Tit
nhien
_
TfeND^TAI:
CHf
TAO VA KHAO SAT VAT
LifiU BAN
DAN
P-ZnO
MA
Sd:
QT-
08-11
CHU TRI Di
TAI:
TS. NGO
THU
HUONG
(KHOA
V^T
L^)
Ha noi - 2008
Dai hoc Quoc gia Ha noi
Trtfcmg
Dai hoc Khoa hoc
Tii
nhien
>v'
V

TEN DE
TAI:
CHE TAO VA KHAO SAT
VAT
LIEU BAN
DAN
P-ZnO
V
MA SO: QT-
08-11
CHU TRI
f)t
TAI:
TS. NGO THU HUONG
(KHOA VAT LY)
^'^\;;ic-
T,-,t
DT/
qo4
Ha noi - 2008
Dai hoc Quoc gia Ha noi
Triiomg Dai hoc Khoa hoc Tii nhien
TEN DE
TAI
:
CHE TAO VA KHAO
SAT
VAT
LIEU
BAN DAN P-ZnO

MA
SO: QT- 08 -11
CHU TRI DE
TAI:
TS. NGO THU HUONG
CAC CAN
BO
THAM GIA:
TSKH.
NGUYfiN
HOA HONG
NCS.
NGUYilN
VIET TUYEN
SINH
VIEN:
CHU
THI
THU
Ha noi - 2008
1.
Bao cao torn tat
a. Ten de tai : Che tao va khao sal vat lieu ban
dSn
p-ZnO
(Mas6:QT-08-ll).
b.
Chu tri de
tai:
TS.

Ngo
Thu
Hacmg
c. Cac can bo
tham
gia: TSKH.
Nguyin
Hoa Hong
NCS.
Nguyin
Viet Tuyen
Sinh vien: Chu Thi Thu
d.
Thoi
gian
thuc
hien
tuf
thang 01 nam 2008 den thang 12 nam 2008.
e. Muc tieu va noi dung nghien
ciru:
Che tao vat lieu ban
din loai
p-ZnO
va nghien
cuii
cac
tinh
chat cau
triic,

tinh
chat nhiet, dien va quang cua loai
vat
lieu nay.
f. Cac ket qua dat
dupe:
Ket qua cua di tai bao gom 01 bai bao
giri
dang tap
chi
cua Dai hoc quoc gia Ha noi; 01 bai
hsioa'^gxxi
dang lap
chi
nirorc
ngoai; tham gia
hucfng dSn
01 sinh vien nghien curu khoa hoc, se bao
ve nam 2009; tham gia
hudng
din 01 nghien
cun
sinh.
g.
Tinh hinh
kinh
phi
cua
d6
tai:

Tong kinh
phi ihuc
chi: 20.000.000 dong
Trong do -
Tir
ngan sach nha
nu6c:
20.000.000 d6ng
- Vay
tin
dung: 0
- Von
tuco:
0
Khoa quan
ly
(Ky va ghi ro ho ten)
Chu tri de tai
(Ky va ghi ro ho ten)
IM^
ly
9H6
WEU
TRU
de tai
)3^i6%^^^'^
/-
o-
F:
A

I
V\
V
.\ -r ; f
ML,
;
i"
1,1
.i /
2.
Brief project report
a. Project title: Preparing and studying semiconductor p-type ZnO
materials. (QT-08 -
11)
b.
Project co-ordinator: Dr. Ngo Thu Huong
c.
Co-operalor:
Dr. Nguyen Hoa Hong
Ph.D student Nguyen Viet Tuyen
Student Chu Thi Thu
d. Duration: from 2008, January to 2008, December)
e. Objectives and scientific contents: The main object of this project is: preparing
the p-type ZnO material and studying the structural, electrical and optical
properties of this material.
f. Results: The main results of this work were given in the scientific paper in
the VNU Jounal of Science, Mathematics - Physics, 12/2008.; 01 paper to be
submit in international journal. Supervisor one research student and one Ph.D
student.
g. Budget: 20.000.000 VND

1.
Mucluc
Trang
T6ng quan
v^
vai
lieu
6
C4c
phuong
phip
thuc
nghifim
10
Cac
k6i
qua va
bien luan
11
K^tluto
16
Tki
lieu tham khao 16
Phin 1:
T^ng
quan ve vat lieu
Viec
|Aa
tap
c4c

tap acceptor
d^
thu duoc vat
heu
ban din p - ZnO
\k mdt
vSn d6
duoc dat ra cin phai giai
quy€t
trong viec
img
dung
cdc hnh
kien
b^n
din
nky.
D^
thu
dupe bdn dSn
loai p, thu5ng cac nguyen
16'
nh6m V nhu N, P, As
dupe
d&ng nhi^u
[1-5].
Tuy nhien, nhom nguyen
16'
Cu, Ag trong viec thay
v^o

vi
iri
Zn
cung thu
dupe bdn
d^
loai p. Cu
dupe diing
nhu
c^c
acceptor
6i
thay
v^o
vi
tri ciia
Zn
v)
bin kinh cua ion
Qi^
la
0,098
nm
va
Cu^^
la 0,080 nm la gin nhu tuong
duong vdi bdn kinh
ciia ion
Zn^^
(0,083 nm). Viec

c^c
nguyen l6
Ihupc
nh6m V
Ihay
the'
Zn anh
hucmg
ro ret
len cdc tinh ch^t
dien
v^
quang cua vat lieu bin din.
Vi
the' trong
d6
tii niy chung t6i nghien
cihi
su anh
hudng
cua phospho
len
cac
tinh
cha^t
ciu
true
cua vat lieu
bdn
din loai p-ZnO.

1.1. Tinh chit can
true
cua vat lieu ZnO
Til ca cic
vai
lieu thu6c nh6m
II-VI
d^u
c6
du true
cubic hoac
du true luc
giic Wurtzite. Vat lieu ZnO
Ihucmg
t6n
lai
m6t trong ba dang nhu
dupe
chi ra
iren
hinh
I.
Rocksah(Bl)
Zinc blende (B3) Wurtzite (B4)
Hinh
1;
Qfu true ciia
ZnO:
(a) dang cubic rocksalt, (b) dang Zinc blende
v^

(c) dang
Wutzite
12.
Ciu
true vdng ndng liromg
cua vat lieu ZnO:
Hinh
2 chi ra ph6 phit xa cua nang
lupng
photon trong dai
lijr
20
de'n
50 eV
vi cic th6ng
sd ciia
khd'i ciu true vung nang lupng ciia
vai
heu ZnO. Trong cac
ph^p
do niy, cic b6 nang lupng lien quan tdi
mirc
nang lupng Fermi va cu5ng dp
thdng
qua th6ng lupng cua photon.
E,=0
(a)
12 6 4 0 12 6 4
Binding energy (eV)
Hmh

2:
(a) ph6
phat xa cua
nSng
lupng photon dai
lir
20-50
eV.
(b)
C^u
true vilng
cua ZnO
Hinh
3 la
c^u
true
vung nang lupng theo tinh loan ly thuye't va t6ng cac mat
dp
Irang
Ih^
(DOS)
vdfi cdc
pha khac nhau
ciia
ZnO. Khi
c^u
true wurtzite hi xam
pham, c6
th^
nhan tha'y rang

edc
peak
a
dinh ciia
viinghoa
tri
iren
giam
kh6ng
dang
k^
v£ 66
cao.
15
10
$
0
-10
-16
-20
^"^^s^^^
M2II0
M
1
"•*"^
•
r
A
20
10

?
-10
-20
(b)
\
Hinh
3:
Qfu true
vung cua ZnO (a)
d\i
true B4 6
p = 0; (b)
e^u
true
B,
a
p =
pr,
va (c)
c§^u
true
B2 cf
p
= Pr2
1.2. Tinh chat dien cua vat lieu ZnO:
vat
lieu ZnO la vat lieu ban din vung cam rpng va
th^ng
do do chung
la vat lieu c6 nhien kha nang trong

umg
dung quang hoc va dien hoc. Khi
nghien
curu
tinh
ch^t
dien
ciia
vat lieu ZnO, nhien nhom nghien
cum
da nghien
cihi
sur hinh thanh ban
dan
loai p khi pha tap va tim cac
bien
phap de khac
phuc
sachuyen ttr
ban
dan loai
p sang ban dan loai n.
Hinh
1.4 la su phu thupc nhiet dp ciia hang so Hall va nong dp cac phan
tiir
tai cua ban
dan
ZnO (theo tinh toan ly thuye't va thuc nghiem). Trong hinh
1.4, b trong khoang nhiet dp 15 K < T < 40 K thi tinh chat van chuyen ciia no
bao gom to hpp cac vung va dp dan qua lai. Khi nhiet dp dat 50 K,

hdng
so
Hall dat
cue
dai 2000
cmVVs
sau do giam nhanh khi nhiet dp tdng.
2000
1S00
"3*
\
1000
o
A 1
/o
^p
1
V
o
o
•o
t
1 1 1
T'
"-'
Bulk ZnO
.
Theory
\i
*v^

^*^*^^**^
I.I.
500
0 100 200
300 40C
T(K)
Hinh
4:
Su phu thupe
nhiet
dp
ciia hang s6 Hall
ciia mSu
ZnO khoi
(hinh
tron la
di^m
thuc nghiem,
dudng liln
n^t
la
du6ng \f
thuye't).
Hinh
1.5 la su phu thupc ciia nong dp cac phan tii tai vao
1000/T ciia
ban dan ZnO (theo tinh
toSn
ly thuye't va thuc nghiem). N6ng
dd phin tur tii

giam tuye'n tinh
tilr
10'^
(cm
^)
xuong
lO^'*
(cm^)
va kha
khdrp
nhau
giOa duilmg
tinh toan va
duorng
thuc nghiem.
10"
r
I I I I I I I I I I I I I
I I I
Bulk ZnO
Theory
10 15
lO^rr
(K')
Hinh 5:
Su
phu
thu^
ciia n6iig
dd

cic
phin
tur
tai
v^o
lOOO/T
ciia bin din ZnO (theo
tinh
toan
1^
thuye't
va
thuc nghiem).
Phin
11:
Thuc nghiem
He vat lieu
Zn,.,P,0
(x = 0,03; 0,06; 0,09 va 0,12) dupe che tao bang hai
phuofng
phap:
phucfng
phap gom va phuong phap hoc bay nhiet trong
khi
mang
N2.
D6'i
v6i he vat lieu kh6'i, h6n hpp cua bpt ZnO (99
%)
va

P2O5
(99,9%)
dupe
can
theo ty
le
hpp phan va
dupe nghien Iron
theo qui
trinh
truyen thong. Mot phan
nho cua h6n hpp bpt dupe dung di do cac
tinh
chat nhiet
TA,
DTG de nghien
cihi
qua
trinh
hinh thanh pha
ciia
vat lieu,
tir
do chpn nhiet dp thieu ket
thich
hop.
PhSn
con lai dupe ep thanh cac
mlu
hinh

h6p
bang may ep
ihuy
luc
duoi
ap sua't 5
ta'n/cm^.
Cac
miu
sau khi ep dupe sa'y
a
nhiet dp 80
'*C
trong
thdi
gian
10
gi5 de
iranh
bi nut va khi nung. Sau do, miu
dupe
dua vao 16 nung tai cac nhiet dp 750
"C,
900
"C,
1100 "C
trong
10 gi6
sau do dupe lam
lanh cham

den nhiet dp phong.
D6i
vod
he
mlu
mang, h6n hpp bpt ciia ZnO (99%),
P2O5
(99,9%) va 1%
khoi lupng cua bpt
graphit
(Cac bon)
dupe can
theo ty le hpp
phfin,
trpn cho deu
r6i dupe dat trong thuyen thach anh dua vao
phSn
giua cua 16 ma tai do nhiet dp,
ap sua't
khi N2
va thai gian da dupe dieu
khi^n.
L6
dupe
dot
tdi 1100 "C
giu trong
60 phut. Mang tao thanh tren de Si
(111)
dupe dat trong

viing
nhiet dp
tir
600 den
700
"C.
Trong suot qua trinh hoc bay nhiet,
khi N2 dupe
thoi vao
d^
lam tranh qua
trinh oxy hoa mang.
Ca hai loai mlu mang va
mSu
khoi sau khi dupe tao ra deu
dupe
nghien
cihi
cac
tinh
chat ca'u
true
va
tinh
chat dien va quang tren cac thiet bi tai Trung
tam
khoa hoc Vat lieu thupc khoa Vat ly, tru6ng dai hoc Khoa hoc Tu nhien: pho
nhieu
xa tia X ciia cac
mSu dupe

do tren may do
nhieu
xa tia X Siemens D5005, anh
kinh
hi^n
vi be mat (SEM)
dupe
do tren may
JEOL-JSM5410LV,
ph6 huynh quang cua
cac
mau dupe
do tren may Fluorolog
FL3-22
Jobin Yvon Spex USA. Phep do hang
so Hall duoc do tren thiet bi do Hall loai 7604.
- riCC
QUOC
GIA
HA NOI
VUNG
TAN^
THONG TIN
THIJ
VIEN
^rl_3o^
Phan 3: Cac ket qua va bien
luan
Ph6 nhieu xa X-ray ciia cac
mSu

khoi
Zn,.^PxO dupe
nung a 750
"C dupe
dua
ra tren hinh 1.
Tinh chaft
ca'u
triic
va cac thong so mang ciia vat lieu dupe xac dinh
bang
chuong
trinh Ritveld
[6].
Hang s6' mang a va c dupe xac dinh
c6
cac gia tri
sau: a = b = 3.756 A, c =
5.028
A. Nhin vao hinh ve la tha'y, khi thanh phan phospo
nho (x = 0.00 de'n 0.06), thi
hSu
het ta't ca cac
dinh phd
deu la cac
phd
thupc pha
ZnO vi the' khi do cac miu la don pha. Khi thanh
phin
x tang, pha

Zn3(P04)2
xuat
hien nhung v6i ty le ve
cucmg
dp so vori dinh chinh ciia ZnO la kha nho nen mau
vin kha don pha.
Tit
ca cac
dinh
(002)
ciia
he mSu
Znj.^PxO
(a vi
tri
goc
20
= 37")
deu dich ve
phi
goc nho so
v6i
dinh (002) ciia miu khong pha tap.
(/}
400-
300
200-^
100
-
20

^-JL
B,n
,
f,
„A
r
—^-
° 1
2.
.4-,
A A
__JJUJLL
» JJ^
.1.1
o
^
JL
.
h
x
= 0.12
.
k
X
=
0.09
*
X
= 0.06
x=

0.03
1
o
i
1
A
1
"
o
^
.
k.
k
.
KL,
k
A.
1
.
1
.
1
. 1 .
40
20
60
Hinh
1:
Pho nhiSu xa tia X
ciia

he miu khoi Zn,
,P,0
Anh SEM
ciia
he miu khoi
Zni.xP^O dupe
nung
6
750 "C dupe chi ra tren
hinh 2. Ta't ca cac miu deu c6 ca'u
true
hat
v6i kich thudc
ca hang tram nano met
v6i mat
d6
xep chat kha cao dieu do cho tha'y
a
nhiet dp nung nay thanh phan pha
ZnO da hinh thanh. Khi tang nhiet dp thieu ket cua he miu len 900
"C,
1100 "C
thi
mat dp hat cung tang len. Hing so Hall ciia hai
mSu
khoi vai thanh phan x
=
0.03
va 0.06 cho ke't qua duong. Dieu do cho thiy miu la ban din loai p
a

nhiet dp 300
K v6i nong dp 16 trong
10'**
cm
\
b)
X =
0.06
c)x = 0.09 d)x
=
0.12
Hinh 2. anh SEM cua
mSu
khoi
Zn,.,P,0
nung a 750
"C.
Ph6 EDS cua ta't ca cac miu khoi deu
dupe
do.
Hinh
3 dua ra pho EDS cua
thanh
phin
mlu x = 0.06. Nhin vao ket qua ta thay tren pho
chi
xuat hien cac
dinh
ciia
cac nguyen to thanh phan Zn, P va O

chii
khong he c6 thanh phan tap chat
khac.
Dieu do cho tha'y P da
dupe
vao trong phan mang.
100
50—
Energy
(WeV)
Hinh 3: Ph6 EDS
ciia
miu khoi
Zno^jPoti^O
Trudc
khi thuc hien b6'c bay cac mang
Znj.^PxO,
cac
tinh
chat nhiet TA, DTG
ciia cic miu dupe nghien curu mot each ty mi. Hinh 4, 5, 6 va 7 la do thi TA, DTG
ciia
lin lupl
cac miu v6i cac thanh phin x = 0,03; 0,06; 0,09 va 0,12.
-'/.
&

J.
J
*

.«^.
'N
\
vj
r
0
'.'.toJ-*
' 1
1
l.^j,, ,.
i'
1 \r
I
1
•
«,
<,:•
.
~
'IT
lj>.rf^_> Vl.WI
Hinh
4: Gian do phan
tich
TA, DTG
ciia
mlu
Zn,,97P()„30
Hinh

5: Gian do phan
tich
TA, DTG
ciia
mlu
Zn^^^^^V^^^^O
Ji4-
•" '•
•
,1
r
yeosr c
'N
\
\
\
t
KA
""^"t"
Q
3M;*
\
"^•-^
-T '
•
1 1
r.
'J.^'^
c
1

rjliV.
^
'
'
-
't~"
'^•'"
Tempef>i1in"i
C'
i|i>i4"iai
:'\'fii
TA
ifvam^nt:
Hinh
6:
Gian
do
phan
tich
TA, DTG
cua mlu
ZnoyiPoo^O.
Jjj-
.1
(
-1 y -1
1
1
r/
*.

<:
/
\
^^-^—J^
1
i**?^C
\\
'
\V.,<.
\
\
\i
U
.^ '-
'\
\
~>
•
—T
, . , , . .
«'
•
v,
c M^
'
,
[
.
-I—'
'—'—

Ti»rii[-^taiii[^
r
Ci
Hinh
7:
Gian
do
phan
tich
TA, DTG
cua mlu
Zno^xPf,
12O.
Tur
cac
gian
do
phan
tich
nhiet tren
ta
tha'y
hau het vai cac mlu a
nhiet
dp
gin
1000
"C thi
pha ZnO
dupe

tao
thanh
con a
vung nhiet
dp
thap
su
giam khoi
lupng
la do
sir
bay hai cua
nguyen
to
Phospho.
Vi
the khi boc bay de tao
mang
chiing I6i
da dat
nguon nhiet
la
1100 "C
de a
nhiet
dp do dam bao la vat
lieu
dupe
bay
hai

m6l each
hoan toan.
Khi nghien curu anh SEM cua cac miu mang chiing ta thay cau
iriic
cua cac
miu mang hoan toan khac so v6i cac miu khoi vi
tinh
chat cau true
ciia
cac mlu
phu thupc rat nhieu vao dieu kien cong nghe. Khi nhiet dp trong 16 duoi
1100
"C,
anh SEM cua cac miu la ca'u triic hat. Hinh 8 dua ra anh SEM
ciia
cac mlu mang
Zni.^P.O
(x = 0.03 va 0.06) dupe boc bay khi nhiet dp nguon nhiet la
1100
"C,
th5i gian giu nhiet la 30
phiit,
nhiet dp de la 600
"C vk
700
"C
a)
X
= 0.03,
T,ub.

= 600
"C
b)
X
= 0.03,
T,,b.
= 700
*'C
e)
X
= 0.06,
T,,b.
=
600
'^C
d) x
=
0.06,
T.^.
= 700
"C
Hinh 8: anh SEM cua cac mlu mang
Zn,.,P,0
(x = 0.03 va 0.06) khi T
= 1100
"C.
Tir
ket qua tren hinh 8 ta thay, ca'u true nano da dupe tao ra vai
kich thudc
tir

10 nm de'n 20 nm vai ca hai mlu khi nhiet dp de la
T.^b
=
600
"C.
Khi nhiet dp de
tang, kich thu6c
ciia
cac day nano cung tang len
(hinh
8d). Ket qua nay khing dinh
ring ca'u true tinh the
ciia
he
vai
lieu nay phu thupc rat nhieu vao dieu kien cong
nghe
Ph6 huynh quang cua cac miu mang
Zn^,J^fi
dupe do duai
bude
song
kich thich
325 nm dupe dua ra tren hinh 9. Tat ca cac pho deu bao g6m 2 dinh
ling
vai bu6e
song 390 nm trong
vting
UV va 509 nm trong vung anh sang xanh.
150

Q.
-ii
100
n
O
X
50
x = 0.12
X
=
0,09
x=
0 03
0 06
300
600
400 500
Wavelength (nm)
Hinh 9: ph6 huynh quang
ciia
mlu mang
Zni.^P^O
tai at 300 K, buac song
ciia
anh
sang
kich
thich
X^^^.
=

325 nm
4.
Ket luan.
Chung
loi
da thanh cong trong viec che tao ban din ZnO pha tap P loai p.
Cac
tinh
cha't ca'u true va
tinh
cha't quang cua ta't ca cac miu deu dupe nghien cuu
mot
each
chi tiet. Cac day nano
ciia
he vat lieu nay c6
kich
thu6e tir
lOnm
den 20
nm va chieu dai ca micro met. Ph6 huynh quang
ciia
tat ca cac miu bao gom hai
dinh
CO
bu6c song 390 nm va 509 nm trong viing UV va
viing
anh sang xanh tuong
umg.
5. Tai lieu tham khao:

[1] J.G.Lu,
S.Fujita,
T.Kawaharamura, H.Nishinaka, Roles of hydrogen and
nitrogen in
p-type
doping of
ZnO,
Chemical Physics Letters 441 (2007) 68 -
71.
[2] Xiaodan Zhang, Hongbing Fan, Jian Sun, Ying Zhao, Structural and
electrical properties of
p-type
ZnO films prepared by Ultrasonic Spray
Pyrolysis,
Thin Solid Films 515 (2007) 8789- 8792.
[3] Z.G.Yu, P.Wu,
H.Gong,
Theoretical and experimental studies on oxygen
vacancy in
p-type
ZnO,
Physica
B
401 - 402 (2007) 417 -420.
[4] J.C.Fan, Z.Xie, Q.Wan, Y.G.Wang, As-doped
p-type
ZnO films prepared by
cosputtering ZnO and
Zn^Asi
targets.

Journal of Crystal
Growlh
307 (2007) 66
-69.
[5] T.H. Vlasenflin, M. Tanaka,
p-type
conduction in ZnO dual-acceptor-doped
with nitrogen and
phosphorus.
Solid State Communications 142 (2007)
292-
294
[6] F.
Izumi
and T
Ikeda.
Mater.
Sci.
Forum
321-324
(2000)
198.
Tom
tdt
cac cong trinh NCKH cua ca nhan
Nganh : Vat ly ; Chuyen nganh: Khoa hoc Vat lieu
1.
Ho va len (cac) lac gia cong trinh: Ngo Thu Huong
2.
Nam: 2008

3.
Ten bai bao:
"
Tmh chat ca'u
Iriic
va
linh
chat quang cua he vat lieu
Zn,.^P,0"
4.
Ten Tap
chi/Sach/Tuyen
tap Hoi
nghi.
So, trang: Tap
chi
khoa hoc Toan
-
Vai
ly Dai hoc Qu6'c gia Ha noi,
Volum
24, so
IS,
trang 166 - 169.
5.
Tom lit cong trinh bing
lieng
Viet:
"Cac miu ZnO pha tap phospho khoi va mang
dirac

tao bing hai phuong
phap gom va
phtrong
phap boc bay nhiet.
Tinh chal
ca'u true va
tinh
chat
quang cua he
vat
lieu
Zn^.^P^O
nay da dupe khao sat. Pho X-ray chi ra ring
dinh (002) dich
ve
phia goc nho. Cau triic nano
Ihu dirpc
bing viec dieu
khien ly le khi, nhiet do nguon va nhiet do de. Cac day nano cua he vat lieu
nay c6 dp
Idn cQ
10 nm va dai khoang vai
micromel".
6. Tieng Anh
Author: Ngo Thu Huong
Year: 2008
Title:"The crystal structure and optical properties of the
Zn|.^P^O
compounds
"

VNU Journal of Science Mathematics - Physics 24, No
IS
(2008) 166 - 169.
Abstract:
"Phosphours
(P) doped ZnO bulk and thin film were grown by
both ceramic and thermal evaporation methods. Crystal structure and optical
properties of the
Zn,.^P^O
compounds were investigated. The X-ray
diffraction showed that the ZnO (002) peak shifted to lower angle. The nano-
structure was archived by control the gas ratio, heating temperature and
substrate temperature. The nanowires of these compounds is about
10
nm in
size and some micrometers in the length for thin
films".
Truong
Dai hoc Khoa hoe Tu nhien
Khoa Vat
ly
Xac nhan
hu'ang
dan tham gia nghien
ciru
khoa hoc
thuoc de tai cac cap DHQGHN
Ban
ehii
nhiem Khoa Vat ly xac nhan sinh vien Chu Thi Thu K50

tham gia nghien cuu khoa hoc tir thing 4/2008 duoi su huong dan
ciia
Tien
sT
Ngo Thu Huong
voi
de tai: Nghien
emi sir
anh huong
ciia
che dp cong
nghe den su hinh thanh cau true nano
eiia
vat lieu ZnO pha tap phospho.
Hd
noi,
ngdy 2 thang 2 nam 2009
Chii nhiem Khoa Vat ly
^^
^A^
^^^^
JO!
CONG
IIOA
XA HOI CUV
NGIIIA VlIT
NAM
TRUONt;
HAi
il()(^

KHOA
IKK 1IJ NIIIKN IhW
l;ip
- tu do -
ilaiih pluic
'
lid
Noi,
ngdy
OS'thdng ^
nam 2007
QUYHTDINII
CUA
IIIHU TRIJ('5NG TRlXM}
DA! HOC KHOA HOC
ll/NHIHN
V/v: c6ng nhan
d6
tai luan an
tien sT
va can bp huong
din
nghien cuu sinh nam 2006
HIEU TRUdNG TRUING
DAI HOC KHOA HOC
TU
NHIEN
- Can
ci( Quy
dinh ve to

chi'tc
vd hoat dpng trong Dai hoc Quoc gia Hd Noi
dim-
ban hdnh theo Quyet dinh
sdOOOfrCCB
ngdy
01110/2001 ciia
Giam doc Dai hoc
Quoc gia Hd Noi;
- Can ci( Quy che Ddo tao sau dai hoc
ditgc
ban hdnh theo Quyet dinh so
I8/2000/QD-BGD&DT
ngdy
081612000
cua Bo
trifdng
Bp Gido
due
vd Ddo tao; '
- Can c(( Quy che Ddo tao sau dai hoc a Dai hoc Quoc gia Hd Noi
duac
ban
hdnh theo Quyet dinh sd 15IDT ngdy
0910212004
cua Giam doc Dai hoc Quoc gia
HdNpi;
- Can
ci(
cac Quyet dinh sd

22591
SDH ngdy
07/12/2006,
sd 2376/SDH ngdy
14/12/2006, sd2677/SDH ngdy
29112/2006
cua Giam doc Dai hoc Quoc gia Hd Npi
ve
viec cong nhan nghien
ci(u
sinh nam 2006
ciia trifdng
Dai hoc Khoa hoc Tu nhien -
Dai hoc Quoc gia Hd Npi;
- Theo
de
nghi
ciia
cdc ong:
Tritdng
phong Sau dai hoc, Chu nhiem Khoa Vat ly,
QUYET DINH
Dieu 1: Cong nhan de tai luan an tien
si
va ngu6i huong
din
cua nghien curu sinh
Nguyen Viet Tuyen,
nhu
sau:

Ten de tai: Che tao va nghien
cihi
cac
tinh
chat cua mang mong va
vat
lieu
cau true nano tren ca so oxit kem pha tap chit va
kha nang
utig
dung
ciia
chiing.
Chuyen nganh: Vat ly chat rin; ma so: 62 44 07
01.
Can bo
huofng
din: HOC: PGS. TS Ta
Dinh
Canh, Tru6ng Dai hoc Khoa hoc
Tunhien - DHQGHN;
HDP:
TS.
Ngo
Thu
liirong.
TrU(tng
Dai hoc Khoa hoc Tu
nhien
- DHQGHN.

I linh
thuc
dao
tao: Tap trung, 4 nam (2006
-
2010).
Dieu
2: Nguai huofng
din
nghien cuu sinh c6 nhiem vu va quycn lai ghi tmng
Quy
che
Dao tao sau dai hoc
hien
hanh.
Dieu
3: Cac ong (ba): Truang phong Sau dai hoc,
Chii nhiem
Khoa Vat ly,
Thii
truong cac don vi lien quan, nghien cuu sinh va nguai huong
din
c6 ten trong
Dieu I chju
trach
nhiem
ihi
hanh Quyet dinh nay.
U IRUONG
ry^

J
TRU6NG
iNoi
nhan:
. Nhu
OKU
3:
l.iru-SDII
^ JLi&TSTrunNghi
AI HOC QUOC GIA HA
NOI
ETNAM NATIONAL UNIVERSITY, HANOI
I5SNDB66-B612
KHO
JOURNAL
TO
MATHE
Volume24,
No
IS,
2008
VIETNAM NATIONAL UNIVERSITY, HANOI
JOURNAL OF SCIENCE
MATHEMATICS
-
PHYSICS
Vol.
24, No.
IS,
2008

CONTENTS
1.
Tran
Thi
Quynh
Hoa,
Nguyen Ngoc Long, Nguyen Hoang
Hai,
Stmctural
and
optical
properties
of
ZnS nanoparticles synthesized
by
sonoelectrochemical
method
1
2.
Pham
Van Nho,
Duong Dinh Thuan, Effect
of
htanium
doping
on
characteristics
of nano crystalline
In203
films

5
3.
Pham Hoang Ngan, Nguyen Quang Tien, Pham
Van Nho,
Preparation
of
nitrogen doped
nanocrystalline
Ti02
photocatalyst films
by
using spray pyrolysis
9
4.
Nguyen
Van
Hung,
Le Thi
Hong Lien, Nguyen Cong Toan, High-order
anhamionic
effective potentials
and
EXAFS cumulants
of
fee
crystals containing doping atom
13
5.
Nguyen Thanh
Huy, Luu

Tuan
Tai,
Coexistence
of
ferromagnetism
and
superconductivity
in
the
single crystal UCoGe
18
6. Nguyen Mau Chung,
The Ha
Noi GPHE
and B
Physics
22
7.
Nguyen
Mau
Chung, Nguyen
Anh
Due,
Nguyen Xuan Giao, Nguyen
To
Nga,
Meson
reconstruction: Preliminary results
27
8.

Ngo Thu
Huong,
Do Thi
Kim Anh,
Thermoelectric performance
of
CoSb3 skutterudites
under high pressure
31
9. Ngac
An
Bang, Phung
Thi
Thorn, Nguyen Trong Thanh, Surface plasmon resonance
of
gold nanoparticles
3
5
10.
Le Van Vu,
Nguyen Ngoc Long,
Chu
Dinh Kiem,
Sai
Cong Doanh,
Cao
Thi
Nguyet,
Pham
Thi

Hang, Nguyen
Duy
Thien,
Bui
Quoc Trung, Synthesis
and
optical properties
of
gold
and
silver nanoparticles
39
11.
Hoang Dinh Trien, Nguyen Quang Bau, Nguyen
Thi
Thanh Nhan. Influence
of
magnetic
field on
the
nonlinear absorption coefficient
of a
strong electromagnetic wave
by
confined
electrons
in
quantum wires
47
12.

Dinh
Due
Linh, Phung Quoc Thanh, Bach Thanh Cong, Some physical properties
of
the
CaossProisMni-^u^Os perovskites
prepared
by
sol-gel technology
51
13.
Tran Minh
Thi,
Pham
Van Ben,
Nguyen Minh
Vuong,
Le Thi Thu
Huyen,
Microstructure
and
optical property of polymer-capped ZnS:Cu nanocrystalline thin films
55
60
14.
Dang Thi Thanh Thuy, Vu Tuan Anh, Pham Van Thanh, Bach Gia Duong,
Development of A flexible environment for the composition of the national
suvereinty
identification codes
15.

Dang Thi Thanh Thuy, Pham Van Thanh, Nguyen Anh Tuan, Bach Gia Duong,
Research,
design and fabrication of the
45W
and the 200W, L-Band power amplifier using
the modem microstrip technology for application in the national sovereignty identification
coding system
54
16.
Vu Thi Thanh Thuy, Nguyen Thi Thuc Hien, Pham The Kien, Ngo Xuan Dai, Le
Van Vu, Nguyen Ngoc Long, Ta Dinh Canh, Controlable growth of ZnO
nanostruciures
by
simple chemical method 68
17.
Nguyen Trong Thanh, Vu Xuan Quang, Nguyen Quang Liem, Vu Phi Tuyen, M.
Nogami, Ngac An Bang, Persistent spectral hole burning in
Eu^*
-doped
Aluminosilicate
glasses prepared by sol-gel process 72
18.
Le Quang Thao, Bui Quang Huy, Nguyen Van Hai, Nguyen Thi Thu, Building an
RF
remote control 76
19.
Hoang Ngoc Thanh, Nguyen Minh Due, The mechanical and superconducting properties of
the
YBa2Cu307-6
synthesized by the pyrolytic citrate method 80

20.
Giang
Manh
Khoi, Trinh Dinh Chien, Calculate and optimize the density of ions
Er^*
and
ions
Yb^^
in the active medium of Erbium-Glass laser 85
21.
Nguyen Due Tan, The CCR method and
GEOCAP-1
equipment 89
22.
Le Van Thanh Son, Trinh
Due
Quang, Vu Xuan Quang, Nguyen Trong Thanh, Ngac
An Bang, The role of alkali ions in the thermoluminescent peak at 200
K
of natural quartz of
Vietnam 93
23.
Nguyen Suan Han, Eikonal representation for scattering of the dirac particles on the
gravitational potential 97
24.
Vu Van Khai, Dao Thi Hoa, Vu Thanh Mai, Nguyen Huy Sinh, Large magnetic entropy
change in ceramic manganite compounds of
Lai.xCaxMnOs
and their ability application
101

25.
Ta Van Khoa, Luu Tuan Tai, Than
Due
Hien, Nguyen Khai Hoan, Structure and
magnetic properties of
[FePt/Fejn
multilayer thin films with Cu and B addition
105
26.
N.V. Du, D.L. Minh, N.N. Dinh, N.T. Thuy, N.D. Manh, The structure and magnetic
property of nano-perovskite
LaFeOs
prepared by Citrate-gel,
Co-precipitation
and
High
energy milling methods
109
27.
Nguyen Due Minh, First correction of high energy scattering amplitude
and quasi-potential equation
113
28.
Pham Van Ben, Bui Hong Van, The radiative transition relating to
Fe^^(3d^)
in ZnSe crystal
117
29.
Pham Van Thin, Nguyen The Binh, ZnO random microlaser excited by nanosecond laser
pulses

^ ^ ^
30.
Trinh Dinh Chien, Bui Van Hai, Bui Xuan Kien, The influence of linear chirp on the
width of pulse in dispersion medium of single mode optical fibre
125
31.
Do Trung Kien, Bach Gia Duong, Simulation of altemative transmission of barker code
and M-code in radar system to detect near and far targets
129
32.
Nguyen Hoang Hai, Nguyen Hoang Luong, Nguyen Dang Phu, Tran Quoc Tuan,
Preparation and applications of
Fe304
and FePt nanoparticles
133
33.
Luu Tuan Tai, Magnetic properties of
La|.KRx(Ni-M)5
base compounds as negative
electrode in rechargeable Ni-MH batteries I4|
34.
Ta Dinh Canh, Nguyen Viet Tuyen, Nguyen Ngoc Long, Hoang Minh Tuan, Bui
Nguyen Quoc Trinh, Zhongrong Shen, Synthesis of zinc oxide nanopowders via microwave
irradiation ,
146
35.
Ngo Thanh Dung, Nguyen Thi Thuc Hien, Le Thi Thanh Binh, Do Due Dai, Nguyen
Mau Cu, Preparation of ZnO nanostructures by hydrothenmal method
150
36.

Le Van Vu, Nguyen Ngoc Long, Ha Tien Vinh, Nguyen Duy Thien, Preparation and
investigation of the
nanostnictured InjOs
films by a vapor transport and condensation method
for gas sensor
154
37.
Pham Van Ben, Bui Hong Van, Do Xuan Tien, Phan Trong Tue, Determination of
fluorescent life-time of ZnS, ZnS:Cu and ZnS:Mn materials by time-resolved
photoluminescence spectra
158
38.
Vu Xuan Phuc, Luu Tuan Tai, Influence of grain size on the electrochemical properties of
LaNis.xSix
compound using for Ni - MH battery
162
39.
Ngo Thu Huong, The crystal structure and optical properties of
the Zn^^P^O
compounds
166
40.
Pham Hong Quang, Ngo Dinh Sang, Studies of
Ali.^CrxN
and
AIMHXN
magnetic
semiconductor thin films
170
41.

Nguyen Thanh Binh, Le Thi Thanh Binh, Nguyen Tu Niem, Nguyen Viet
Due,
Nguyen
Ngoc Long, Synthesis and characterization of
Sn02
nanopowders
174
42.
Nguyen Van Hung, Le Quoc Hung, and Tong Sy Tien, Calculation of EXAFS cumulants
of bcc crystals using quantum theory and anharmonic effective potentials
178
43.
Nguyen Van Hung, Do Thai Hung, Nguyen Bao Trung, High-order anharmonic effective
potentials and EXAFS cumulants of bcc crystals applied to high-temperatures up to melting
point 183
44.
Do Trung Kien, Nguyen
Due
Thang, Bach Gia Duong, Radar digital filters design with
VHDLandFPGA
188
45.
Dang Thi Thanh Thuy, Pham Van Thanh, Do Trung Kien, Bach Gia Duong,
Application of Frequency composition and microprocessor to broadcast in microwave region
192
46.
Tran Minh Thi, Pham Van Ben, Nguyen Minh Vuong, The optical properties of the
polymer-capped ZnS:Mn nano thin films
196
47.

Ta Quynh Hoa, Le Viet Du Khuong, Tran Hai Dang, Combined symmetrical dipole
electric sounding 201
48.
Khoi Giang Manh, Chien Trinh Dinh, Consideration for the efficiency of Erbium - Glass
Laser with active medium is Ytterbium-Erbium Co-doped Phosphate glass 205
VNU Journal of
Science.
Mathematics - Physics
24,
No.
IS
(2008) 166-169
The crystal structure and optical properties
of the
Zni.xPxO
compounds
Ngo Thu Huong*
Faculty
of Physics,
College
of Science. VNU
334 Nguyen
Trai,
Hanoi,
Vietnam
Received
17
November 2008
Abstract. Phosphours (P) doped ZnO bulk and thin
film

were grown by both ceramic and thermal
evaporation methods. Crystal
stnicture
and optical properties of the
Zni.xPxO conpounds
were
investigated. The X-ray diffraction showed that the ZnO (002) peak shifted to lower angle. The
nano-stmcture
was archived by control the gas ratio, heating temperature and substrate
ten^erature.
The nanowires of
these con^>ounds
is about 10 nm in size and some micrometers
in
the length for thin films.
Keywords:
P-doped
ZnO;
Thermal evaporation; Photoluminescence .
1.
Introduction
ZnO based electronic devices have attracted increasing interest as the backplanes for
applications such as active-matrix liquid crystal displays and active-matrix organic light emitting
diodes
[1,2].
Most of these electronic devices employ the electrical behavior of
«-type
semiconducting
active oxides. However, p-type ZnO films can be produced by substituting group V elements (N, P,
and As) for the O sites or group I elements (Li, Na, and

K)
for Zn sites
[3,4].
However, the
achievement
of/7-type
ZnO is a difficult task due to self-compensation induced from intrinsic donor
defects, such as O vacancies and Zn
interstitials,
or an unintentional
exUinsic
donor such as H
[5,6].
In
addition, the strongest candidates for p-type dopants, group V elements, have
low
solubility, which
would theoretically result in a deep acceptor level.
In this
work,
we report about the crystal structure and optical properties of the
Zn,.xPxO
(x =
0.00, 0,03,
0.06;
0.09 and 0.12) compounds, which were grown by both ceramic and thermal
evaporation methods.
2.
Experimental
The

Zni ^P^O
compounds were prepared by both ceramic and thermal evaporation methods.
For the bulk samples: the powders of ZnO (99 %) and
P2O5
(99,9%) were well mixed and then heated
at 750
°C
900
°C
1100
°C
for 10 hrs and then cooled to the room temperature. For the thin film
E-mail:

166