DSpace at VNU: Nghiên cứu, thiết kế và mô phỏng bộ cảm biến vi lỏng có cấu trúc SAW đứng trên vật liệu AIN

Nghiên cứu, thiết kế và mô phỏng bộ cảm biến
vi lỏng có cấu trúc SAW đứng trên vật liệu AIN
Bùi Thu Hằng
Đại học Công nghệ
Ngành: Kỹ thuật điện tử; Mã số: 60 52 70
Người hướng dẫn: TS. Vũ Huy Thông, MBA Hà Nguyên
Năm bảo vệ: 2013

Abstract: Trình bày các thành phần và đặc tính truyền sóng của SAW hoạt
động trong môi trường lỏng và điều kiện truyền giữa hai môi trường. Nghiên
cứu các tính chất điện và cơ của SAW trên đế áp điện phổ biến hiện nay,
LiNO3, và vật liệu CMOS, AlN, khi có tác động của chất lỏng như mật độ,
độ nhớt và chuyển động trong các kênh cảm biến. Bộ cảm biến SAW cho
ứng dụng vi lỏng. Khả năng tích hợp trong ứng dụng cảm biến mực.
Keywords: Bộ cảm biến vi lỏng; Kỹ thuật điện tử

Content


Microfluidic Sensor based on AlN Vertical SAW structure: Investigation, Design and Simulation

TABLE OF CONTENT
GLOSSARY .............................................................................................................. 3
ACKOWNLEDGEMENTS ..................................................................................... 4
LISTS OF TABLES ................................................................................................. 5
LISTS OF FIGURES ............................................................................................... 6
Chapter 1

Introduction ...................................................................................... 8

1.1

Motivation and Objectives............................................................................ 8

1.2

Organization of Thesis.................................................................................. 9

Chapter 2

Theoretical Analysis of the AlN-based Microfluidic Sensor ...... 12

2.1

Introduction ................................................................................................ 12

2.2

Surface Acoustic Waves ............................................................................. 13

2.2.1

Shear Horizontal Surface Acoustic Waves (SH-SAWs) ..................... 13

2.2.2

Rayleigh Surface Acoustic Waves (R-SAWs) .................................... 14

2.3

Propagation of Acoustic Waves in contact with a Liquid Medium ........... 16

2.3.1

Boundary Conditions ........................................................................... 19

2.3.2

Standing and Linear Motion Medium.................................................. 19

2.3.3

Moving Liquid Medium....................................................................... 20

2.4

Equivalent Circuit Model of SAW Devices ............................................... 21

2.4.1

Model Implementation ......................................................................... 21

2.4.2

Frequency Response ............................................................................ 22

2.4.3

Attenuation........................................................................................... 22

2.5

Conclusion .................................................................................................. 23

Chapter 3

3-D Design of AlN-based Microfluidic Sensor ............................. 24

3.1

General Description .................................................................................... 24

3.2

Design Principles ........................................................................................ 25

3.3

FEM Simulation for AlN-based Microfluidic Sensor ................................ 29

3.3.1

General Configuration ......................................................................... 29

3.3.2

Lithium Niobate ................................................................................... 30

3.3.3

Aluminium Nitride ............................................................................... 33

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Microfluidic Sensor based on AlN Vertical SAW structure: Investigation, Design and Simulation

3.4

Masks designed........................................................................................... 35

Chapter 4

Results and Discussion ................................................................... 38

4.1

General Description .................................................................................... 38

4.2

Density and viscosity .................................................................................. 38

4.2.1

Lithium Niobate Crystal ...................................................................... 38

4.2.2

Aluminium Nitride Crystal .................................................................. 43

4.3

Sensing Liquid Status ................................................................................. 45

4.3.1

Constant Velocity ................................................................................ 45

4.3.2

Non-constant Velocity ......................................................................... 49

4.4

Conclusion .................................................................................................. 53

Chapter 5

Conclusions and Future Work ...................................................... 54

5.1

Conclusions ................................................................................................ 54

5.2

Future work................................................................................................. 54

Reference ................................................................................................................. 56
Appendix: Material Parameters for Piezoelectric Substrate ............................. 59
A.

Lithium Niobate .......................................................................................... 59

B.

Aluminium Nitride ..................................................................................... 59

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Microfluidic Sensor based on AlN Vertical SAW structure: Investigation, Design and Simulation

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