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DAI HOC QUOC GIA HA NOI
TRUONG DAI HOC KHOA HOC
TUNHIEN
Ten de tai
CHE TAO, NGHIEN CUU CAC MANG VAT LIEU BAN DAN
QUANG DIEN
TUT VA
TRIEN KHAI KHA NANG
UNG
DUNG
MA
SO: QG. 01-03
CHU TRI DE TAI: PGS. TS. NGUYEN THI THUC HIEN
HA NOI - 2003
DAI HOC QUOC GIA HA NOI
TRUiNCi
DAI HOC KHOA HOC
TUNHIEN
1
en
cle tai
CH£'
TAO, NGHIEN CUU CAC MAN(i VAT LIEU
I5AN
DAN
QUANG DIEN
TLT
VA TRIEN KHAI KHA
NANCJ
UN(;
DUNG

MA
SO: QG. 01-03
CHU TRI DE TAI: PGS. IS.
NGUYEN
THI THUC HIEN
Cac can bo tham gia:
1.
PGS. TS. Le Hong Ha
2.
PGS. TS. Nguyin Ngoc Long
3.
PGS. TS. Ta
Dinh
Canh
4.
PGS. TS. Pham Quoc
Tiieu
5.
PGS. TS. Nguyln Hanh
6. TS. Le Thi
Tlianh Binh
7.
TS. Pham Nguyen Hai
8. TS.
LeVanVu
9. TS. Hoang Nam
Nhai
10.
CN. Tran VTnh
Tilling

1
L CN. Ngo Xuan Dai
12.
CN. Nguyen Tlianh
Binh
13.
CN. Le Duy Khanh
HA
NOI-2003
Bao cao torn tdt
a. Ten de tai: Che tao, nghien curu cac mang vat lieu ban dan quang dien t
va trien khai kha nang
utig
dung
M5so:
QG.Ol
-03
b.
Chu tri de tai: PGS. TS.
NguySn
Thi Thuc Hien
c. Cac can bo tham gia:
14.PGS.
TS. Le Hong Ha
15.PGS.
TS. Nguyen Ngoc Long
16.PGS.
TS. Ta
Dinh
Canh

17.PGS.
TS. Pham Quoc Trieu
18.PGS.
TS.Nguyen Hanh
19.TS.Le
Thi Thanh
Binh
20.TS.
Pham Nguyen Hai
21.TS.
Le Van Vu
22.TS.
Hoang Nam
Nhai
23.
CN. Tran VTnh
TliSng
24.
CN. Ngo Xuan Dai
25.
CN.
NguySn
Thanh
Binh
26.
CN. Le Duy Khanh
d. Muc lieu va noi dung nghien
cu'u (iheo
dang kf)
• Che tao cac mang mong don

16p
va da
16p
nhu ZnO,
SnO^,
CdS
^
CdTe
bang
cac cong nghe khac nhau de
lim
ra cong nghe loi
u"u
nhat.
• Nghien
cihi
cac qua
Irinh
cong nghe cung nhu cac lmh
chai vai Iy ci
cac mang da che lao.
•
Tim
hieu
klia
nang
utig
dung cac mang
lix)ng vice
che lao cac cam bie

cac dung cu quang dien tu
e. Cac ket qua
dai du'Oc
De tai da lap trung nghien cuu
vai
lieu ZnO, day cung la chat ban dan
dai
duac the gidi tap trung nghien cuu rat manh. Ngoai ra,
cCing
da
bai
dau nghi(
ciru
vat lieu CdTe. Tuy nhien de tai
chi
neu cac ket qua dat
duyc
doi vai vat lie
ZnO.
Cac ket qua dat
duac
gom:
• Da tao duoc cac mang ZnO bang cac
phmrng
phap khac nhau nhu
phun trnh dien, sol-gel, phiin xa
Kalot.
Da nghien
cuu
va

lim
ra con
nghe, che do loi uu.
• Da nghien cuu cac
linh
chat vat ly cua cac mang che lao
duOc nhu
cau
true
tinh the,
tinh
chat quang,
tinh
chat dien,
ti^r.
• Da tien hanh pha tap AI, Ga, In, Eu, Mn vao ZnO va nghien
cu*u
ca
tfnh chat vat ly
ciia
cac mang co pha tap. Da nghien
ciru
ban chi
ciia
cac tai hap exciton lrong ZnO.
• Buac
dau
nghien
ciru
ve Spinlronics bang

vice
nghien cUu cac ba
dSn
pha
li;r
loang ZnO:Mn.
• Nghien
cii'u klia
nang
li'ng
dung ZnO lam chat
xiic
Uic,
lar
photodiode,
dan S(')ng
am be
mai.
• Xay dung duac
he
do pho truyen qua va tao
duoc
he nhiing
mfiu
ch
phep dieu khien duac
toe
do nhiing
liJ
0,8

cm/phiil
den 7
cm/phiit.
•
Hu6ng dan
nhieu sinh vien nghien cuu
klioa
hoc:
14 (da va dang huong dan) khoa luan
Inl
nghiep Dai ho
nganh Khoa hoc Vat lieu va chuyen nganh Vat ly Chat ran.
3 Cao hoc (mot hoc vien da bao ve luan van )
1 Nghien
cii'u
sinh (dang lam)
• Co 10 bao cao lai cac hoi nghi Khoa hoc, lrong do ca 10 bai de
viet bang
lieng
Anh. Gom:
5 bao cao tai hoi
ihao
Viet
Due,
Hue 2/2002
2 bao cao tai hoi nghi Quang hoc quang pho Toan quoc,Nh
Trang
S/2()02
2 bao cao tai hoi nghi khoa hoc
Trucmg

DHKHTN
11/2002
(Da duac nhan dang a tap chf Khoa
h(.)c
DHQGHN)
1 bai bao o lap chf Khoa
hoc.
DHQGHN
f.
Tinh
hinh kinh phf
ciia
de lai
Kfnh phf duac cap: 60 trieu
(2001:
30 trieu; 2002: 30
Irieu)
Cac khoan chi kinh phf chfnh:
1.12 Hoi nghi, Semina, chi kliac :
1.14 Thue khoan chuyen mon :
1.19 Vat tu,
lK)a
chat, dung cu,
ihiel
bi.:
ll.8K0.000d
21.900.000
d
26.499.000 d
Da CO du chung

tir
quyei loan voi Phong tai vu, ban Ke hoach lai chfn
DHQGHN.
Khoa Quan ly
Chii Iri
de lai
(/'•
/\/^U£j^^
T^
/%^5
Ccy
quan
chii Iri
de lai
Resume
a. Name of project:
Preparation, investigation of properties and application of the
semiconductor films based on
opto-electronics
materials.
Code: QG.Ol -03
b.
Leader of project: Assoc. Prof Dr. Nguyen Thi Thuc Hien
c. Participant members:
1.
Assoc. Prof Dr. Nguyen Ngoc Long
2.
Assoc. Prof Dr. Le Hong Ha
3.
Assoc. Prof Dr. Ta Dinh Canh

4.
Assoc. Prof Dr. Pham Quoc Trieu
5.
Assoc. Prof Dr. Nguyen Hanh
6. Dr. Le
Thi
Thanh
Binh
7.
Dr. Pham Nguyen Hai
8. Dr.
LeVanVu
9. Dr. Hoang Nam Nhat
10.
BSc. Tran Vinh
Tliang
11.
BSc. Ngo Xuan Dai
12.
BSc. Nguyen Thanh Binh
13.
BSc. Le Duy Khanh
d. Purpose and contents of investigation project
• Preparation of single and multilayer films such as
ZnO,
Sn02,
CdJ"
and CdTe by different methods in order to find the best
fo
application.

• Investigation of the technology as well as the physical
propertie:
of produced films.
• Investigation of ability for application in sensors,
opto-electronic!
devices.
e. The main results
The project has been concentrated on ZnO
material.The
results are:
• Single and multilayer ZnO films were prepared by differer
methods such as sol-gel, electrostatic spray pyrolysis, rf magnetro
sputtering.
• Investigation structural, electricity, optical and
magneticc
properties.
• Doping ZnO by Al, Ga, In, Eu, Mn
• Investigation of dilutted magnetic semiconductors such as
ZnO:Mn
• Investigation of possibility of application ZnO for photocatalyst an
ZnO/Si junction for photodiode.
• Building a absorption apparatus and a device for dipping of th
withdrawal speed in the ranger 0.8 to 7.0
cm/min.
• 10 publications have been presented at scientific conferences a
followings:
5 reports in Proceedings of the fifth Vietnamese
-
German seminar o
Physics and Engineering, Hue March 2002.

2 reports in Proceedings of the
3*^
National conferences on Optics an
Spectroscopy, Nha Trang August 2002.
2 reports in Proceedings of the conference of Hanoi University c
Science, VNU (to be accepted to Journal of Science, VNU Hanoi
Hanoi, November 2002
I paper in Journal of Science, VNU Hanoi.
Have been instructed many students in scientific reseachs:
14 (done and being done) university graduate theses on specialities c
Materials Science and Solid state Physics
3 Msc. theses (One has been done)
1
PliD
thesis (being done)
Bao cao chuyen mon
De tai: Che tao, nghien
ciru
cac mang vat
lieu
ban dan quang dien
tir
va
Iriei
khai kha nang ung dung
Muc luc 7
Ma
dau 8
Chuang I:
Trmg

quan ve vat lieu ZnO 10
1.1 Mot so tfnh chat vat ly
10
1.1.1
Cau Iriic
tinh
the
10
1.1.2.
Tfnh chat dien
11
1.1.3 Tfnh chat quang
11
1.1.4
Tfnh chat tir
12
1.2.
Kha nang ung dung cua ZnO
12
Chuang II: Cac phuang phap che tao mang mong
14
2.1
Gi6i
thieu chung
14
2.2 Phuang phap phun
iTnh
dicn
14
2.3 Phuang phap phiin xa Kalot (sputtering)

14
2.4 Phuang phap Sol-gel
15
Chuang III: Cac ket qua va thao luan
16
3.1 Che tao mang ZnO va nghien
ciiu
cac
linh
chat
vai ly 16
3.2 Che tao cac mang ZnO pha tap
18
3.2.1
ZnO pha cac lap chat lao do dan loai n
18
3.2.2 ZnO pha lap dat hiem
19
3.2.3 ZnO pha kim loai chuyen tiep 20
3.3 Nghien
ciJu
ly thuyet ve phuang phap DLTS 20
3.4 Trien
kliai klia
nang ung dung
ciia
cac mang ZnO
21
Ket luan
^

22
Tai lieu tham
kliao
23
Phu luc
7
Mo
dau
Hien nay, tren the giai, cac hap chat ban dan
Ihuoc
nhom
A^^B^^
danj
duac quan tam nghien cufu manh me. Trong cac ban
dSn
do, ZnO duac xem
nhi
mot
''hot
topics" do co nhieu tfnh chat quf bau nhu do rong
vising
cam
Win (cd
3,^
eV a nhiet do phong), nang luang lien ket exciton tu do
lc3fn
(60 meV), do ber
viJng,
do on dinh, nhiet do nong chay cao,
klii

tao ban dan pha
lir
loang co
tfnl
sat ttr a nhiet do phong va cao han No hua hen nhieu trien vong
sir
dung lan
cac linh kien quang dien
tii'
nhu man
hinh
hien thi, bo loc song am, laser,
diode
phat quang, dien
cue
trong suot, spinlronics
Do nhiet do nong chay
ciia
ZnO rat cao va la vat lieu thang hoa rat de b
tach pha nen no thudng duac
che
lao dudi dang mang mdng bang cac
phucmj
phap nhu phiin xa Katot
11
], epilaxy bang
chi^im
phan lir
|2|,
phun

iTnh
dicn |31
sol-gel [4]
Vice
sU dung
phu'o'ng
phap nao de lao mang
liiy ihudc
vao dieu
kien lliie
bi cho phep
cQng
nhu liiy
ihuoc
vao muc dfch su dung.
Phutmg
phap
epilax>
chiim
phan tu cho cac mang cd pham chat rat cao, cd the lao cac mang mdng c(
vai nguyen tu
sir
dung trong cac cau triic nanomel nhung nd ddi hdi thiet bi ra
dat tien klidng the cd duac d Vict Nam. Chfnh vi vay chiing ldi da
lieii
hanh
hxi
mang ZnO bang mot sd
phuctng
phap

tUcmg
ddi re lien, de dung he nhu phun
iTnl
dien, Sol-gel. Tuy nhien, de lao duoc
mSu
cd pham chat cao
hem,
de dang
h(/i
cho viec nghien
ciiu
cac
linh
chat vat ly, chiing ldi cung da tien hanh lao
man^
ZnO bang phuang phap phiin xa Kalot.
Viec ciing tao mang ZnO bang nhirng phuang phap khac nhau cho phep s(
sanh chat luong, kha nang ung dung
ciia
mdi loai. Tuy nhien, vdi mdi
phucmj
phap deu phai
tim
duac quy lrinh dam bao tfnh on dinh, lap lai cao. Vi vay,
ca<
phuang phap nghien cuu, cac thiet bi do phai chfnh xac va cd do lin cay cao.
D(
dat duac cac muc lieu tren, de tai da
sii*
dung cac phucmg phap do, cac he do

che
do tin cay cao cd
san
tai Trung
iam
Khoa hoc
Vai lieu
thudc khoa
Vai
ly,
Irudnj
Dai hoc Khoa hoc Tu nhien.
Ket qua
ciia
de tai la da tao duac cac mang ZnO vdi do lap lai cao, da
ph;
tap Ga, In, Al, Eu, Mn vao cac mang va nghien cuu cac tfnh chat
vai
ly
cii;
chiing. Ngoai ra, de tai da bat dau nghien cuu
Irien
khai kha nang ung dung cu;
cac mang che tao duac nhu lam
photodiode,
bd loc sdng
am
Ngoai
vie^
nghien

ciixi
bang thuc nghiem, de lai cung da lien hanh
nghicMi ciiu
ly thuyet
vi
phuang phap do DLTS lam lien de
c(y
sd lot cho
vice sir
dung
phmmg
phap d(
nay.
Vdi kinh phf de lai duac ho tra va tan dung mot sd
ihicl
bi cd san,
chiinj
tdi da
xay
dung duac he do pho Iruyen qua va
mdi ihiel
bi nhiing mang
V(')i
loc
d<
riit
mang nam trong dai
ti^r
0,8
cm/phiil dcii

7.0
cm/pluil.
8
Ngoai ra, de tai da gdp phan dao lao nhieu
cii'
nhan vat ly chat ran va kh(
hoc vat lieu ciing nhu cac sinh vien nghien cuu khoa hoc d cac nam dudi, cac h(
vien cao hoc va nghien
ciJu
sinh.
Day la
moi
de lai tap hop duac hau het cac can bd lam ve vat lieu ban di
trong Khoa Vat ly. Mac dii kinh phf cd han cho
mdi
lap the ddng can bo
nghit
curu nhung dd la de tai dau lien duac
ihao
luan va
dai
muc lieu lien
Uii
lap
h(
can bo trien khai nhiing hudng phat trien
ciia
Khoa
Vai
ly va

lien
kcl nghien
ci
vdi cac ca quan khac.
9
Chmmg
I
.A,-
^
TONG QUAN VE VAT LIEU ZnO
l.L Mot so
tinh
chat vat ly cua ZnO
LLL
Cau
true
tinh the
Hap chat ban dan ZnO cd cau
Iriic
linh
ihe
luc giac
wurl/ile.
Moi nguyen
I
Zn lien ket vdi 4 nguyen tu oxy nam d 4
dinh
lan can
Hi*
dien (hinh 1).

Nguyen tu Zn Nguyen tu Zn
Hinh
1.
Cdu true
Iuc
gidc wurzite
cua ZnO
Hang sd mang trong cau triic nay la a= 3,24265 A va
c=
5,1948
A.
Ngoai cau triic wurzile, lrong nhu'ng dieu kien dac
bicl,
linh the ZnO cdn
c
the ton lai d trang thai cau
true
luc phucmg gia kem
(cV
nhiel dc)
lal
cao) hoac
ci
Iriic gidng
linh
\h& Nalri
Ciorua
NaCl (cV
ap
suai

rat cao).
Khi tao mang ZnO
Irt^n
de, neu
true
c vudng gdc
ven
be
mai dc ihi
mat
Ircn •
mat dudi
ciia
mang cd the la mat
(oooi)
hoac
(OOOI) lii'c
\l\
mat
ciia
cac ion
^
hoac oxy.
0
Lien ket cua mang tinh the ZnO
vii'a
la lien
kei
ion
vii'a

la lien
kei
ddng hda
tri.
LL2-
Tinli chat dien
Khi che tao, ZnO ludn cd do dan loai n vdi cac donor la cac sai hdng tu
nhien
gay
nen bdi mit
kliuyel
oxy va nguyen
tii*
kem dien ke. Tuy nhien, cac
mang ZnO khdng pha tap thudng khdng ben
vii'ng
va cd dc) dan klidng cao. Vi
vay, ZnO
ductc
lam tang do dan va dc) on dinh bang each pha cac tap nhu Al, Ga,
In. Nong do tap trong ZnO cd the len
dc^'n
1()~*^
cm"^
vi vay
ven
dc) rc)ng viing cam
Idn (3,3 eV d nhiet dc) phdng) nd rat thfch
hcvp
diing lam cac dicn cUc

li^ong suCil
cho man hinh
hic?n
thi, pin mat
Uxri
va
ti"ong lUcmg
lai se thay
ihe
cho mang
ITO
(Sn02:In)
Iruyen
thc)ng
nhung gia ihanh kha
dai.
Can day da
cc')
mc)l sc)
cc^)ng
trinh |5|
cc^)ng bc^i
vc
vice
lao dc) dan loai p cho
ZnO bang
each
ddng pha lap Ga va N. Tuy nhien
vice
lao

dirc/c
ban dan ZnO loai
p cdn la mc)t van de can dau
lu
nghien
cUu nhic^u hem
nii'a.
LL3.
Tinh chat quang
ZnO cd do rdng
viing
cam 1cm,
chuyti'n
mii'c
ihang
va dac
bicit
la cd nang
luang lien ket exciton 1cm (60 meV)
hem
han GaN ( 20 meV) la mc)l vat
lic^u
ciing dang
duc^c
quan tam nhieu. Chfnh vi the, ZnO la me)l vat
lieiu
hua
he:n sir
dung lam cac linh kien quang
diein

lU,
dac biet la cac linh kien phat quang
vi;ing
budc sdng ngan.
Thdng
ihuimg
dc)i ven mang
die}n
cUc lrong
suc)l,
dc) Iruyen
e[ua ciia
ZnO
lrong viing anh sang nhin thay cd
Ihe
len
deii
90% vi vay su mat mat anh sang rat
nhd.
Phei
quang huynh quang
ciia
ZnO
a nhiel
dc)
phc')ng ihinrng
cd nhung dai sau:
Dai
phai
xa

d
vimg
u'r
ngoai gan
bc'y
hap
ihu,
cd dinh nam
cV
khoang 380nm
li'ng vdi cac lai
he)p
exciU)n
[6].
Ti^iy Iheo
phucmg phap che lao,
chai luemg ciia
mau, nd cd
lh(5
la excilon
lir
do hoac cxcilon
licMi
ke't, exciU)n
Ironi^
Iranu
thai
plasma hoac
chewing
chap nhieu loai lai

hc^p.
Dac diem
ciia
dai nay la khdng
de)i
xung, chan sdng keo
dai,
khi lang
cUe'mg
de") kfch thfch
ihi dinh
dich ve phfa
budc sdng dai.
Dai pho
tir
390nm den 410 nm
lue^)n
tdn lai
\6i
moi loai mau. Dai lai
hctj
tap chat nay bien mat khi nhiet de)
lem
hem 77 K va vi trf dinh
phci
khdng dcii thee
nhiet do va ban chat
ciia
nd la tai
he;p

cap donor - acceplor [7|.
Viing xanh
Dinh
pho huynh quang quanh
huac
sdng 500nm cd dac diem la rat rc)ng
tii.
Cho den nay, cd nhieu quan diem kliac nhau ve
dinh
tai
he;p
nay. Cd tae
gia cho rang tai hap nay lien quan
{6'\
tap hydro hoac sai hdng do Zn nan
dien ke, cd tac gia lai cho rang ban chat la do tai
hetp
gan
va\
oxy dien kc
[8,9,10] Tuy nhien, nhieu cdng lrinh
nghieing
ve gia thuye'l dd la tai
ha\
lien quan den sai hdng
lU
nhien do mil
khuyei'l
oxy
11 1

|. Cho
deii
nay
nguein gc)c ciia
dinh nay
vAn
cdn
ductc ihao
luan.
Viing da cam
Ban chat
ciia
dai
pliei
lai 620 nm nay la do lrong mang linh the ZnO
idn Ui
cac mil
khuycSf ciia
Zn hay cac ion
O a
vi
Irf
dien ke tao ihanh cap donor -
acceplor
[12].
Neu lrong ZnO tdn lai tap
chai
la cac kim loai
kicSm
(Li, Na

thi dai nay se lach thanh vang va cam.
Viing dd
Dinh chfnh
cV
663 nm, ngoai ra cc)n cac lap lai phonon
ciia
nc).
Biin
chai
cii
dai nay la do
Fc^"^
hoac
Li"^
ce')
lrong cac hda chai ban dau
du'etc sir
dung d
tao mau.
LL4.
Tinh chat tir
Khi ZnO duac pha cac kim loai
chuyen
tiep nhu Mn, Co, CV, Fe
ihi
n
tao nen ban
dSn
pha
tii'

.Ket
qua la
lii*
ban dan khdng cd lir tfnh, do luo'ng lac
cii
Ccic
ion
lir
vdi cac hat tai
dicin ciia
ban dan ma [it tfnh
xiuYl
hien. Tfnh
chai
na
duetc
su*
dung
a
spinlronics la mc)l huemg
mei'i
ket hap
giiJa
ban dan va lii.
L2 Kha nang
iirng
dung
ciia
ZnO
Be)l va mang ZnO la nhung vat

lieu lal cpian
lrong lrong cdng
nghe gc)m
v
cdng nghe mang mdng.
12
Bdt ZnO pha tap thich
hc)[) due^c
sir dung lam
chai
c|uang
LIAU
lii>ug
cong
nghe chup anh dien. Bot ZnO d dang
ge)m ducfc diing
lam varislor, cam
bieii
khf
chay
Mang mdng ZnO dinh huemg cao ngoai
vice sir
dung lam dicn
cu'c liong
sue)t
nhu da neu
a
trejn,
nci
cc^n

cei
ifnh
ap dien manh
difoc dimg
lrong cac
ihiei
bi
semg am
be mat,
scMig
am
khc)i,
ihici
bi
tpiang
am hoc, cac
he ihdng
vi
co'
dicjn.
Mang ZnO pha tap Al, Ga, In cd de) phan xa hdng ngoai
lc)l
nen duo'c dung
phii
len cua kfnh nha d. Cdn khi pha cac kim loai quy nhu
Pd.
Pl nd
du'evc
ung
dung lam cam nhan khf chay.

Hien nay, cac hat kfch
thue^c
nano ZnO dang
duc^c
lap trung
nghitjn ciru
rat
manh vi
nc5
md ra mc)l trien vong cho the he cac linh kien
men
vei'i nhu'ng
ifnh
chat hoan loan kliac so
vc^i
mau
klic)i.
Cac chuyen tiep di ihc
[ix
ZnO
dirc;c dicing
lam cac linh kien quang dien
lU
chat lucmg cao hoat de)ng
a
viing tu ngoai va lam pin mat
treVi.
13
Chucmg II
CAC

PHU()N(i
PHAP CHE TAO MANG
M()N(i
2.L
Gioi thieu chung
Hic^n
nay
treSn ihe gicifi
dang phat trien
rai
nhieu phucmg phap che lao mang
mdng,
tii*
nhirng ky thuat hien dai nhu epitaxy chiim phan lir
(MBE),
lang dong
xung laser
(PLD),
phiin xa KaU)l (spullering), lang dong
ho'i
hda hoc (CVD)
dc}'n
cac ky thuat tucmg
de)i
dcm gian nhu phun dung dich tren de ndng, tang dong hda
hoc,
Sol-gel Mdi
phmmg
phap deu cd cac uu diem va
nhirc;c die}'m ric}ng

liiy
thuoc vao muc dfch nghien
ciru,
ung dung cung nhu loai
vai
hou lao
nen
mang.
Trong
chU(]^ng
nay se trinh bay chi liet
hem
ve^
cac phucmg phap da duac de lai
sir
dung de che lao mang ZnO pha lap va
khc')ng
pha lap
dicing
cho muc dfch
nghie}n
cuu, li'ng dung phii
he)p
ven hoan canh va dieu kien
ciia Vieil
Nam.
2.2.
Phuong phap phun
tinh
dien

Phuang
phap nay duoc
ihuc
hicn ducn Uic dung
ciia
dien
Iru'cVng.
Dien
tm'dng tir
ngudn cao the
(klioang
20 kV) lam cho dung dich cd
chii*a
lien chat
ciia
vat
lie^u
can tao bi ban xudng de ndng ducn dang
sucmg mii
va ngay sau dd lang
dc)ng
tren
deS'va
tao Ihanh mang.
PhUemg
phap nay cei uu
ehem
la dcm gian, de
ihifc
hien, chi phf

rti,
mang
ihu
duac cd do ddng deu cao, dicn phu rc)ng.
Vdi ZnO, khi
sir
dung phucmg phap nay cd
Ihcj
diing
mue)i kein
acelal
hc^a
tan trong dung mdi la
rirc)u
isopropanol va
nUe'Vc
cat. Mang duac lao tren de kfnh
vdi nhiet dc) de nam lrong khoang 300 -
40(rC.
2.3.
Phuong phap phiin xa Katot (sputtering)
Day la phucmg phap lao mang mdng tu'cmg ddi hicn dai. Mang
due;c
lao
lrong budng chan khdng cao (cd
10^'
Torr). Ca
scV ciia
phucmg phap nay dua
lien

hieu
irng
ban pha
ciia
cac hat lai cd nang
lUcmg
cao
yCi'\
cac nguyen lu
ciia
chat
ran
can tao mang lam bia (bia
dirc;c nc)i
ven
KaU)l)
lam bat cac
nguyen
lii*
bia
hUcmg
ten
dc (dc duac
ne)i
vci'i anot) rdi lang dong lao ihanh mang. Cac
nguyen lir
diing de ban pha bia
thUcVng
la khf
iva

Argon
vei'i
bia la
gc)m
duoc lao
lir
bc)l ZnO
nung then
k(}'t.
Che dc) lao mang nay liei
kiem
duoc nang
lifo'ng,
cac
hai
ldi dc cci
nang
lUcmg
cao do
de')
mang co
cluil
luo'ng
ldi,
dd chac dac va
ifnh
dinh huemg
cao.
Tuy nhien gia thanli
ciia

san pham lao hang phucmg phap nay luong ddi cao.
4
2.4.
Phircmg
phap Sol-gel
Phuctng
phap Sol-gel da cd
ti^r
hem 30 nam nay, luy
nhien
hicn nay nd
vfin
dang duac
chii
y ap dung rdng rai vi
nhii'ng
uu
[he
rieng nhu cho phep tao duac ca
mau
khdi,
mSu
mang va bc)l ven quy lrinh khdng phUc tap va liei
kie:m
nang
luang.
Ban chat
ciia
phUemg phap Sol-gel la dua
Iren

phan
iing ihiiy
phan va
ngUng tu
ciia
cac lien chat (precursor) bang each dieu chinh
lc)c
dc)
ciia
hai phan
ling tren de dat duac vat
lic^u
mong mudn.
Tir
dung dich (sol) bao gdm cac chat
dua vao phan
iing ductc
hda lan ven nhau qua phan
iing
thiiy phan va ngung lu ta
thu
dugc
gel. Sau dd gel
xe)p
nay
duc)c
dua
xii*
ly de lao ra cac chat ran.
Dua vao vat lieu ban dau di

sii*
dung cho qua lrinh
tcSng
ho'p
ngUc^n
la cd
ihe
chia
phucfng
phap Sol-gel thanh 3 dang chfnh:
-f
Sol-gel di lir
ihiiy
phan
mue)i
lrong dung dich nUeic
+
Sol-gel di tu thiiy phan phUc
chai
+ Sol-gel di
lir
thuy phan alkoxide.
Trong ba
each
tren,
phuo'ng
phap thiiy phan
alkoxide
cho
chai lue^ng

san
pham
tc)t nhai
tuy
nhicjn
gia ihanh
ciia
nguyen
vai licjii
rai cao.
Phucmg phap
Ihiiy
phan mudi cung thudng
duc^c
chon vi cac mudi duo'c
sir
dung la rat re so
vclfi
cac phucmg phap khac. Tuy nhien, phucmg phap nay khd
dieu chinh de hat tinh
thcS'
c6 kfch
ihuac
nano.
Khi tao mang bang phucmg phap
Sol-gel ihuc'mg dicing
3
each:
nhiing de}'
vao dung dich sol (dip-coaling) va

keSo
len
ven
cac tdc do
kcSo
phu
heyp
hoac gid
dung dich trcin
dcS'
va quay li tam (spin-coaling) va thao
(diaining)
hoac phun
(spraying).
Phucmg phap Sol-gel cd cac Uu diem sau:
+ Ducrc
thuc hien
c'^
nhiel
eV
nhiel de) thap, giam
due)c sir
bay hen
ciia
cac ihanh
phan do dd
tieS't
kiem nang
lUcmg
nhiet, giam d nhiem mdi trudng vi chat dc)c.

+ Cd the tron lan d quy md nguyen
lir.
Khdng
lc)n
nang
lUemg
nghien lre)n.
-I-
Cho san pham
ce')
dc) linh
khiejl,
ddng
nhai
cao, be
mai lieng
Ici'n,
hoai ifnh
cao,
cd the bao phu 2 mat cua cac vat cd hinh dang bat ky.
-f
Dieu khien dugc hau het cac giai doan Icing
hevp
san pham.
+
Hda chat cd the
sir
dung
nhi(5u
lan, lao ra fl

chai
ihai.
Nhucyc
diem
ciia
phucmg phap nay la gia thanh
cc^n lUemg
ddi cao va khd lao duac
mang day.
15
Chucmg III
CAC KET QUA VA THAO LUAN
3.1.
Che
tao mang ZnO va nghien
ciiu
cac tinh chat vat ly
Trong phan nay se lrinh bay cac ket qua tao mang ZnO bang phu'o'ng phap
Sol-gel.
Tai khoa Vat ly trUcmg Dai hoc Khoa hoc Tu nhien,
phuo'ng
phap Sol-gel
dugc
su*
dung lan dau
tieSn
vao dau nam
2001
lai phdng thf
nghieim

Vat ly ban dan
cua Khoa .
Cc^ng
lrinh tao mang ZnO dau
tiein
dugc dUa bao cao lai he)i nghi
vai
ly chat
ran
U)an
quc)c
lan
ihii'
3,
8-2001
lai Nha Trang [12
].
Tuy
nhicjn ihc^'i
gian
dd chat
lue:^ng ciia
mang chua cao, chua tao
duetc
mang da
16fp,
dinh
huc'mg ciia
mang chua tdt. Muc
ticju ciia

de lai la phai lao
due)c
mang da
Ic'tp
va
sir
dinh
hucfng
phai cao. Sau qua trinh cai tien, thay ddi cdng nghe:, cac mang da
le'yp
cd
sir
dinh
huc'yng
cao da
due)c
che}'
lao.
Ket qua nay
ciia
de tai da
duc;^c
bao cao va dua vao ky yeu
ciia
he)i
ihao
Viet-Diic
ve Vat ly va Ky
ihual
lai

Hue}'
thang 3/2002
113j.
Tren
hinh 2 la gian dd
nlii(}u
xa tia X
ciia
cac
manu che
lao dUo'c.
1800
1200
W5
a.
o
c
600
0
30
50
40
2
ihela ticgrcc
///////
2.
Gicln
do nhieu xa
lia Xcua
mdiii^

ZnO ehe lao
hdng
phu'o'ng phdp Sol-gel
Nhin gian do, dc
ihay rfuig
chi
xuAi
hicn dinh
nhieu
x;i
(002). Dicu
dn
chirng td cac hat linh the}' cd dinh huemg sao cho
iriic
c vudng
gcic ven
he
mai
de.
Ngoai su dinh hUcmg cao, cac mang ZnO che lao bang
phucyng
phap Sol-
gel ciing cd do
truyen
qua kha cao, khoang 80%
113|.
Tfnh chat quang
ciia
cac
16

mang che tao duac da duac nghien curu thdng qua
phc^
quang huynh quang (PL).
Nhu da neu d phan 2.1,
ph6
PL
ciia
mang ZnO
a
nhiel do phdng
thuc'mg
cd hai
dai:
dai nang
lue^fng
ung
vc'n
qua lrinh lai
hctp
exciton quanh buci'c sdng 380 nm va
dai tai
he;p
cd dinh quanh 500 nm
ducifc
gan cho tai hgp qua
V<\m sau iing ven
mil
khuyet oxi.
Phci
PL

ciia
cac mang che lao dugc cho
iha'y a nhiel
dc) phdng,
cuc'yng
do dinh exciton
la'n
at cUcmg de) dinh 500 nm. Dieu dci chirng
id sir
kei linh va
chat luang
ciia
mang
te)l.
Vc^i
cac mang da tao
duoc,
chiing tdi da tim hieu ve ca che}'
ciia
hai dai lai
hap ndi tren. Ket qua do ph6 PL d
viing
nhiel de)
ihap [ 13
| cho
ihay cUc^'ng
dc) dai
PL gan bd viing tang khi
nhi(}l
do

li
mang tang. Dieu nay
chii'ng id sir
kcl linh
ciia
mang tang
vc'n
nhiel dc). Da lim ra
nhic}l
dc)
li le)l nhai
cho mang la 500
"C.
Vi
mang ZnO
duc)c phii
trc}n de
ihiiy
linh nen khi nhieil dc)
li
cao
ho'n
500
"C,
chai
luang
ciia
mang kem di. Mc)l lrong cac nguye}n nhan la do
sir
cong venh

ciia
de
kfnh.
Cac ket qua do PL d nhiet dc)
ihap
cho phep doan nhan excilon la lie}n kcl
vcifi
cac tap chat (excilon lien ket) va dinh huynh quang quan sal
diro'c
d nhie}l de)
phdng la thdng qua lai ho'p
ciia
exciU)n
hen
kc}'l
veifi
lap
accepU)r
Irung hda
113].
Ngoai dinh PL
ciia
exciton, chiing
tcM
ciing quan tam
lej^i dinh
500 nm. Ve
dinh nay, cd nhieu quan diem ddng nhat khac nhau. Cd tac gia cho rang lai
he;p
nay lien quan

Ic^i
tap Cu
[
14], lap hydro
f
10] sai hdng do Zn nam
dic5n
ke
115]

Tuy nhien, nhie}u Uic gia
nghicMig
vc
sir hen
quan
Icii
sai hc')ng
lU nhien ciia
mil
khuyet oxy
[11]-
Chiing ldi da
li(}'n
hanh xem
xcl
sU anh huc'mg
dcii cu\mg
dc) PL
cua dinh nay va thu
duc)c

kcl qua | I3| la ven lal ca cac mau du'oc
li
lai lrong mdi
trudng oxy, cudng do
ciia
dai 500 nm deu lang len. Ke}'l qua nay
Irai
vcii gia
lhi(}'l
tai hap lien quan tci'i mil khuye}'l oxi vi khi
li
mau
li'ong
mdi
iruc^ng
oxy, ndng dc)
mil khuyet oxy phai giam. Chiing ldi cho rang
Uii hc)p
nay
lien
quan manh ven cac
tam be mat hoac bien
hai
vi
cUc'mg
dc) dinh 500 nm giam manh khi do
mau
trong
chan khdng cao.
De tim

each
tang
cUc'mg
dc) huynh quang
ciia
cac mau, chiing ldi da tic}'n
hanh xu* ly
mau
lrong ludng khf hydro va cho an mdn be
mai
116].
K(}'l
qua cho
thay
klii
an mdn
be^
mat mang bang axil HCl (PH
=
3)
cuc'mg
dc) PL tang
l(}n
2
lan. Khi
li mau Irc^ng H2 cUcmg
de)
ciia
dinh tai
hctp

excilon tang len. Tren hinh 7
va 8 [16] la dd thi
phci
PL
trucl^c
va sau khi u
H2,
an
mdn.
Qua ket qua
li H2
va an mdn be mat bang HCl chiing ldi cho
lang
vai
lid
ciia
hydro rat quan
li'ong.
Nd lam thu dc)ng hda nhu'ng
Uim
oxy nam d
bien
hai.
NhiJng tam nay ddng vai
Ird
cac
acceplor
va lam giam
cUe^mg
dd huynh quang.

Nhirng k(}'l
qua
Iren
diing ca cho cac mang do'n
lei'p
cung
nlur
cac mang
ZnO da
Icyp.
Chiing ldi da
licMi
hanh
phii
chdng
nhieu Icip
ZnO bang 2 phuong
phcip:
chdng
Ic'yp
say va
dicing Ic'yp
u
so"
be)
|16,17|.
Cac Uii
lieu
cluing
ldi ihaiii

khao duac deu lao bang phucmg phap
li
so'
be)
nhung ke't qua
ciia
cluing ldi cho
thay
vice clic'')iig Ic'ifp
say da cho cac mang
cc) cUc^ng
dc) PL cao hon.
Ngoai ra, chiing tdi cung da
tic}'n
hanh tao cac mang ZnO bang cac phUcmg
phap khac nhu bcic bay Zn trong chan khdng sau dd
li
nhiet lrong khdng khf, lao
bang phuang phap phun trnh
die}n,
spullering. Cac mang tao bang
phuenig
phap
bdc bay Zn trong chan khdng cd
ifnh
dinh hUemg khdng cao,
cUc^'ng
de) dai PL
exciton nhd
[18]

nen khc)ng
duc;c
lrinh bay d day. Cac mang che lao bang phUo'ng
phap phun lmh dien va spullering se dugc trinh bay trong phan ZnO pha tap.
3.2 Che tao mang ZnO pha tap
3.2.1 Pha cac tap chat tao dp dan loai n
Ta biet rang, mang ZnO
due)c
che tao ludn mang tfnh dan dic}n loai n. Tuy
nhien cac mang ZnO nay khd cd
Ifnh Cm
dinh cao va ndng dc)
hai
lai thap lam
mang cd dien trd 1cm.
Mue)n
tao
duc^c
mang ZnO cd tfnh cin dinh cao va dac biet
la cd dien trd nhd lam dien
cue
phai pha tap.
Chiing
tc')i
da tien hanh pha tap In vao mang ZnO che}' lao bang phUcmg
phap phun
iTnh di(}n
[19,20], pha Ga vao mang ZnO che}' lao bang phucmg phap
Sol-gel [21] va pha Al vao mang che tao bang phucmg phap spullering |22]. Vei'i
phuonng

phap Sol-gel, Ga
duc;c
pha vao ZnO bang each dua them Ga(NO
J^.
9H2O
vao
dung
djch lao ZnO
[21].
Qua khao sal
sir ihay
dcii dien
IreV
mau ZnO:Ga len
nong do tap Ga va nhiet do
li
man chiing ldi thay rang cac mang cho dien
IrcV
nhd
nha't khi
nhie}t
do u la
5(){)''C
va ndng de) lap Ga la 1 al%.
Ket qua tren cung duofc
Ihci'
hie}n lrc}n gian dd nhie}u xa lia X. Vci'i ndng dc)
Ga 1 at% mang cd dinh hueing le)l hem va cUcmg dc) dinh
nhi(}u
xa cung lem ho'n.

Ngoai
su*
phu thudc
lrc}n,
dien
IrcV
suat
ciia
mang cung phu lhuc)c vao sc)
Icip
chdng
cua mang. Ket qua cho thay dien
IreV
suat
ciia
mang giam khi sc)
le':fp
lang va dat
cue
tieSu klii
sc)
Icifp
la 10. Tren 10 lap die}n
IrcV
suat lai tang.
Nhu'ng cdng lrinh gan day cho
ihay,
mang ZnO pha lap cd
diejn IreV
suat

nhd
klii mSu
duac u trong hdn
hc)p
khf nha va hydro. Chiing ldi da lie}'n hanh
li
mang ZnO:Ga trong khf hydro. Ke't qua cho
ihay
dien
tre'y ciia
mang giam di 2
bac va bao hda
klii then
gian
li due;c
3 gid d nhiel do 450
''C.
Ven cac qua lrinh
xii*
ly
Iren
chiing ldi da thu
dire)c
ki}'l
cpia
dicn
IreV ciia
mang
li
trong hydro, cd 10

IcVp,
ndng dc) Ga 1 al% la 4. 10
~
Qcm. Gia tri nay ce)n
cao so
vei'i
mang
che}'
lao bang phu'o'ng phap spullering nhirng
ihap
ho'n so vcii
mang
ZnO:In
chei' lao bang
phiremg
phap
pluin iTnh
dicn va
dii
dc
lani
dicn
cue
lrong
suc)l
vi do truyen
c[ua ciia
mang >
X(Y/(i.
Vie}c pha lap In vao mang ZnO

che
lao bang phUong phap phun
iTnh
dicn
duo^c
thuc hien bang
each
dua acelale indium vao dung dich lao ZnO |
I9|.
Ndng
dd In nam lrong khoang 3
-
5^/('.
Kcl qua cho
Ihay,
dicn
Irc'y mai ciia
mang giam lir
20 MQ xudng 20 kQ khi pha 3
al%
In.
Kei
qua do EDS cho
ihay In
da vao
duc^c
mang
vc'Vi ii(5ng
dc) ho'p ly nhu'ng dicn
Ird

van
lein
so vdi cac mang pha bang cac
S
phuang phap khac. Chiing ldi cho rang nguyen nhan
ciia
nd la do cac ion In
chii
yeu
nam
c^
bien hat va mang kha
xc)p
nhu anh SEM da cho
ihay.
Mac dii viec pha tap
In
chua dat
duerc
dieu kie}n lam
die}n
cue lrong
sue)l
nhung ke't qua do phei PL
ciia
cac mang
ZnO:In
che}'
lao bang phuo'ng phap phun
lmh dien d nhict do thap cho phep chiing tdi khang dinh lai ca

che}'
lai ho'p exciU)n
bang
each "
lit
"
cac gia tri
Ihiic nghiem
ven cdng
ihirc
ly
ihuyei
|20|. Kei qua so
sanh ly
thuyc}'t
va thuc nghiem cho phep ke}'l luan rang 3 dinh Uii
hc^p
exciU)n
tuang ling vdi exciU)n lien kcl
veii
donor ion hda
|D'',x|,
exciU)n
lien ke}'t ven
acceptor trung hda
[A'\
x] va lap lai phonon
ciia
nd.
Trc^ng

cac tap chat pha vao ZnO, lap Al cd gia thanh
ihap
nhat. Tuy nhien,
dcM vcVi
phucfng phap Sol-gel va phun tinh dic}n chiing ldi
ihay
rang vie}c pha lap
Al klidng thu
duc;c
kcl qua
tc)l
bang In va Ga. Nguyen nhan cd
ihe
do
vice
lao ra
ALO^
trong qua trinh
li
mau.
NgUctc
lai, vie}c pha Al vao ZnO bang phu'emg phap
spullering cho ket qua
te')l
hon
rai
nhieu. Chiing ldi da ur lao bia ZnO:AI
iheo
ndng do tap mong mucin va kcl qua cac mang
Ihu due;c

cho
ihay
vdi phucmg phap
phiin xa rf magnhetron mang ZnO
ihda
man yeu cau
ciia
me)l dien
cue
lrong sueit
la dinh
liUe'mg
cao, dien trd
suai
nhd 8,7 .
10"'
Qcm
d(}'n
1,8.
10"'
Qcm, ndng de)
hat tai
nam tre:)ng
klioang (0,2
-
3,1)
l(Pcm"\
dc)
Iruyejn
qua trung binh dat

d(}'n
89%
ve'Vi
mang cd
chie!u
day
1,9
pm [22].
3.2.2 ZnO pha tap dat hiem
De ung dung
sir
phat quang lrong cac linh kien quang dicn
lii,
cae lap
chai
dat hiem nhu Eu, Er, Dy
thuc'mg duc^c
pha vao ZnO.
Tlidng
ihue^ng,
khi pha
lap Eu vao ZnO
ngmyi
la phai ddng pha lap Li
de
dua diro'c Eu vao mang, hoac
sir
dung
EUCI3.
Chiing ldi da

sir
dung phuong phap Sol-gel de lao mang ZnO:Eu
bang
each
lhe}m
Eu^O^
-\-
HCl vao dung dich
de}'
du'o'c ndng de) Eu I
al%
|23|. Ke}i
qua cho thay pho PL xual hien 5 vach hep d 577, 590,
615,
650 va 690 nm.
Nhii'ng dinh nay khdng phai la nhung
dinh hen
quan den cac Uii hop gan veii sai
being ric}ng
ciia
ZnO ma la nhu'ng chuyen muc
bcjn
lrong
ciia Icip
41'
lrong cac ion
Eu^^"":
^D^
(j =
0,1)

-^ ^Fj
(j =
0,1, ,6).
Su xual
hi(}n
cac dinh huynh quang nay
chung id sir
cd mat
ciia
Eu lrong mang ZnO.
Vice
pha lap
Eu'"^
va cac ion
dai
hiem
klicic
vao ZnO da dugc nhieu cdng lrinh cdng
be).
Tuy
nhien,
cci
ihe ihay
rang Eu khd khuye}'ch lan vao lrong cac
hai
linh
ihe
ZnO vi ban kfnh
ciia chiinj
km va cac ion

Eu-'""
lai lich dicn. Tir
IrUcVc
len nay cei 2 md hinh vc
sir phai quanj
ciia
Eu trong ZnO che lao
cV
nhiel dc) cao
la:
cac ion
Eu'^
nam
chii
yeu ci bien
hai
va huynh quang
ciia
cac ion
Eu^""
chi cd
ihe
xay ra khi ddng kfch
hoai
cac ion
Li""
hoac
N^""
dirc)c
dUa

ihcMn
vao ZnO d 900
"C
hoac
1200 "C
va lao
ncMi
su Iruyen
nang luemg
tii*
ban dan cho cac ion
Eu'*.
Gia Unci
llur
hai cho rang huynh
quaii^
ciia
Eu-'""
d
ZnO:EuCl3 leing
hop
eV
I 100
X
la do
EuOCI.
Mau cluing ldi che lao
khdng pha them Li, hon nua
nhiejl de^) li
mau chi 500

"C
vi vay md
hinh c(i
Li nhu
19
t^
cac tac gia khac neu d tren khd xay ra. Tii pho EDS chung ldi thay cd xuat hien
Cl vi vay cd the xay
sir
phat xa
ciia mSu
cd nguein gcic
ciia
EuOCl.
Tuy nhien
mau
cua chiing toi lai chi u d 500
^^C
va anh sang kfch thfch cd nang lucmg nhd
han do rong viing cam vi vay cd the
EuClO
nam ei cac bien hat.
3.2.3 ZnO pha kim loai chuyen tiep
Ban dan pha loang
lii*
dang
duefc
quan
Uim rai
manh

nhc'y cei ihc
kcl
he^p
giiia ban dan khdng cd tii
ifnh
va
lii'
ifnh ciia
cac ion kim loai chuyen
licp
khi
duac pha vao ban dan
chii.
Day la
mdi
hucmg manh lrong linh vuc spinlronics.
De nghien cuu ban dan pha lii' loang chiing ldi da lien hanh pha lap Mn vao
ZnO che tao bang phucmg phap
y.[\
magnhetron spullering. Bia
due;c
lao lii be)l
MnO^
va ZnO va nung
iheu
kei d
1300 "C
lrong khdng khf lrong 3 gid. Ndng de)
Mn
chay

ti^O den
0,36 [241.
Ket qua cho thay khi pha Mn
cUe'mg
dc) dinh nhieu xa lia X lem hem, ban do
rdng
he^p hem
so
vcjfi
ZnO tao
citing dieju
kie}n. Dieu nay chung
id
khi pha Mn
sir
ket tinh
ciia
mang
tdi hem
va kfch thucic hat tang
ICMI.
Ngoai ra, cac hang sd mang
c va a tang tuyen tfnh vcii su* tang ncing de) pha lap Mn
d(}'n
tan
x=
0,36. Dieu nay
cliii*ng
td cac ion Mn da nam ei mil mang thay the cho ion Zn.
Phci Iruyen qua

ciia
cac mang cho
iha'y bc'y
hap thu co' ban dich ve phfa
nang lucmg cao
klii
ndng dc) Mn lang.
Kei qiia ifnh
U)an dc) re)ng
vising
cam Eg
cho
ihay
Eg tang tuyen tfnh
ve'ti
x.
Dudng cong tii'
tr^
do
duci'c
ci nhiel dc) phdng cho
ihay
mang cd
Ifnh
sal lu
va
lire kliang
tii*
klioang 44 Oe.
Gan day chiing tdi da lien hanh pha Co vao ZnO va da

ihu
diroc kcl
cpui uil
han ra't nhieu so vdi pha Mn
[271.
3.3.
Nghien cuu ly thuyet ve pho qua
dp
tam sau
Phci qua do
iam sau
(DLTS) la mc)l cdng cu huu hie}u de nghien
ciiu
ve
iam
sau. Tuy
nhie}n,
vic}c
hi(}'u
rd ban chat
ciia
phUemg phap qua dc) tam
sau
nham khai
thac het nhiing khfa canh
ciia
nd, ung dung vao vice nghien cuu cac chat ban dan
la me)t van de can dat ra.
Trong mdt cdng trinh dang d ky ye'u hc)i
ihao

Vict-
Diic
|25| chiing ldi da
lrinh bay mdt phUemg phap lach
nhieu
ngau
nhien
khdi
ifn hic}u
dicn dung lrong
phe}p
do DLTS. Phuo'ng phap dicing ke nay cho
pht}p
lach
nhieu
khdi
ifn
hieu khi
ly sci tfn hie}u
lr(}n
nhieu giam xueing
dueii
10. Kcl qua cho
ihay,
bang
phu'emg
phap nay cd [he khai
ihac IhcMTi
Ihdng lin, nhu
Uich

duo'c nhung dinh qua gan
nhau ma phucmg phap
chi
diing lock-in khdng the}'
ihuc
hien duoc.
20
Ket qua kiem tra tren mau CdTe cho thay, binh
thuc'mg
chi cd the quan sal
duac 3 dinh DLTS nhung bang phucmg phap lach
nhifiu
da quan sal thay 5
dinh
[25].
Nge^ai
phucmg phap Uich nhieu da neu, me)t phUcmg phap phan tfch dinh
lucmg cac muc nang
lucnig lal
gan nhau lrong phd
DL1\S cfing
da duo'c de xuai
[26].
3.4 Trien khai kha nang urng dung
ciia
cac mang ZnO
Veii cac mang ZnO che}' tao dugc chiing ldi da lrie}'n khai lim hieu cac ap
dung thuc
licMi
va cei cac kcl qua sau:

- Mang ZnO:Al
che}'
lao bang phUemg phap
r.F
magnhetron da cd [he dimg lam
dien cue trong
sudl
Iruyen qua
ihay
cho ITO. Mang ZnO:Ga che lao bang
phucmg phap Sol-gel cung cd the}' diing lam dien
ciic
trong sueit luy khdng
Icil
bang mang
che}'
tao bang phUcmg phap phiin xa.
- Da lien hanh
thii*
nghiem
xiic
lac lre}n mang ZnO che}' lao bang
jihucmg
phap
Sol-gel, ket
qiia
cho tha'y
hieu iing xiic
tac xay ra nhung vi mang mdng nen tfn
hieu cdn nhd. Day chfnh la

nhuc^c
diein khdng lao dugc mang day
ciia
phuemg
phap Sol-gel. Trong lucmg Iai cluing ldi se cci gang lim
each
lao
duyic
mang
day
hem
de lan dung tfnh
chai
xcip, dc dang cho hieu
iing xiic
Uic
ciia
mang
che tao bang phUcmg phap Sol-gel.
- Da tien hanh tao mang tiep
xiic
ZnO/si loai n bang phu'o'ng phap phiin xa
r.l".
magnhetron. Ket
qiia
do phei quang dan va
ihe'n
gian dap cho
ihay
diode

ZnO/Si-n cd the
sir
dung lam pholodiodc ven mien nhay quang nam lrong
khoang 1
).Lm
va
ihc^'i
gian dap
ngan.Tren
hinh 3 la phd quang dan
ciia
diode.
- Da
bucic
dau
nghien ciru
hie}u ung ap dicn
ciia
mang ZnO
che
lao bang
phucmg phap phiin xa
iA\
magnhelron.
3E-5
lE-5
500 600 700 80O 900
1
OOO
1 100 1200

wavelength nm
///////
3.
Phd
quang ddn
eiia
photodiode ZnO/Si-n
21
KET
LUAN
Sau thdi gian hai nam
ihu'c
hien, de tai da thu
due)c
nhiing kcl
ciiia
sau
• Da tao
ducjfc
cac mang ZnO, ZnO pha lap Ga, Al, In, Eu, Mn bang cac
phuemg phap Sol-gel, phun
iTnh
dicn va
\'A\
magnhelron
s[nillering
veii
tpiy
trinh on
dinh.

• Cac mang che lao
due^c
cci tfnh dinh hUcing cao,
true
c vudng geic veii he
mat de, dc)
truye^n
qua dat > 80% lrong viing nhin thay.
Mang ZnO che lao bang
phirctng
phap phun
iTnh
dien cd de) xcip cao
ihfch hcTfp
cho
vice sir
dung lam sensor nhay khf,
xiic
Uic. Vice pha lap In
vao ZnO bang phuemg phap nay chUa dat yeu cau
sir
dung lam die}n
ciic
trong
sueit.
Cac mang
che
lao bang phuo'ng phap Sol-gel cei
Ifnh
lap lai cao, dn

dinh. Khi pha tap Ga dicn
Ird
suat la
10'~
Qcm vdi ndng de) Ga lal%
dai
chat
luang
tdt
nhai
va cd the
sii
dung lam
die:n
cUc lrong
sueil.
Khi pha Eu,
da thu dugc phci huynh quang
lUemg
ung veii
chuyen miic ciia
Eu
liong
nen
tinh the ZnO.
Mang ZnO:AI che}' tao bang phuemg phap phiin xa
r.f.
magnhelron
cho kei qua
rai

kit lrong
vi(}c sir
dung lam dien
cue
lrong sueil veii dien
IreV
suat
10"^
Qcm va de)
truyeSn
qua > 80%.
• Da
bucVc
dau
nghi(}n
cii'u ITnh vUc spinlronics bang each lao ban dan pha
loang tii tren
ce:^
seV pha Mn va ZnO. Da nghie}n
ciiu
cac
ifnh chai
dicn,
li^r,
quang
ciia
chiing.
• Da nghien cii'u ly lhuye}'l ve phUcmg phap DLTS lao dieu kien di sau lim
hieu khai
ihac sir

dung
phuevng
phap hicn dai nay.
• Da
xay
dung he do phci hap thu, quang dan va he: nhiing mang.
• Da nghien cii'u trien khai
lilig
dung cac mang
che
lao duo'c lam
diejn
cUc
lrong sudt truyen qua, lam phe)U)die)de.
Nhiing ke}'t
c^ua
lr(}n
cho
Ihay vi(}c
Irien khai ung dung cac mang da
che
lao
ce^n
bi han che so veii vice nghien
ciiu
cac linh
chai vai
ly cua chiing. Nguyen
nhan
ciia sir

han che Uvn la
di)
ihai gian chua
dii
dai
dc
cci
ihe
vira nghie}n
ciru
quy lrinh lao
mau
vira nghien
ciiu
cac
ifnh
chai
vai
ly
vira liicn
khai phan ung
dung cho that hoan chinh.
Mai
khac, cd nhung khd khan khac nam lrong quy
lrinh cdng nghe vf du
vice
lao dugc mang day
Ircn
1
|.im

de nghien cuu kha nang
xiic
tac la
klici
klian.
Ngoai ra, kinh phf duo'c cap chua dap
li'ng dii de Iricjn
khai
tdt phan
iing
dung,
lrong
lUo'ng,
lai neu dugc
sir iing
he)
ciia
lanh dao chung ldi
22
hy vong ring viec nghien cufu licp tuc
hiring vai lieu
mang mong nhom
II-VI
se
clal
duoc
nhirng kei
qua
toi
hem,

dac biet la huong ung dung.
Cuoi cijng cac can bo tham gia de lai xin cam
ofn
cac cap lanh dao cua
DHQGHN, DHKHTN da lao dieu
kien
de de lai c(')
liie
hoan ihanh,
dai
kcl qua tot.
Tai lieu tliam khao
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technology, 1996.
[2] D.M. Bagnall
el.al,
Appl. Phys. Lett. 70
(1997),
2230
[3] S.A. Studenikm, N. Golego and M. Cociceva, J. Appl. Phys.
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2287
(199S)
[4] Werner Kem, John L.Vossen,
Tliin
Tilm Process 2, 501, 1994.
[5] D. Bao, H.Gu, A. Kuang, Tliin Solid Films
312
(2002) 37
[6] J. F. Muth el.al J. Appl. Phys.

S5
(1999),
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T.V. Bulkhuzi el.al. J. Lumines. 90 (2000), 223
[8j D.
Haln
el.al Phys. Cond. Mailer 3 (1995)
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C.M Mo el.al J. Appl. Phys.
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[111
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Appl. Phys. 79
(1996),
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K.Q.Dal,P.Q.Bao,N.T.TluicHien Nhiing
van de hien dai cua
vai
ly
chai
ran, luyen lap cac bao cao lai hoi nghi Vat ly chat ran loan quoc lan
ihlr

3,Nha
Trang 8/2001,831-835.
[13]
N.T.T. Hien el.al, Proceeding
ol
the Fifth Vielnamese-Gennan on Physics
and Egineering, Hue, (2002), 232-235.
[14] R. Dingle, Phys. Rev. Lett. 23, 579
(1969)
[15]
Y.K. Park el.al, Appl. Phys.
Lell.
72 (1998), 668
[16] N.X. Dai, N.T.T. Hien, RN. Hai, Proceeding ol" the 3"' National Conlerence
on Optics and Spectroscopy Nha Trang. August
1
1-15"'.
2002.
[17]
Khoa luan lot nghiep - Ngo Xuan Dai 6-2002
[18]
T.D. Canh, N.N. Long, N.D. Phmmg. L.T.T. Binh, Ky yeu
hen
nghi Vat ly
toan quoc lan thu 5 Ha Noi 3.
2001.
119]
N.N. Long, L.T.T. Binh. N.T. Binh. L.D. Khanh. T.V. Tliang.
Proccednigs
ol'

the Fifth
Vietnamese-German
on Physics and Egineering, Hue, (2002).
|2()|
L.T.T. Binh, N.T. Binh, L.D. Khanh. N.L. Long, to be published
in .lournal
of Science VNUH.
[21] N.T.T. Hien, N.X. Dai. P.N. Hai and N.C. Thanh,
Io
be published in Journal
of Science VNUH.
[221 N.D. Phuong, T.D.Canh,
N.N.Long.N.H.Viel,
VNU.journal of Science,
Malhemalics-Physics,2 (2002). 40.
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[23] P.N. Hai, N.C. Thanh, N.T.T. Hien, P.Q.
Tlianh,
K.Q.
Dal and P.T. Nga,
Proceedings of the Filth
Vietnamese-Gcnnan
Seminar on Physics and
Engineering, Hue 2 March 2002,
228.
[24]
N.D. Phuong, T.D. Canh and N.N. Long, Proceedings oi' the
3''
National
conrerence on Optics and

Speclroscopy,
Nha Trang, Augusl
1
1-13'''
,
2002.
1251
Hoang Nam
Nhai
and Pham Quoc Trieu, Proceeding
oi ihe Fil ill
Vietnamese-German Seminar on Physics and Engineering
Hue,
2 March
2002,115.
[26]
Hoang Nam
Nhai
and Pham Quoc Trieu,
Proceeding
of
ihc
Filth
Vietnamese-German Seminar on Physics and Engineering Hue, 2 March 2002
[27] N.T.Thuc Hien, Ngo Xuan Dai, Nguyen Anh Tuan, sc dang lrong ky yeu hc)i
nghi Vat ly chat ran U)an
quc)c
lan
thii
tu,Nui

Ce)c,
Tliai
Nguyen,
1
1.2003.
24