Chế tạo màng ZnO tạp chất (In,N) bán bẫn loại p bằng PP phún xạ magnetron DC, kh.sát các yếu tố ảnh hưởng đến cấu trúc, tính chất điện và tính chất quang của màng bán dẫn loại p

Lu 1
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 !
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1.1 Tổng quan về màng mỏng dẫn điện trong suốt 10
1.2 Vật liệu ZnO 10
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1.3 Cấu trúc vùng năng lượng của ZnO 17
1.4 Tính chất điện và quang của ZnO 18
&=0>4?@9-.A
/&=0B19;@9-./%
"#/$/A
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2.1 ZnO pha tạp loại p 28
2.2 ZnO pha tạp nitơ (ZnO:N) 30
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///JK;@9L4M7N=0B19;@9OP;-.$<
//<&Q;B19ROSTU;2VW8OP;-.$</
2.3 ZnO đồng pha tạp donor – acceptor 34
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H"#HHHXYIZ&[.<A
\P8&10
Lu 2
3.1 Khái niệm về phún xạ 38
3.2 Phún xạ magnetron phẳng 38
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3.3 Các phương pháp đo 40
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<<AHJM;L9cLLo4cLUD9c]9;JM[1^2p82die9q9^24;
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4.1Quy trình chế tạo bia gốm dẫn điện ZnO pha tạp In 53
4.2 Hệ tạo màng trong quá trình phún xạ 55
4.3 Các bước chuẩn bị trước khi phún xạ tạo màng 61
<(162V]y7>Wk
</(162V]y7e49k/
<<6eT2=e49r>Wk/
4.4 Kết quả và bàn luận 64
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DANH MỤC CÁC BẢNG
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28;OP;˜!k™w˜!l™
HJM;L6L>z;L9L>ž>Jn•O3;U46Ld†;PW8
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Lu 9
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b 6qWB1‚@93;U4>Jn]6>ŽU;B196LŒL>84?>4$
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6m;7Jn;iZsjwLŒL>8LQL6B19;HwLŒL>8977wLŒL>8eT
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82N>Ws4749F>e4N79FL^cL>86];Jn[1^2p82di[sj
\P8&10
Lu 10
CHƯƠNG 1:
TỔNG QUAN VỀ VẬT LIỆU ZnO
1.1 Tổng quan về màng mỏng dẫn điện trong suốt
•5‘O`%lwq4•Ÿ;e6868>š14NROP;8]49dO41O
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f;JW874?1•Ÿ;=0>S>68Pas•;49;RT7Jn;
;4NŠ1P•e4W>Q487•@9q¡1W8OP;e“;4R1LJM;
L6Lq6917POSO4Š;8•L6245@9OP;O:;d{>4?
28;1TVWwOP;O:;d{>4?28;1T7P>T4Jn;;4NŠ1>ša3
ŽP13>Jn204R1•B19oO@96Lg;=;4?O2NW;4•4
74?1-.•q‚;d{>4?Jq4O784J;7428;1T28;‹;
q‚q4WJ60>4?OU48>‡>45OPaOPOP;28;1Td{>4?•
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1.2 Vật liệu ZnO
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Lu 11
;8P429w45-.g•=6L>4?P4?m4?9awJK;6L
d†;-.P8L4284f;>9;>Jn^8>1Q444R1Lg;=;4?O
2NW;4•4
1.2.1 Cấu trúc tinh thể ZnO
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Lu 15
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