Dimension TM 3100 Manual Version 4.43B phần 1 pot
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Document Revision History: Dimension 3100 Manual
Revision Date Section(s) Affected
Ref.
DCR
Approval
B 06/01/00 All. 313 A. Varbel
A 08/25/97 Released. N/A M. Leilani
Copyright © 2000 Digital Instruments Veeco Metrology Group
All rights reserved.
Dimension
TM
3100 Manual
Version 4.43B
004-320-000 (standard)
004-320-100 (cleanroom)
Rev. B
Dimension 3100 Manual
TOC-1
Dimension 3100 Manual
Table of Contents
List of Figures
LOF-1
Chapter 1
System Overview
1-1
1.1 Overview
. . . . . . . . . . . . . . . . . . . . . . . . . .1-1
1.2 How to Reach Digital Instruments Veeco
.1-2
1.3 System Overview
. . . . . . . . . . . . . . . . . . .1-3
1.3.1 Dimension 3100 SPM Features
. . . . . . . . 1-3
1.4 Control Station Overview
. . . . . . . . . . . . .1-5
1.4.1 Input and Display Devices
. . . . . . . . . . . . 1-5
1.4.2 Computer
. . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.3 NanoScope IIIa Controller
. . . . . . . . . . . 1-7
1.4.4 Dimension 3100 Controller
. . . . . . . . . . . 1-8
1.5 Dimension 3100 SPM Overview
. . . . . .1-10
1.5.1 Dimension 3100 Microscope Electronics Box
1-10
1.5.2 Optics and Motors Overview
. . . . . . . . . 1-11
1.5.3 Stage System
. . . . . . . . . . . . . . . . . . . . . 1-12
1.5.4 Dimension SPM Head
. . . . . . . . . . . . . . 1-12
1.5.5 Cantilever Holder
. . . . . . . . . . . . . . . . . 1-16
1.5.6 Video Zoom Microscope
. . . . . . . . . . . . 1-19
1.6 Sample Size & Handling
. . . . . . . . . . . .1-20
1.7 Facilities Specifications
. . . . . . . . . . . . .1-20
1.8 Applications
. . . . . . . . . . . . . . . . . . . . . .1-21
1.9 Maintenance and Troubleshooting
. . . . .1-21
